[Scan]
initial_time=2016-01-18T16:57:06
final_time=2016-01-18T16:57:25
ip_count=19
run=1024
dataset=1
scan=73
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.81518E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.77967E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.20274E-9
ql3_vset=
ql3_vmon=-8.8002E1
ql3_imon=-2.21411E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.38785E-8
mult1=-9.65304E-9
mult2=-2.87024E-9
rf_tmon=-4.68055E-3
rf_agc=3.34212E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.33786E-3
ql5_imon=6.1059E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66116E0
bslens_imon=2.08026E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19535E1
lens5a_imon=2.00484E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12564E2
lens4a_imon=2.05085E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53948E1
cs_ef1b_imon=2.78416E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04671E2
lens23_imon=1.0204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04517E1
cs_ea1_imon=2.60648E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98819E0
lens1_imon=1.64685E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64739E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03825E1
cs_ea2_imon=1.4763E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84612E1
cs_ef1a_imon=2.9275E-5
olens2_vset=0.0E0
olens2_vmon=7.62939E-4
olens2_imon=1.03168E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1176E1
os_restr1_imon=4.28793E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14749E1
os_ea1_imon=2.36259E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63224E1
os_ef1bup_imon=3.07721E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20863E0
cs_ionrep_imon=1.17255E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92001E2
cs_nozzle_imon=1.93457E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02052E1
cs_anode1_imon=2.91366E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.25287E-9
tplens_vset=0.0E0
tplens_vmon=-1.67204E0
tplens_imon=-4.10011E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9952E1
iondef3_imon=8.8018E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9867E1
iondef2_imon=9.49599E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03201E2
lens6_imon=2.98173E-4
ql6_vset=1.0E-1
ql6_vmon=9.68695E-2
ql6_imon=8.62777E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25332E0
ionrepsh_imon=1.74259E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33897E1
lens5b_imon=2.17527E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.14046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21659E0
os_ea2_imon=-6.04679E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06197E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71308E1
cs_ef2a_imon=3.15393E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02774E0
os_ef2alow_imon=-2.3797E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98879E-1
os_ef2bup_imon=-5.20161E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11441E1
os_restr2_imon=3.39346E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.30883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02127E1
cs_anode2_imon=2.234E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58268E1
iondef1_imon=5.25004E-6
iondef4_vset=1.53E1
iondef4_vmon=1.501E1
iondef4_imon=5.43106E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27953E1
olens3_imon=2.50774E-8
olens1_vset=0.0E0
olens1_vmon=1.95503E-3
olens1_imon=1.21121E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10769E0
cs_ionaccel_imon=-1.67235E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02124E2
cs_ionfocb_imon=1.47294E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5643E1
einzel_imon=7.76269E-6
window_vset=0.0E0
window_vmon=2.66874E-1
window_imon=-9.46293E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82798E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.8718E1
mask2_imon=-8.04075E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.63012E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.84411E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=6.9543E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41581E0
defgridb_imon=6.16093E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33271E1
os_fil1_imon=9.41721E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06986E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62767E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.96307E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61686E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63313E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83077E-2
os_fil2_imon=-2.60013E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.46447E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36375E-1
cs_fil2_imon=-1.97013E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.05622E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22456E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3514E-3
inlet_lpb_pmon=2.12218E-2
chamber_ion_pmon=2.23915E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40064E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.28394E-1
res40_imon=-2.53689E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.285E3	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80027E1	-7.15256E-4	-8.80014E1	6.4373E-4	3.60012E-3	9.67026E-2	1.58064E1	-1.98539E1	-1.9946E1	1.50346E1					
2.0E0	2.987E3	0.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80029E1	-5.96046E-4	-8.80012E1	6.67572E-4	3.55244E-3	9.64403E-2	1.58338E1	-1.98545E1	-1.99206E1	1.5013E1	2.23869E-9	2.51203E-3	2.51203E-3	6.33977E-3	2.12051E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80029E1	-3.8147E-4	-8.80014E1	7.62939E-4	3.6478E-3	9.66072E-2	1.58327E1	-1.98358E1	-1.99284E1	1.50208E1	2.23566E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.1258E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80028E1	-4.52995E-4	-8.80014E1	1.04904E-3	3.60012E-3	9.65357E-2	1.58256E1	-1.98074E1	-1.99178E1	1.50184E1	2.24106E-9	2.51814E-3	2.51814E-3	6.29157E-3	2.12067E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80027E1	-4.05312E-4	-8.80011E1	1.0252E-3	3.71933E-3	9.67741E-2	1.58221E1	-1.9805E1	-1.99588E1	1.50274E1	2.23623E-9	2.51662E-3	2.51662E-3	6.3514E-3	2.12218E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80027E1	-5.72205E-4	-8.80013E1	6.4373E-4	3.91006E-3	9.66311E-2	1.58035E1	-1.98513E1	-1.99516E1	1.49992E1	2.23623E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.11666E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80028E1	-7.39098E-4	-8.80012E1	6.19888E-4	3.52859E-3	9.66311E-2	1.58107E1	-1.98446E1	-1.9933E1	1.5025E1	2.23526E-9	2.51225E-3	2.51225E-3	6.27461E-3	2.11298E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80029E1	-5.24521E-4	-8.80013E1	5.48363E-4	3.40939E-3	9.64403E-2	1.5815E1	-1.98169E1	-1.99219E1	1.50178E1	2.23869E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.12051E-2
1.2E1	7.2E1	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80028E1	-7.39098E-4	-8.80015E1	6.19888E-4	3.33786E-3	9.63211E-2	1.57843E1	-1.98398E1	-1.99258E1	1.50178E1	2.2372E-9	2.51334E-3	2.51334E-3	6.29645E-3	2.12034E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80028E1	-5.96046E-4	-8.80012E1	5.72205E-4	3.3617E-3	9.63926E-2	1.58029E1	-1.98368E1	-1.99197E1	1.50236E1	2.23678E-9	2.53031E-3	2.53031E-3	6.33977E-3	2.11509E-2
1.4E1	8.9E1	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80027E1	-3.8147E-4	-8.80017E1	7.39098E-4	3.43323E-3	9.65118E-2	1.57908E1	-1.98316E1	-1.99001E1	1.5037E1	2.23915E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.12587E-2
1.5E1	7.8E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80027E1	-9.05991E-4	-8.80015E1	6.91414E-4	3.98159E-3	9.66311E-2	1.58197E1	-1.98464E1	-1.99644E1	1.50136E1	2.24825E-9	2.52276E-3	2.52276E-3	6.3723E-3	2.11509E-2
1.6E1	3.09E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80024E1	-7.86781E-4	-8.80015E1	6.19888E-4	3.3617E-3	9.65595E-2	1.58351E1	-1.98234E1	-1.99455E1	1.50039E1	2.22916E-9	2.52492E-3	2.52492E-3	6.2645E-3	2.1187E-2
1.7E1	7.91E2	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80026E1	-5.24521E-4	-8.80015E1	7.86781E-4	3.67165E-3	9.68218E-2	1.58173E1	-1.98808E1	-1.99347E1	1.50197E1	2.23487E-9	2.52276E-3	2.52276E-3	6.35601E-3	2.12051E-2
1.8E1	3.386E3	3.0E0	7.27E2	5.0E2	-7.13915E-2	-8.80027E1	-9.53674E-5	-8.80012E1	5.48363E-4	3.50475E-3	9.69887E-2	1.58321E1	-1.98251E1	-1.9926E1	1.49889E1	2.24062E-9	2.5147E-3	2.5147E-3	6.29624E-3	2.12016E-2
1.9E1	1.904E3	2.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80029E1	-4.05312E-4	-8.80014E1	4.05312E-4	3.50475E-3	9.67741E-2	1.58274E1	-1.98305E1	-1.99414E1	1.50412E1	2.23915E-9	2.52318E-3	2.52318E-3	6.28006E-3	2.12587E-2
2.0E1	2.0E1	0.0E0	8.08E2	5.58E2	-7.12368E-2	-8.80025E1	-3.57628E-4	-8.80013E1	8.82149E-4	3.33786E-3	9.61781E-2	1.58624E1	-1.98891E1	-1.9945E1	1.5037E1	2.23964E-9	2.51847E-3	2.51847E-3	6.28592E-3	2.12232E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80026E1	-2.6226E-4	-8.80016E1	5.48363E-4	3.40939E-3	9.66072E-2	1.58162E1	-1.98139E1	-1.9929E1	1.50323E1	2.23332E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.12403E-2
2.2E1	1.5E1	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80026E1	-5.72205E-4	-8.80016E1	7.15256E-4	3.33786E-3	9.63211E-2	1.5729E1	-1.97737E1	-2.00297E1	1.50238E1	2.24106E-9	2.52448E-3	2.52448E-3	6.27052E-3	2.12067E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80025E1	-5.00679E-4	-8.8002E1	7.39098E-4	3.33786E-3	9.68695E-2	1.58268E1	-1.9867E1	-1.9952E1	1.501E1	2.23915E-9	2.51662E-3	2.51662E-3	6.3514E-3	2.12218E-2