[Scan]
initial_time=2016-01-18T16:55:19
final_time=2016-01-18T16:55:38
ip_count=19
run=1024
dataset=1
scan=69
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.76958E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-6.72042E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.20496E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.32625E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.40521E-8
mult1=-1.02914E-8
mult2=-2.81537E-9
rf_tmon=-4.39739E-3
rf_agc=3.37751E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.43323E-3
ql5_imon=6.09255E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71136E0
bslens_imon=2.51735E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1929E1
lens5a_imon=2.00117E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1255E2
lens4a_imon=2.04935E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5477E1
cs_ef1b_imon=2.79277E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04655E2
lens23_imon=1.02385E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04553E1
cs_ea1_imon=2.59876E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99186E0
lens1_imon=1.59176E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64488E1
os_ef1alow_imon=2.9445E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03837E1
cs_ea2_imon=1.47373E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=2.94414E-5
olens2_vset=0.0E0
olens2_vmon=9.29832E-4
olens2_imon=1.01978E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.12211E1
os_restr1_imon=4.32806E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15067E1
os_ea1_imon=2.38904E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63449E1
os_ef1bup_imon=3.04036E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20374E0
cs_ionrep_imon=1.163E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9205E2
cs_nozzle_imon=1.93549E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01533E1
cs_anode1_imon=2.89368E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.24601E-9
tplens_vset=0.0E0
tplens_vmon=-1.71367E0
tplens_imon=-1.56576E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99709E1
iondef3_imon=8.78344E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98358E1
iondef2_imon=9.6172E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03211E2
lens6_imon=2.98078E-4
ql6_vset=1.0E-1
ql6_vmon=9.67503E-2
ql6_imon=8.79729E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26312E0
ionrepsh_imon=1.73598E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33425E1
lens5b_imon=2.1738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.14632E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2521E0
os_ea2_imon=-6.41408E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06223E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71954E1
cs_ef2a_imon=3.14596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.00711E0
os_ef2alow_imon=-2.81412E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.38869E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11688E1
os_restr2_imon=3.3867E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.29671E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02055E1
cs_anode2_imon=2.2147E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5769E1
iondef1_imon=5.45205E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50082E1
iondef4_imon=5.61196E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27953E1
olens3_imon=2.50803E-8
olens1_vset=0.0E0
olens1_vmon=1.43051E-3
olens1_imon=1.1928E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09831E0
cs_ionaccel_imon=-2.23388E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47709E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57018E1
einzel_imon=7.89687E-6
window_vset=0.0E0
window_vmon=2.84016E-1
window_imon=-1.21756E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8272E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.87798E1
mask2_imon=-2.91341E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.18202E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.7229E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.11591E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26259E0
defgridb_imon=5.87444E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.37837E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07131E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62561E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30827E1
cs_fil1_imon=9.9299E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61759E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6314E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05416E-2
os_fil2_imon=-3.08042E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.56269E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.39486E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.01958E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22309E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.12594E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.3947E-1
res40_imon=-2.91142E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.272E3	1.0E0	1.47E2	4.1E1	-7.18554E-2	-8.80033E1	-7.15256E-4	-8.80016E1	7.86781E-4	3.52859E-3	9.65118E-2	1.58297E1	-1.98234E1	-1.99083E1	1.49824E1	2.24062E-9	2.52362E-3	2.52362E-3	6.33538E-3	2.12204E-2
2.0E0	3.028E3	3.0E0	3.16E2	1.6E2	-7.27053E-2	-8.8003E1	-7.62939E-4	-8.80014E1	8.10623E-4	3.6478E-3	9.63688E-2	1.58032E1	-1.98434E1	-1.99254E1	1.50126E1	2.23583E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.12594E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80028E1	-8.58307E-4	-8.80016E1	1.14441E-3	3.74317E-3	9.62973E-2	1.58248E1	-1.98269E1	-1.99516E1	1.50271E1	2.2361E-9	2.51724E-3	2.51724E-3	6.32075E-3	2.12687E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80027E1	-5.00679E-4	-8.80016E1	1.14441E-3	3.26633E-3	9.61781E-2	1.58299E1	-1.9841E1	-1.99222E1	1.50461E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80028E1	-7.15256E-4	-8.80012E1	8.10623E-4	3.3617E-3	9.62973E-2	1.58119E1	-1.979E1	-1.99654E1	1.50178E1	2.23011E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.11689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80029E1	-5.24521E-4	-8.80014E1	1.14441E-3	3.55244E-3	9.67026E-2	1.58089E1	-1.98669E1	-1.99474E1	1.50172E1	2.24304E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.12587E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80031E1	-8.10623E-4	-8.80014E1	9.05991E-4	3.55244E-3	9.66072E-2	1.5805E1	-1.98039E1	-1.99455E1	1.50149E1	2.23526E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.12403E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80029E1	-5.72205E-4	-8.80017E1	7.86781E-4	3.50475E-3	9.6488E-2	1.57897E1	-1.98338E1	-1.99774E1	1.50689E1	2.23678E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.13139E-2
1.2E1	8.4E1	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80028E1	-7.62939E-4	-8.80017E1	6.4373E-4	3.3617E-3	9.65595E-2	1.58101E1	-1.98332E1	-1.99252E1	1.50142E1	2.24597E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.12218E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80029E1	-7.62939E-4	-8.80017E1	6.19888E-4	3.31402E-3	9.67264E-2	1.58545E1	-1.98865E1	-1.99237E1	1.50112E1	2.24538E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.11328E-2
1.4E1	9.9E1	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.8003E1	-8.10623E-4	-8.80017E1	7.62939E-4	3.33786E-3	9.65357E-2	1.57171E1	-1.97803E1	-2.00163E1	1.50155E1	2.23915E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.12034E-2
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80026E1	-6.91414E-4	-8.80014E1	8.82149E-4	3.33786E-3	9.68695E-2	1.5872E1	-1.98422E1	-1.99282E1	1.5019E1	2.2406E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.1187E-2
1.6E1	3.06E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80028E1	-8.34465E-4	-8.80013E1	5.48363E-4	3.43323E-3	9.69648E-2	1.58281E1	-1.98452E1	-1.99191E1	1.50262E1	2.24304E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.11666E-2
1.7E1	8.07E2	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80027E1	-8.34465E-4	-8.80011E1	6.91414E-4	3.33786E-3	9.67026E-2	1.57566E1	-1.98392E1	-1.9963E1	1.50052E1	2.23915E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.13142E-2
1.8E1	3.274E3	3.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80027E1	-6.4373E-4	-8.80013E1	1.12057E-3	3.57628E-3	9.63926E-2	1.58431E1	-1.98344E1	-1.99804E1	1.501E1	2.24207E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.12218E-2
1.9E1	1.873E3	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80022E1	-5.24521E-4	-8.80014E1	8.34465E-4	3.43323E-3	9.62973E-2	1.58311E1	-1.9841E1	-1.99456E1	1.50268E1	2.23235E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.11666E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80028E1	-9.29832E-4	-8.80011E1	6.19888E-4	3.52859E-3	9.66072E-2	1.57885E1	-1.98192E1	-1.99414E1	1.50238E1	2.24207E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.13327E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80029E1	-6.19888E-4	-8.80015E1	6.67572E-4	3.48091E-3	9.66311E-2	1.57753E1	-1.98699E1	-1.99294E1	1.49962E1	2.23678E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.12957E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.8003E1	-5.00679E-4	-8.80016E1	7.86781E-4	3.3617E-3	9.65357E-2	1.57725E1	-1.98346E1	-1.99343E1	1.50207E1	2.24304E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.12034E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80029E1	-5.96046E-4	-8.80013E1	5.00679E-4	3.43323E-3	9.67503E-2	1.5769E1	-1.98358E1	-1.99709E1	1.50082E1	2.23773E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.12594E-2