[Scan]
initial_time=2016-01-18T16:54:52
final_time=2016-01-18T16:55:12
ip_count=19
run=1024
dataset=1
scan=68
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.81316E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-7.17807E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.23134E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.27387E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.3874E-8
mult1=-9.28285E-9
mult2=-2.68268E-9
rf_tmon=-4.56049E-3
rf_agc=3.26246E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=6.08551E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66191E0
bslens_imon=2.33443E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20291E1
lens5a_imon=1.99363E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.0496E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54151E1
cs_ef1b_imon=2.79589E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02047E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04657E1
cs_ea1_imon=2.61111E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98594E0
lens1_imon=2.02296E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65186E1
os_ef1alow_imon=2.98077E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04086E1
cs_ea2_imon=1.44505E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84109E1
cs_ef1a_imon=2.90409E-5
olens2_vset=0.0E0
olens2_vmon=1.0252E-3
olens2_imon=1.02366E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1161E1
os_restr1_imon=4.30687E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14845E1
os_ea1_imon=2.39386E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63901E1
os_ef1bup_imon=3.08703E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20278E0
cs_ionrep_imon=1.18342E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92034E2
cs_nozzle_imon=1.93315E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.89631E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.22874E-9
tplens_vset=0.0E0
tplens_vmon=-1.73682E0
tplens_imon=-1.65098E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99642E1
iondef3_imon=9.08161E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98314E1
iondef2_imon=9.08939E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03233E2
lens6_imon=2.98389E-4
ql6_vset=1.0E-1
ql6_vmon=9.66311E-2
ql6_imon=8.81195E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24236E0
ionrepsh_imon=1.71992E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34002E1
lens5b_imon=2.15598E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74002E1
cs_ef2b_imon=3.11466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20473E0
os_ea2_imon=-5.38859E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06198E2
lens4b_imon=2.00631E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71608E1
cs_ef2a_imon=3.17499E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09737E0
os_ef2alow_imon=-2.65785E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8618E-1
os_ef2bup_imon=-5.34742E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11435E1
os_restr2_imon=3.36688E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23121E2
cs_ionfoca_imon=6.27943E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0175E1
cs_anode2_imon=2.21983E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58287E1
iondef1_imon=5.31285E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5031E1
iondef4_imon=5.49259E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.5106E-8
olens1_vset=0.0E0
olens1_vmon=1.88351E-3
olens1_imon=1.20325E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14117E0
cs_ionaccel_imon=-1.73149E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02122E2
cs_ionfocb_imon=1.47304E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=8.00311E-6
window_vset=0.0E0
window_vmon=2.28251E-1
window_imon=-8.44045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82737E2
mask1_imon=2.38944E-4
mask2_vset=0.0E0
mask2_vmon=-1.87045E1
mask2_imon=-4.54817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.31403E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.58597E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=7.12715E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35477E0
defgridb_imon=6.21221E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33364E1
os_fil1_imon=9.3845E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07076E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62473E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30814E1
cs_fil1_imon=9.94564E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61879E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63177E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.13852E-2
os_fil2_imon=-2.91176E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87575E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.63094E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35105E-1
cs_fil2_imon=-2.47712E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25298E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22212E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=2.13135E-2
chamber_ion_pmon=2.2345E-9
chamber_cvt_pmon=2.52448E-3
foreline_cvt_pmon=2.52448E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.52801E-1
res40_imon=-2.66563E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.325E3	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80029E1	-8.34465E-4	-8.80017E1	1.07288E-3	3.86238E-3	9.68456E-2	1.58091E1	-1.98234E1	-1.9936E1	1.49999E1	2.23907E-9	2.52029E-3	2.52029E-3	6.31332E-3	2.1196E-2
2.0E0	2.984E3	1.0E0	3.16E2	1.6E2	-7.27828E-2	-8.8003E1	-8.10623E-4	-8.80016E1	1.00136E-3	3.86238E-3	9.66311E-2	1.5832E1	-1.98128E1	-1.99769E1	1.50315E1	2.24442E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.12594E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.8003E1	-6.67572E-4	-8.80014E1	9.05991E-4	3.6478E-3	9.64642E-2	1.58079E1	-1.98163E1	-1.99537E1	1.50317E1	2.2426E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.12204E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80028E1	-3.09944E-4	-8.80015E1	1.16825E-3	4.14848E-3	9.68933E-2	1.58303E1	-1.97898E1	-1.9949E1	1.5031E1	2.23297E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.12051E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.8003E1	-6.19888E-4	-8.80016E1	1.0252E-3	3.88622E-3	9.69172E-2	1.57843E1	-1.98198E1	-1.99602E1	1.5045E1	2.2406E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.12594E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80028E1	-6.67572E-4	-8.80014E1	1.33514E-3	3.8147E-3	9.67979E-2	1.58115E1	-1.98322E1	-1.98753E1	1.50184E1	2.23678E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.12775E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80026E1	-4.76837E-4	-8.80014E1	1.0252E-3	3.76701E-3	9.66549E-2	1.58005E1	-1.98495E1	-1.98975E1	1.49962E1	2.23583E-9	2.53031E-3	2.53031E-3	6.33436E-3	2.12775E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80027E1	-6.67572E-4	-8.80011E1	7.86781E-4	3.91006E-3	9.66549E-2	1.57704E1	-1.98452E1	-1.98939E1	1.50238E1	2.23818E-9	2.52099E-3	2.52099E-3	6.28552E-3	2.12034E-2
1.2E1	9.3E1	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80027E1	-6.91414E-4	-8.80016E1	8.58307E-4	3.95775E-3	9.67741E-2	1.58174E1	-1.98184E1	-1.99555E1	1.50346E1	2.24109E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.12957E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80026E1	-2.86102E-4	-8.80012E1	7.86781E-4	3.62396E-3	9.65118E-2	1.58378E1	-1.98341E1	-1.9942E1	1.50552E1	2.2369E-9	2.52197E-3	2.52197E-3	6.3126E-3	2.12082E-2
1.4E1	1.01E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80026E1	-3.57628E-4	-8.80015E1	7.15256E-4	3.57628E-3	9.67741E-2	1.57775E1	-1.98018E1	-2.00161E1	1.50151E1	2.24315E-9	2.52066E-3	2.52066E-3	6.3245E-3	2.11998E-2
1.5E1	5.6E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80028E1	-8.34465E-4	-8.80014E1	9.05991E-4	3.57628E-3	9.64403E-2	1.58421E1	-1.98133E1	-1.9952E1	1.5004E1	2.24161E-9	2.5147E-3	2.5147E-3	6.29067E-3	2.11267E-2
1.6E1	3.04E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80027E1	-8.10623E-4	-8.80015E1	6.19888E-4	3.50475E-3	9.66311E-2	1.58059E1	-1.98711E1	-1.99197E1	1.50376E1	2.23964E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.12232E-2
1.7E1	7.49E2	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80028E1	-7.15256E-4	-8.80018E1	4.76837E-4	3.45707E-3	9.66787E-2	1.58415E1	-1.98346E1	-1.99414E1	1.50611E1	2.23429E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.1185E-2
1.8E1	3.298E3	1.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80028E1	-7.39098E-4	-8.80016E1	4.05312E-4	3.67165E-3	9.64642E-2	1.58424E1	-1.98367E1	-1.99181E1	1.50172E1	2.24155E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.12594E-2
1.9E1	1.764E3	0.0E0	7.68E2	5.29E2	-7.43285E-2	-8.8003E1	-6.91414E-4	-8.80012E1	2.6226E-4	3.67165E-3	9.68933E-2	1.58281E1	-1.98639E1	-1.99486E1	1.50334E1	2.23818E-9	2.52428E-3	2.52428E-3	6.3514E-3	2.11115E-2
2.0E1	2.5E1	0.0E0	8.08E2	5.58E2	-7.40192E-2	-8.80031E1	-5.24521E-4	-8.80016E1	4.52995E-4	3.69549E-3	9.68456E-2	1.58233E1	-1.98535E1	-1.99349E1	1.5016E1	2.24161E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.12768E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80029E1	-8.10623E-4	-8.80016E1	8.58307E-4	3.67165E-3	9.69648E-2	1.58238E1	-1.987E1	-1.99219E1	1.50093E1	2.24155E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.11509E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80031E1	-6.19888E-4	-8.80017E1	8.34465E-4	3.62396E-3	9.68933E-2	1.5829E1	-1.9851E1	-1.99402E1	1.50221E1	2.23392E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.12051E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80029E1	-9.05991E-4	-8.80015E1	7.39098E-4	4.07696E-3	9.66311E-2	1.58287E1	-1.98314E1	-1.99642E1	1.5031E1	2.2345E-9	2.52448E-3	2.52448E-3	6.31798E-3	2.13135E-2