[Scan]
initial_time=2016-01-18T16:57:32
final_time=2016-01-18T16:57:52
ip_count=19
run=1024
dataset=1
scan=74
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.12368E-2
qbias_imon=-3.74979E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-6.99306E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.21326E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.3131E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.39525E-8
mult1=-9.89237E-9
mult2=-2.68125E-9
rf_tmon=-4.31959E-3
rf_agc=3.34569E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.50475E-3
ql5_imon=6.19447E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65692E0
bslens_imon=2.53179E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19807E1
lens5a_imon=2.00317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1255E2
lens4a_imon=2.05181E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53888E1
cs_ef1b_imon=2.78304E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02181E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04563E1
cs_ea1_imon=2.60496E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99124E0
lens1_imon=1.2698E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64586E1
os_ef1alow_imon=2.98235E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03399E1
cs_ea2_imon=1.49234E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8473E1
cs_ef1a_imon=2.92397E-5
olens2_vset=0.0E0
olens2_vmon=9.53674E-4
olens2_imon=1.02822E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11325E1
os_restr1_imon=4.26479E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14902E1
os_ea1_imon=2.38009E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63904E1
os_ef1bup_imon=3.09979E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20847E0
cs_ionrep_imon=1.17416E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92037E2
cs_nozzle_imon=1.93652E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02302E1
cs_anode1_imon=2.89947E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.20005E-9
tplens_vset=0.0E0
tplens_vmon=-1.70968E0
tplens_imon=-3.81514E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99328E1
iondef3_imon=8.54298E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98594E1
iondef2_imon=9.19076E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03193E2
lens6_imon=2.98255E-4
ql6_vset=1.0E-1
ql6_vmon=9.64642E-2
ql6_imon=8.82339E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=1.72829E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33959E1
lens5b_imon=2.17267E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74311E1
cs_ef2b_imon=3.12697E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24035E0
os_ea2_imon=-7.57424E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06216E2
lens4b_imon=2.00821E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71358E1
cs_ef2a_imon=3.16958E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05903E0
os_ef2alow_imon=-2.59651E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03203E-1
os_ef2bup_imon=-5.3144E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11537E1
os_restr2_imon=3.37125E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.28619E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02235E1
cs_anode2_imon=2.23007E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5824E1
iondef1_imon=5.07589E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50515E1
iondef4_imon=5.27529E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.5065E-8
olens1_vset=0.0E0
olens1_vmon=1.38283E-3
olens1_imon=1.21013E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14021E0
cs_ionaccel_imon=-1.72746E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02167E2
cs_ionfocb_imon=1.47407E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.59389E-6
window_vset=0.0E0
window_vmon=2.74488E-1
window_imon=-5.86618E-7
mask1_vset=-4.8E2
mask1_vmon=-4.828E2
mask1_imon=2.39061E-4
mask2_vset=0.0E0
mask2_vmon=-1.86601E1
mask2_imon=-7.2419E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.74753E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.70371E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.13332E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.12307E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33253E1
os_fil1_imon=9.40334E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07357E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62533E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30871E1
cs_fil1_imon=9.95318E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63043E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63634E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72881E-2
os_fil2_imon=-2.59948E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.56931E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37246E-1
cs_fil2_imon=-2.18005E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.55273E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2225E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.12413E-2
chamber_ion_pmon=2.21401E-9
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.97154E-1
res40_imon=-2.46901E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=265
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.347E3	0.0E0	1.47E2	4.1E1	-7.13143E-2	-8.80026E1	-5.96046E-4	-8.80016E1	4.52995E-4	3.62396E-3	9.63449E-2	1.58489E1	-1.98461E1	-1.99707E1	1.50178E1	2.23434E-9	2.51923E-3	2.51923E-3	6.30239E-3	2.12281E-2
2.0E0	3.012E3	6.0E0	3.16E2	1.6E2	-7.06958E-2	-8.80025E1	-4.52995E-4	-8.80016E1	4.52995E-4	3.38554E-3	9.63926E-2	1.57934E1	-1.98386E1	-1.9923E1	1.49966E1	2.23907E-9	2.51557E-3	2.51557E-3	6.31332E-3	2.11761E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.06187E-2	-8.80024E1	-6.4373E-4	-8.80018E1	9.05991E-4	3.55244E-3	9.6488E-2	1.58209E1	-1.98486E1	-1.99199E1	1.5023E1	2.23468E-9	2.52139E-3	2.52139E-3	6.29624E-3	2.12392E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.11597E-2	-8.80026E1	-4.29153E-4	-8.80017E1	6.67572E-4	3.76701E-3	9.65357E-2	1.58404E1	-1.98322E1	-1.99166E1	1.50381E1	2.23076E-9	2.51287E-3	2.51287E-3	6.31798E-3	2.12067E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80026E1	-4.52995E-4	-8.80016E1	8.34465E-4	3.57628E-3	9.63211E-2	1.58516E1	-1.98495E1	-1.99558E1	1.501E1	2.23138E-9	2.50789E-3	2.50789E-3	6.30192E-3	2.13327E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.10051E-2	-8.80024E1	-6.91414E-4	-8.80017E1	7.39098E-4	3.45707E-3	9.65834E-2	1.57595E1	-1.9831E1	-1.99113E1	1.50268E1	2.2372E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.12034E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13915E-2	-8.80025E1	-7.62939E-4	-8.80013E1	2.38419E-4	3.60012E-3	9.6488E-2	1.57867E1	-1.98659E1	-1.99337E1	1.50369E1	2.22442E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.11148E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.09279E-2	-8.80026E1	-7.15256E-4	-8.80015E1	6.91414E-4	3.38554E-3	9.65595E-2	1.57929E1	-1.98279E1	-1.99408E1	1.50066E1	2.23583E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.12413E-2
1.2E1	8.6E1	1.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80026E1	-3.09944E-4	-8.80012E1	7.62939E-4	3.05176E-3	9.67503E-2	1.58239E1	-1.98038E1	-1.99294E1	1.50358E1	2.23764E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.11641E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.13915E-2	-8.80027E1	-5.48363E-4	-8.80013E1	9.29832E-4	3.50475E-3	9.65357E-2	1.58275E1	-1.98585E1	-1.99083E1	1.50262E1	2.22364E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.1185E-2
1.4E1	1.12E2	1.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80028E1	-5.72205E-4	-8.80013E1	8.82149E-4	3.40939E-3	9.67264E-2	1.58463E1	-1.98564E1	-1.99331E1	1.50148E1	2.23818E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.1185E-2
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80026E1	-5.24521E-4	-8.80015E1	9.77516E-4	3.43323E-3	9.62734E-2	1.5813E1	-1.98E1	-1.99555E1	1.49854E1	2.23623E-9	2.52867E-3	2.52867E-3	6.31837E-3	2.12403E-2
1.6E1	3.17E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80026E1	-6.19888E-4	-8.80015E1	5.72205E-4	3.55244E-3	9.66311E-2	1.58244E1	-1.98591E1	-1.99431E1	1.49836E1	2.23526E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.13513E-2
1.7E1	7.78E2	0.0E0	6.87E2	4.7E2	-7.13915E-2	-8.80024E1	-4.29153E-4	-8.80016E1	7.62939E-4	3.74317E-3	9.65595E-2	1.58295E1	-1.98575E1	-1.99292E1	1.50827E1	2.23583E-9	2.51417E-3	2.51417E-3	6.35059E-3	2.12232E-2
1.8E1	3.386E3	5.0E0	7.27E2	5.0E2	-7.201E-2	-8.80024E1	-3.8147E-4	-8.80013E1	7.39098E-4	3.71933E-3	9.67264E-2	1.58095E1	-1.98422E1	-1.99498E1	1.50353E1	2.24109E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.12403E-2
1.9E1	1.801E3	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80024E1	-5.00679E-4	-8.80015E1	5.72205E-4	3.55244E-3	9.63211E-2	1.58203E1	-1.98204E1	-1.99307E1	1.50149E1	2.24207E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.12587E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80026E1	-2.6226E-4	-8.80015E1	8.10623E-4	3.31402E-3	9.66072E-2	1.58095E1	-1.9832E1	-1.99414E1	1.49968E1	2.23041E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.12218E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80027E1	-5.48363E-4	-8.80015E1	8.10623E-4	3.38554E-3	9.6941E-2	1.58238E1	-1.98257E1	-1.99042E1	1.49878E1	2.23429E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.12403E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80028E1	-6.67572E-4	-8.80015E1	1.00136E-3	3.40939E-3	9.67741E-2	1.57745E1	-1.98116E1	-1.99576E1	1.50503E1	2.21401E-9	2.51814E-3	2.51814E-3	6.31798E-3	2.12244E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.12368E-2	-8.80028E1	-6.19888E-4	-8.80015E1	6.67572E-4	3.50475E-3	9.64642E-2	1.5824E1	-1.98594E1	-1.99328E1	1.50515E1	2.21401E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.12413E-2