[Scan]
initial_time=2016-01-18T16:53:32
final_time=2016-01-18T16:53:52
ip_count=19
run=1024
dataset=1
scan=65
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.8208E-6
ql1_vset=
ql1_vmon=-8.80032E1
ql1_imon=-6.66845E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.21573E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.2944E-9
ql4_vset=
ql4_vmon=9.29832E-4
ql4_imon=1.39802E-8
mult1=-9.02999E-9
mult2=-2.66472E-9
rf_tmon=-5.49177E-3
rf_agc=3.26727E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.91006E-3
ql5_imon=6.16932E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66326E0
bslens_imon=2.35213E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19653E1
lens5a_imon=2.01518E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12526E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=2.80034E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04428E1
cs_ea1_imon=2.62502E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97461E0
lens1_imon=1.47082E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.48533E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84628E1
cs_ef1a_imon=2.93116E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.02982E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1164E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14922E1
os_ea1_imon=2.39956E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.06415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20786E0
cs_ionrep_imon=1.18802E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92021E2
cs_nozzle_imon=1.93558E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.8926E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99973E1
olens4_imon=4.23946E-9
tplens_vset=0.0E0
tplens_vmon=-1.68273E0
tplens_imon=-2.17481E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99005E1
iondef3_imon=8.6629E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98452E1
iondef2_imon=9.39201E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03196E2
lens6_imon=2.98225E-4
ql6_vset=1.0E-1
ql6_vmon=9.63449E-2
ql6_imon=8.93211E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2751E0
ionrepsh_imon=1.71575E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.19498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2226E0
os_ea2_imon=-6.74064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06236E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.15245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06477E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89615E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11502E1
os_restr2_imon=3.38058E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.31379E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.24353E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58317E1
iondef1_imon=5.1872E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50491E1
iondef4_imon=5.36689E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.51444E-8
olens1_vset=0.0E0
olens1_vmon=1.62125E-3
olens1_imon=1.2013E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.85186E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.62657E-6
window_vset=0.0E0
window_vmon=2.77409E-1
window_imon=-8.49956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82774E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.87137E1
mask2_imon=-4.96767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.00291E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.79409E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=6.77285E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.16933E0
defgridb_imon=5.92693E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.38191E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07804E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62725E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3086E1
cs_fil1_imon=9.92539E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61987E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63219E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.12966E-2
os_fil2_imon=-2.76808E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.42643E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.52181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22216E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32371E-3
inlet_lpb_pmon=2.1186E-2
chamber_ion_pmon=2.24374E-9
chamber_cvt_pmon=2.51647E-3
foreline_cvt_pmon=2.51647E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.22962E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.278E3	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80026E1	-1.66893E-4	-8.80014E1	8.58307E-4	3.43323E-3	9.65118E-2	1.58191E1	-1.98257E1	-1.98936E1	1.49952E1	2.23583E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.11689E-2
2.0E0	3.041E3	2.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80029E1	-7.15256E-4	-8.80015E1	7.39098E-4	3.31402E-3	9.62496E-2	1.58119E1	-1.98651E1	-1.99185E1	1.50153E1	2.2406E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.11689E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80025E1	-4.29153E-4	-8.80013E1	5.48363E-4	3.29018E-3	9.66311E-2	1.58023E1	-1.98272E1	-1.99534E1	1.50282E1	2.24161E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.12204E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80026E1	-8.34465E-4	-8.80016E1	6.91414E-4	3.45707E-3	9.66072E-2	1.57843E1	-1.98145E1	-1.99455E1	1.50232E1	2.23869E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.12594E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80026E1	-2.6226E-4	-8.80014E1	7.39098E-4	3.71933E-3	9.68933E-2	1.58468E1	-1.9838E1	-1.9951E1	1.50376E1	2.23678E-9	2.52815E-3	2.52815E-3	6.31817E-3	2.1187E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.10825E-2	-8.80028E1	-7.15256E-4	-8.80014E1	8.34465E-4	3.21865E-3	9.65357E-2	1.58041E1	-1.98609E1	-1.99312E1	1.50322E1	2.23818E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.11482E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80028E1	-5.00679E-4	-8.80017E1	5.48363E-4	3.6478E-3	9.6488E-2	1.58138E1	-1.9834E1	-1.99449E1	1.50265E1	2.24304E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.12403E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.02322E-2	-8.80028E1	-5.96046E-4	-8.80014E1	7.62939E-4	3.8147E-3	9.6488E-2	1.58124E1	-1.97926E1	-1.98802E1	1.49972E1	2.24109E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.12034E-2
1.2E1	7.1E1	0.0E0	4.85E2	3.23E2	-7.07733E-2	-8.80028E1	-8.10623E-4	-8.80016E1	4.05312E-4	3.57628E-3	9.65118E-2	1.58321E1	-1.98458E1	-1.99596E1	1.50207E1	2.23818E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.11666E-2
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.11597E-2	-8.80026E1	-4.52995E-4	-8.80016E1	5.48363E-4	3.6478E-3	9.63211E-2	1.58299E1	-1.98519E1	-1.99282E1	1.50473E1	2.24155E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.12957E-2
1.4E1	1.17E2	0.0E0	5.66E2	3.82E2	-7.14689E-2	-8.80028E1	-3.8147E-4	-8.80013E1	8.58307E-4	3.83854E-3	9.64165E-2	1.58203E1	-1.98281E1	-1.99125E1	1.50118E1	2.2372E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.11666E-2
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.10051E-2	-8.80027E1	-4.76837E-4	-8.80015E1	9.29832E-4	3.6478E-3	9.63688E-2	1.57807E1	-1.98464E1	-1.99216E1	1.50196E1	2.21401E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.11666E-2
1.6E1	3.36E2	0.0E0	6.47E2	4.41E2	-7.13143E-2	-8.80028E1	-3.09944E-4	-8.80014E1	9.29832E-4	3.8147E-3	9.67026E-2	1.58345E1	-1.98128E1	-1.99473E1	1.50094E1	2.22536E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.12957E-2
1.7E1	7.69E2	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80025E1	-6.91414E-4	-8.80016E1	9.53674E-4	4.1008E-3	9.63926E-2	1.58197E1	-1.97957E1	-1.9942E1	1.50322E1	2.22558E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.11482E-2
1.8E1	3.212E3	1.0E0	7.27E2	5.0E2	-7.286E-2	-8.80028E1	-1.04904E-3	-8.80016E1	1.00136E-3	3.76701E-3	9.65118E-2	1.58047E1	-1.9838E1	-1.99864E1	1.49974E1	2.23429E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.12587E-2
1.9E1	1.922E3	2.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80027E1	-9.29832E-4	-8.80018E1	7.62939E-4	3.76701E-3	9.65118E-2	1.58292E1	-1.98476E1	-1.99284E1	1.4979E1	2.24109E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.11115E-2
2.0E1	2.8E1	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80028E1	-6.19888E-4	-8.80016E1	9.53674E-4	3.83854E-3	9.63449E-2	1.58062E1	-1.98373E1	-1.99408E1	1.5006E1	2.24304E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.1185E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80027E1	-3.33786E-4	-8.80011E1	6.67572E-4	3.76701E-3	9.6488E-2	1.58286E1	-1.98458E1	-1.99325E1	1.50097E1	2.2372E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.1185E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.8003E1	-3.09944E-4	-8.80011E1	9.05991E-4	3.67165E-3	9.62496E-2	1.58185E1	-1.98128E1	-1.9972E1	1.50154E1	2.23773E-9	2.52707E-3	2.52707E-3	6.31817E-3	2.12051E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80032E1	-5.48363E-4	-8.80015E1	9.29832E-4	3.91006E-3	9.63449E-2	1.58317E1	-1.98452E1	-1.99005E1	1.50491E1	2.24374E-9	2.51647E-3	2.51647E-3	6.32371E-3	2.1186E-2