[Scan]
initial_time=2016-01-18T16:54:25
final_time=2016-01-18T16:54:45
ip_count=19
run=1024
dataset=1
scan=67
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.84249E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-6.84929E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.21311E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.2698E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.3979E-8
mult1=-9.5357E-9
mult2=-2.66871E-9
rf_tmon=-3.9116E-3
rf_agc=3.35739E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.91006E-3
ql5_imon=6.35934E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65896E0
bslens_imon=2.35219E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19962E1
lens5a_imon=1.98825E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12544E2
lens4a_imon=2.04847E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53709E1
cs_ef1b_imon=2.78505E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.01974E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04504E1
cs_ea1_imon=2.60641E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97109E0
lens1_imon=1.73404E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64731E1
os_ef1alow_imon=2.97363E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03833E1
cs_ea2_imon=1.46845E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84567E1
cs_ef1a_imon=2.93605E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.02409E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.27251E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15214E1
os_ea1_imon=2.39705E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63579E1
os_ef1bup_imon=3.06959E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21681E0
cs_ionrep_imon=1.17167E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9203E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01961E1
cs_anode1_imon=2.91625E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.27912E-9
tplens_vset=0.0E0
tplens_vmon=-1.71714E0
tplens_imon=-1.98976E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99276E1
iondef3_imon=8.83428E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98266E1
iondef2_imon=9.37388E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03231E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.66549E-2
ql6_imon=8.8867E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24527E0
ionrepsh_imon=1.7065E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33845E1
lens5b_imon=2.1737E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74764E1
cs_ef2b_imon=3.13804E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22193E0
os_ea2_imon=-5.91727E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0619E2
lens4b_imon=2.00653E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.14341E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03722E0
os_ef2alow_imon=-2.45223E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69089E-1
os_ef2bup_imon=-5.24394E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11386E1
os_restr2_imon=3.38936E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23104E2
cs_ionfoca_imon=6.30338E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01944E1
cs_anode2_imon=2.24315E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58161E1
iondef1_imon=5.48053E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50196E1
iondef4_imon=5.12095E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.51586E-8
olens1_vset=0.0E0
olens1_vmon=1.66893E-3
olens1_imon=1.20253E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14189E0
cs_ionaccel_imon=-1.51271E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02119E2
cs_ionfocb_imon=1.4735E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56556E1
einzel_imon=7.49658E-6
window_vset=0.0E0
window_vmon=2.76725E-1
window_imon=-6.97347E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8281E2
mask1_imon=2.39212E-4
mask2_vset=0.0E0
mask2_vmon=-1.87289E1
mask2_imon=-8.28208E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.12325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.38898E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.0447E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57553E0
defgridb_imon=6.18065E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3335E1
os_fil1_imon=9.39411E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06927E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62831E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30798E1
cs_fil1_imon=9.92768E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6231E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63334E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.8944E-2
os_fil2_imon=-2.67218E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79611E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.35443E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35317E-1
cs_fil2_imon=-2.661E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.06929E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22194E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.12413E-2
chamber_ion_pmon=2.23392E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.06558E-1
res40_imon=-2.31466E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.277E3	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80033E1	-4.05312E-4	-8.80016E1	1.23978E-3	3.67165E-3	9.67264E-2	1.58264E1	-1.98275E1	-1.9939E1	1.50166E1	2.23874E-9	2.51886E-3	2.51886E-3	6.3282E-3	2.12082E-2
2.0E0	2.904E3	0.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80031E1	-3.09944E-4	-8.80016E1	1.00136E-3	3.69549E-3	9.66072E-2	1.58081E1	-1.98379E1	-1.99592E1	1.50346E1	2.23665E-9	2.51581E-3	2.51581E-3	6.32418E-3	2.1258E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80029E1	-5.00679E-4	-8.80015E1	1.0252E-3	3.91006E-3	9.64165E-2	1.58122E1	-1.98602E1	-1.99297E1	1.50201E1	2.23863E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.11829E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80027E1	-5.24521E-4	-8.80015E1	1.12057E-3	3.86238E-3	9.67264E-2	1.57801E1	-1.98236E1	-1.99029E1	1.50292E1	2.23918E-9	2.51287E-3	2.51287E-3	6.31269E-3	2.12067E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80032E1	-4.52995E-4	-8.80013E1	9.77516E-4	3.86238E-3	9.65357E-2	1.58167E1	-1.98356E1	-1.99342E1	1.5013E1	2.24499E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.11115E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80032E1	-5.24521E-4	-8.80014E1	1.07288E-3	3.71933E-3	9.65834E-2	1.57987E1	-1.98362E1	-1.99288E1	1.50226E1	2.24109E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.11666E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80031E1	-3.57628E-4	-8.80014E1	7.86781E-4	4.05312E-3	9.67026E-2	1.57969E1	-1.98621E1	-1.99504E1	1.50256E1	2.24109E-9	2.5199E-3	2.5199E-3	6.27461E-3	2.1185E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80031E1	-4.76837E-4	-8.80016E1	7.15256E-4	4.00543E-3	9.67979E-2	1.57885E1	-1.98251E1	-1.99083E1	1.5022E1	2.23818E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.11666E-2
1.2E1	6.3E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80031E1	-8.34465E-4	-8.80014E1	8.34465E-4	3.55244E-3	9.64403E-2	1.58479E1	-1.98679E1	-1.99292E1	1.50346E1	2.23583E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.10968E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.8003E1	-8.34465E-4	-8.80013E1	9.05991E-4	3.60012E-3	9.67503E-2	1.5812E1	-1.98588E1	-1.99414E1	1.50238E1	2.24359E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.11454E-2
1.4E1	1.05E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.8003E1	-3.09944E-4	-8.80013E1	5.72205E-4	3.40939E-3	9.66787E-2	1.58329E1	-1.97906E1	-1.98981E1	1.50088E1	2.2406E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.1187E-2
1.5E1	5.1E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80029E1	-3.57628E-4	-8.80012E1	6.91414E-4	3.50475E-3	9.70364E-2	1.58257E1	-1.98272E1	-1.99546E1	1.50268E1	2.23526E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.11482E-2
1.6E1	3.08E2	1.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80028E1	-3.8147E-4	-8.80015E1	7.15256E-4	3.3617E-3	9.68933E-2	1.58407E1	-1.98356E1	-1.99167E1	1.50172E1	2.24012E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.11482E-2
1.7E1	8.68E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80028E1	-5.24521E-4	-8.80013E1	6.91414E-4	3.69549E-3	9.67503E-2	1.57957E1	-1.98188E1	-1.9933E1	1.50394E1	2.23526E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.12587E-2
1.8E1	3.379E3	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80029E1	-5.00679E-4	-8.80013E1	5.48363E-4	3.31402E-3	9.67979E-2	1.58029E1	-1.98531E1	-1.99234E1	1.5022E1	2.2372E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.12218E-2
1.9E1	1.914E3	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80031E1	-5.72205E-4	-8.80014E1	4.29153E-4	3.50475E-3	9.67741E-2	1.58245E1	-1.98627E1	-1.99191E1	1.50399E1	2.23526E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.12587E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.15461E-2	-8.80029E1	-7.39098E-4	-8.80012E1	5.48363E-4	3.45707E-3	9.67026E-2	1.58427E1	-1.98257E1	-1.9939E1	1.505E1	2.24207E-9	2.50898E-3	2.50898E-3	6.31288E-3	2.12034E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.80032E1	-8.34465E-4	-8.80013E1	8.10623E-4	3.55244E-3	9.66311E-2	1.58143E1	-1.9844E1	-1.99137E1	1.50382E1	2.23487E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.12232E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80034E1	-6.4373E-4	-8.80012E1	4.29153E-4	3.74317E-3	9.66549E-2	1.58238E1	-1.98977E1	-1.99555E1	1.50304E1	2.23818E-9	2.51225E-3	2.51225E-3	6.31837E-3	2.12218E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80031E1	-6.91414E-4	-8.80014E1	5.72205E-4	3.91006E-3	9.66549E-2	1.58161E1	-1.98266E1	-1.99276E1	1.50196E1	2.23392E-9	2.52276E-3	2.52276E-3	6.29665E-3	2.12413E-2