[Scan]
initial_time=2016-01-18T16:56:12
final_time=2016-01-18T16:56:32
ip_count=19
run=1024
dataset=1
scan=71
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.79758E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-6.66535E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.14107E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.14709E-9
ql4_vset=
ql4_vmon=9.05991E-4
ql4_imon=1.38893E-8
mult1=-9.05407E-9
mult2=-2.6727E-9
rf_tmon=-4.06781E-3
rf_agc=3.30812E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.93391E-3
ql5_imon=5.81241E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61784E0
bslens_imon=2.39814E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19659E1
lens5a_imon=1.98545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12554E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53812E1
cs_ef1b_imon=2.80042E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.0234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04469E1
cs_ea1_imon=2.61299E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96222E0
lens1_imon=1.60178E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64776E1
os_ef1alow_imon=2.97835E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03319E1
cs_ea2_imon=1.49772E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84533E1
cs_ef1a_imon=2.93526E-5
olens2_vset=0.0E0
olens2_vmon=6.91414E-4
olens2_imon=1.03286E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11332E1
os_restr1_imon=4.28817E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.3762E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63751E1
os_ef1bup_imon=3.07948E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22673E0
cs_ionrep_imon=1.18024E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92046E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0196E1
cs_anode1_imon=2.90294E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.24225E-9
tplens_vset=0.0E0
tplens_vmon=-1.70455E0
tplens_imon=-4.29845E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99384E1
iondef3_imon=8.76554E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98206E1
iondef2_imon=9.25752E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03222E2
lens6_imon=2.98392E-4
ql6_vset=1.0E-1
ql6_vmon=9.67026E-2
ql6_imon=8.72183E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26095E0
ionrepsh_imon=1.72637E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34177E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74461E1
cs_ef2b_imon=3.12987E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20255E0
os_ea2_imon=-5.67882E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06222E2
lens4b_imon=2.0074E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71449E1
cs_ef2a_imon=3.15767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03892E0
os_ef2alow_imon=-2.50855E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95493E-1
os_ef2bup_imon=-5.29918E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11315E1
os_restr2_imon=3.38113E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.27698E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.23534E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58101E1
iondef1_imon=5.29692E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50262E1
iondef4_imon=5.38375E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27953E1
olens3_imon=2.50761E-8
olens1_vset=0.0E0
olens1_vmon=1.45435E-3
olens1_imon=1.2103E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17474E0
cs_ionaccel_imon=-1.66059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56521E1
einzel_imon=7.71912E-6
window_vset=0.0E0
window_vmon=2.5881E-1
window_imon=-6.90995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82776E2
mask1_imon=2.39101E-4
mask2_vset=0.0E0
mask2_vmon=-1.8697E1
mask2_imon=-6.45817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92601E3
multa_neg_imon=8.07889E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.41891E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4971E0
defgridb_imon=6.26318E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.42287E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07173E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63056E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30849E1
cs_fil1_imon=9.95256E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62308E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63651E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92705E-2
os_fil2_imon=-2.69235E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.15814E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34771E-1
cs_fil2_imon=-2.55334E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03775E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2246E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3723E-3
inlet_lpb_pmon=2.12232E-2
chamber_ion_pmon=2.23583E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.82578E-1
res40_imon=-2.56068E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.312E3	1.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80025E1	-4.52995E-4	-8.80015E1	1.0252E-3	3.71933E-3	9.65834E-2	1.58233E1	-1.98511E1	-1.99219E1	1.50569E1	2.23678E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.12594E-2
2.0E0	2.955E3	3.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80027E1	-5.96046E-4	-8.80012E1	6.67572E-4	3.62396E-3	9.65595E-2	1.57867E1	-1.98171E1	-1.99334E1	1.50214E1	2.23392E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.1187E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80029E1	-2.86102E-4	-8.80014E1	5.48363E-4	3.91006E-3	9.66072E-2	1.58292E1	-1.98346E1	-1.99508E1	1.50232E1	2.2327E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.12204E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80026E1	-3.8147E-4	-8.80015E1	8.34465E-4	3.50475E-3	9.66787E-2	1.5812E1	-1.98387E1	-1.99366E1	1.50346E1	2.23297E-9	2.52599E-3	2.52599E-3	6.32356E-3	2.12775E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80029E1	4.76837E-5	-8.80013E1	1.09673E-3	3.69549E-3	9.68456E-2	1.57916E1	-1.98459E1	-1.99702E1	1.50365E1	2.2406E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.12051E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80026E1	-3.57628E-4	-8.80012E1	1.26362E-3	3.6478E-3	9.68933E-2	1.5815E1	-1.98057E1	-1.99343E1	1.50172E1	2.23429E-9	2.52977E-3	2.52977E-3	6.3074E-3	2.11482E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80028E1	-4.05312E-4	-8.8001E1	1.04904E-3	3.71933E-3	9.66549E-2	1.57957E1	-1.98116E1	-1.99624E1	1.50256E1	2.23915E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.12218E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80028E1	-1.19209E-4	-8.80014E1	8.10623E-4	3.40939E-3	9.66072E-2	1.58305E1	-1.982E1	-1.99143E1	1.5004E1	2.23332E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.12218E-2
1.2E1	7.6E1	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80027E1	-1.19209E-4	-8.80015E1	9.77516E-4	3.62396E-3	9.67026E-2	1.58149E1	-1.98555E1	-1.99678E1	1.50274E1	2.24155E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.12413E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80027E1	-4.76837E-4	-8.80014E1	1.09673E-3	3.98159E-3	9.63688E-2	1.58327E1	-1.9834E1	-1.99573E1	1.50328E1	2.23623E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.12403E-2
1.4E1	1.22E2	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80027E1	-5.00679E-4	-8.80016E1	9.77516E-4	3.76701E-3	9.6488E-2	1.58728E1	-1.99231E1	-1.99307E1	1.50352E1	2.23041E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.12403E-2
1.5E1	8.0E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80028E1	-5.72205E-4	-8.80012E1	1.14441E-3	3.88622E-3	9.67503E-2	1.58124E1	-1.98379E1	-1.9942E1	1.50197E1	2.23107E-9	2.52923E-3	2.52923E-3	6.34518E-3	2.11328E-2
1.6E1	3.4E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.8003E1	-5.24521E-4	-8.80012E1	6.67572E-4	3.6478E-3	9.63926E-2	1.58292E1	-1.98222E1	-1.99443E1	1.50172E1	2.24207E-9	2.52647E-3	2.52647E-3	6.3514E-3	2.12403E-2
1.7E1	8.15E2	1.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80027E1	-3.8147E-4	-8.80013E1	8.34465E-4	3.60012E-3	9.64642E-2	1.58354E1	-1.98596E1	-1.99178E1	1.49943E1	2.24012E-9	2.52428E-3	2.52428E-3	6.26916E-3	2.1185E-2
1.8E1	3.419E3	1.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80023E1	-4.76837E-4	-8.80017E1	1.0252E-3	3.60012E-3	9.63926E-2	1.58091E1	-1.98084E1	-1.99004E1	1.50286E1	2.23108E-9	2.51752E-3	2.51752E-3	6.33297E-3	2.11754E-2
1.9E1	1.901E3	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80026E1	-6.4373E-4	-8.80018E1	1.16825E-3	3.6478E-3	9.65834E-2	1.58008E1	-1.98659E1	-1.99278E1	1.50589E1	2.24328E-9	2.51911E-3	2.51911E-3	6.34301E-3	2.12358E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80028E1	-1.43051E-4	-8.80016E1	1.09673E-3	3.86238E-3	9.67503E-2	1.57873E1	-1.98263E1	-1.99481E1	1.50254E1	2.23138E-9	2.51564E-3	2.51564E-3	6.32075E-3	2.12687E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.8003E1	-1.43051E-4	-8.80017E1	1.12057E-3	3.67165E-3	9.68695E-2	1.5806E1	-1.98616E1	-1.99552E1	1.50209E1					
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.8003E1	-2.14577E-4	-8.80015E1	1.21593E-3	4.02927E-3	9.67026E-2	1.57879E1	-1.97355E1	-1.99579E1	1.50387E1	2.24214E-9	2.52293E-3	2.52293E-3	6.28468E-3	2.11616E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80029E1	-2.6226E-4	-8.80015E1	9.05991E-4	3.93391E-3	9.67026E-2	1.58101E1	-1.98206E1	-1.99384E1	1.50262E1	2.23583E-9	2.51739E-3	2.51739E-3	6.3723E-3	2.12232E-2