[Scan]
initial_time=2016-01-18T16:53:59
final_time=2016-01-18T16:54:18
ip_count=19
run=1024
dataset=1
scan=66
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.78687E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-6.86467E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.21562E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.28779E-9
ql4_vset=
ql4_vmon=9.53674E-4
ql4_imon=1.40055E-8
mult1=-9.58386E-9
mult2=-2.7246E-9
rf_tmon=-3.56913E-3
rf_agc=3.34598E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.83854E-3
ql5_imon=6.22046E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.58822E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=2.01047E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54235E1
cs_ef1b_imon=2.80539E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0467E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04519E1
cs_ea1_imon=2.60817E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96565E0
lens1_imon=1.28323E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03528E1
cs_ea2_imon=1.4672E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8419E1
cs_ef1a_imon=2.9135E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.0186E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.29346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=2.3789E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=1.18493E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92043E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01671E1
cs_anode1_imon=2.90233E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.28056E-9
tplens_vset=0.0E0
tplens_vmon=-1.72435E0
tplens_imon=-1.37123E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99408E1
iondef3_imon=8.73827E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98597E1
iondef2_imon=9.23215E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03185E2
lens6_imon=2.98083E-4
ql6_vset=1.0E-1
ql6_vmon=9.65118E-2
ql6_imon=8.79347E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=1.7264E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34186E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23708E0
os_ea2_imon=-4.29124E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06245E2
lens4b_imon=2.00771E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04074E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75199E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11328E1
os_restr2_imon=3.36724E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30974E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.22695E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58443E1
iondef1_imon=5.13692E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49944E1
iondef4_imon=5.40653E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.50983E-8
olens1_vset=0.0E0
olens1_vmon=1.19209E-3
olens1_imon=1.20623E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.28154E-1
window_imon=-8.39144E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82785E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.87101E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.33955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.66903E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.19535E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53089E0
defgridb_imon=5.88675E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.4188E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07071E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62228E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=9.98035E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61867E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63324E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.23448E-2
os_fil2_imon=-2.94828E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.73963E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22306E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.1185E-2
chamber_ion_pmon=2.24109E-9
chamber_cvt_pmon=2.52757E-3
foreline_cvt_pmon=2.52757E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.08546E-1
res40_imon=-2.65194E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.295E3	0.0E0	1.47E2	4.1E1	-7.16233E-2	-8.8003E1	-1.90735E-4	-8.80013E1	9.05991E-4	3.74317E-3	9.6488E-2	1.58333E1	-1.98251E1	-1.99809E1	1.50148E1	2.24207E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.12772E-2
2.0E0	2.891E3	0.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80028E1	-1.19209E-4	-8.80014E1	8.10623E-4	3.57628E-3	9.62734E-2	1.58284E1	-1.98197E1	-1.99425E1	1.50172E1	2.24251E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.11509E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.8003E1	-9.53674E-5	-8.80015E1	1.04904E-3	3.88622E-3	9.62496E-2	1.58427E1	-1.98434E1	-1.99331E1	1.50254E1	2.23637E-9	2.51498E-3	2.51498E-3	6.31269E-3	2.11889E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.12368E-2	-8.80029E1	-3.09944E-4	-8.80014E1	8.10623E-4	3.71933E-3	9.62496E-2	1.57907E1	-1.9866E1	-1.99402E1	1.50074E1	2.23964E-9	2.52707E-3	2.52707E-3	6.32356E-3	2.12413E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80028E1	-2.14577E-4	-8.80013E1	5.72205E-4	3.76701E-3	9.65118E-2	1.58228E1	-1.98042E1	-1.99477E1	1.50278E1	2.23825E-9	2.51919E-3	2.51919E-3	6.31798E-3	2.12779E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80027E1	-5.24521E-4	-8.80013E1	8.10623E-4	3.50475E-3	9.66549E-2	1.58263E1	-1.98368E1	-1.99264E1	1.50208E1	2.2381E-9	2.52293E-3	2.52293E-3	6.3131E-3	2.12573E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80029E1	-6.19888E-4	-8.80012E1	8.58307E-4	3.52859E-3	9.65118E-2	1.58113E1	-1.98302E1	-1.99342E1	1.50346E1	2.24207E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.12218E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80027E1	-4.52995E-4	-8.8001E1	5.24521E-4	3.40939E-3	9.65357E-2	1.57795E1	-1.98501E1	-1.99228E1	1.50088E1	2.23915E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.11298E-2
1.2E1	8.7E1	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80028E1	-6.67572E-4	-8.80016E1	1.0252E-3	3.3617E-3	9.67264E-2	1.58089E1	-1.98194E1	-1.99155E1	1.5028E1	2.23915E-9	2.52647E-3	2.52647E-3	6.34037E-3	2.11482E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80031E1	-4.76837E-4	-8.80015E1	1.09673E-3	3.79086E-3	9.68218E-2	1.58268E1	-1.98169E1	-1.99478E1	1.50238E1	2.23818E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.12587E-2
1.4E1	9.0E1	0.0E0	5.66E2	3.82E2	-7.10825E-2	-8.80028E1	-3.09944E-4	-8.80016E1	9.77516E-4	3.6478E-3	9.67026E-2	1.5789E1	-1.98063E1	-1.99779E1	1.50178E1	2.23583E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.11689E-2
1.5E1	4.7E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80029E1	-3.57628E-4	-8.80012E1	7.39098E-4	3.83854E-3	9.67503E-2	1.58044E1	-1.98452E1	-1.98771E1	1.50124E1	2.23869E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.12232E-2
1.6E1	2.97E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80028E1	-1.90735E-4	-8.80015E1	8.58307E-4	4.14848E-3	9.65118E-2	1.58299E1	-1.98537E1	-1.99089E1	1.50184E1	2.23297E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.1187E-2
1.7E1	7.56E2	1.0E0	6.87E2	4.7E2	-7.19325E-2	-8.8003E1	-4.52995E-4	-8.80011E1	1.38283E-3	3.91006E-3	9.67026E-2	1.57997E1	-1.98116E1	-1.99437E1	1.50149E1	2.24402E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.11482E-2
1.8E1	3.382E3	4.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80029E1	-5.00679E-4	-8.80014E1	8.58307E-4	3.98159E-3	9.66549E-2	1.58353E1	-1.98711E1	-1.99053E1	1.50082E1	2.23487E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.12232E-2
1.9E1	1.758E3	1.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80028E1	-5.24521E-4	-8.80013E1	1.07288E-3	3.50475E-3	9.65118E-2	1.58485E1	-1.98251E1	-2.00075E1	1.50272E1	2.23623E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.11666E-2
2.0E1	2.2E1	0.0E0	8.08E2	5.58E2	-7.18554E-2	-8.80029E1	-4.52995E-4	-8.80012E1	6.67572E-4	4.12464E-3	9.69887E-2	1.58203E1	-1.98579E1	-1.9942E1	1.50286E1	2.24161E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.11829E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80026E1	-5.72205E-4	-8.80012E1	8.58307E-4	4.22001E-3	9.68695E-2	1.5833E1	-1.98515E1	-1.99043E1	1.50115E1	2.23818E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.12034E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80027E1	-4.76837E-4	-8.80014E1	8.58307E-4	3.74317E-3	9.67503E-2	1.57993E1	-1.9817E1	-1.99498E1	1.50148E1	2.23637E-9	2.51814E-3	2.51814E-3	6.32328E-3	2.12067E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80029E1	-2.6226E-4	-8.80013E1	9.53674E-4	3.83854E-3	9.65118E-2	1.58443E1	-1.98597E1	-1.99408E1	1.49944E1	2.24109E-9	2.52757E-3	2.52757E-3	6.30192E-3	2.1185E-2