[Scan]
initial_time=2016-01-18T16:57:59
final_time=2016-01-18T16:58:18
ip_count=19
run=1024
dataset=1
scan=75
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.79796E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-6.68228E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.17993E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.28093E-9
ql4_vset=
ql4_vmon=8.58307E-4
ql4_imon=1.39201E-8
mult1=-9.74761E-9
mult2=-2.72718E-9
rf_tmon=-6.06681E-3
rf_agc=3.15984E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.31402E-3
ql5_imon=6.19972E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64691E0
bslens_imon=2.29983E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19664E1
lens5a_imon=2.00795E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12582E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54133E1
cs_ef1b_imon=2.79818E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04369E1
cs_ea1_imon=2.61178E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9999E0
lens1_imon=1.56081E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8458E1
cs_ef1a_imon=2.92468E-5
olens2_vset=0.0E0
olens2_vmon=9.77516E-4
olens2_imon=1.02583E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11682E1
os_restr1_imon=4.29022E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14879E1
os_ea1_imon=2.38791E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.06559E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=1.16294E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92018E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01437E1
cs_anode1_imon=2.89368E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.30701E-9
tplens_vset=0.0E0
tplens_vmon=-1.68409E0
tplens_imon=-3.20976E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99001E1
iondef3_imon=8.80316E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98499E1
iondef2_imon=9.37635E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03204E2
lens6_imon=2.9845E-4
ql6_vset=1.0E-1
ql6_vmon=9.67503E-2
ql6_imon=8.57675E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=1.71991E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20223E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06184E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05576E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82407E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11442E1
os_restr2_imon=3.3813E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.30036E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02139E1
cs_anode2_imon=2.23452E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58056E1
iondef1_imon=5.11169E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5041E1
iondef4_imon=5.33805E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27951E1
olens3_imon=2.5006E-8
olens1_vset=0.0E0
olens1_vmon=1.71661E-3
olens1_imon=1.20842E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.72003E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82789E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.87125E1
mask2_imon=-4.67935E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.2999E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.53204E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=6.96463E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.3866E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07551E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62233E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30896E1
cs_fil1_imon=9.93831E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61561E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6359E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77292E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.77314E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.5999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.91727E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2235E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.11689E-2
chamber_ion_pmon=2.2363E-9
chamber_cvt_pmon=2.52115E-3
foreline_cvt_pmon=2.52115E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.14553E-1
res40_imon=-2.59788E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.291E3	2.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80026E1	-2.14577E-4	-8.80016E1	6.19888E-4	3.52859E-3	9.66549E-2	1.57938E1	-1.98482E1	-1.99549E1	1.5001E1	2.23623E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.12034E-2
2.0E0	3.088E3	3.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80026E1	-1.43051E-4	-8.80016E1	5.72205E-4	3.31402E-3	9.67026E-2	1.58338E1	-1.9852E1	-1.99212E1	1.50346E1	2.24155E-9	2.51847E-3	2.51847E-3	6.34518E-3	2.12051E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80026E1	-6.19888E-4	-8.80014E1	8.10623E-4	3.55244E-3	9.67264E-2	1.5805E1	-1.97898E1	-1.99313E1	1.50316E1	2.23644E-9	2.52008E-3	2.52008E-3	6.32402E-3	2.11839E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17779E-2	-8.80028E1	-2.86102E-4	-8.80012E1	8.34465E-4	3.33786E-3	9.66072E-2	1.58262E1	-1.98187E1	-1.99396E1	1.50057E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80028E1	-2.86102E-4	-8.80014E1	7.39098E-4	3.21865E-3	9.67979E-2	1.5814E1	-1.98542E1	-1.99288E1	1.50078E1	2.23825E-9	2.52236E-3	2.52236E-3	6.33388E-3	2.12067E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80025E1	-2.14577E-4	-8.80016E1	6.91414E-4	3.3617E-3	9.65118E-2	1.58384E1	-1.9831E1	-1.99346E1	1.501E1	2.2415E-9	2.51679E-3	2.51679E-3	6.28667E-3	2.12257E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80028E1	-4.76837E-4	-8.80017E1	6.67572E-4	3.69549E-3	9.6488E-2	1.58149E1	-1.98735E1	-1.99414E1	1.50406E1	2.24113E-9	2.53091E-3	2.53091E-3	6.33592E-3	2.12381E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.80027E1	-3.33786E-4	-8.80019E1	4.52995E-4	3.60012E-3	9.67741E-2	1.58313E1	-1.98024E1	-1.99506E1	1.50449E1	2.23963E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.1258E-2
1.2E1	7.6E1	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80026E1	-6.91414E-4	-8.80017E1	6.4373E-4	3.57628E-3	9.68218E-2	1.57873E1	-1.9805E1	-1.99636E1	1.50334E1	2.23915E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.12587E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80026E1	-6.19888E-4	-8.80014E1	8.10623E-4	3.45707E-3	9.67026E-2	1.58386E1	-1.98611E1	-1.99691E1	1.50376E1	2.2372E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.12218E-2
1.4E1	1.05E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.8003E1	-6.19888E-4	-8.80015E1	8.58307E-4	3.24249E-3	9.66787E-2	1.58227E1	-1.98813E1	-1.99348E1	1.50087E1	2.2406E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.10788E-2
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80026E1	-7.39098E-4	-8.80014E1	7.86781E-4	3.3617E-3	9.70364E-2	1.5872E1	-1.98627E1	-1.98819E1	1.50066E1	2.24499E-9	2.52647E-3	2.52647E-3	6.33486E-3	2.12403E-2
1.6E1	3.07E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80028E1	-5.00679E-4	-8.80015E1	7.86781E-4	3.38554E-3	9.6941E-2	1.58056E1	-1.98741E1	-1.99307E1	1.50317E1	2.23566E-9	2.51136E-3	2.51136E-3	6.31299E-3	2.1258E-2
1.7E1	7.2E2	3.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80027E1	-6.19888E-4	-8.80013E1	9.05991E-4	3.52859E-3	9.70602E-2	1.58545E1	-1.99018E1	-1.99089E1	1.50244E1	2.23869E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.12413E-2
1.8E1	3.441E3	4.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80025E1	-3.8147E-4	-8.80014E1	5.24521E-4	3.33786E-3	9.6941E-2	1.58161E1	-1.98597E1	-1.99264E1	1.50088E1	2.23583E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.12051E-2
1.9E1	1.923E3	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80026E1	-4.05312E-4	-8.80016E1	7.39098E-4	3.62396E-3	9.67264E-2	1.57963E1	-1.98645E1	-1.99456E1	1.5019E1	2.23392E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.12232E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80024E1	-3.57628E-4	-8.80015E1	6.91414E-4	3.3617E-3	9.67503E-2	1.58257E1	-1.9808E1	-1.9966E1	1.49908E1	2.23665E-9	2.52139E-3	2.52139E-3	6.33538E-3	2.12204E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80023E1	-3.33786E-4	-8.80016E1	9.77516E-4	3.43323E-3	9.68456E-2	1.58179E1	-1.98128E1	-1.99166E1	1.50306E1	2.24109E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.10931E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80028E1	-5.24521E-4	-8.80014E1	9.29832E-4	3.43323E-3	9.67741E-2	1.58221E1	-1.9916E1	-1.99632E1	1.50148E1	2.23869E-9	2.52599E-3	2.52599E-3	6.29665E-3	2.12775E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80027E1	-5.24521E-4	-8.80016E1	8.58307E-4	3.31402E-3	9.67503E-2	1.58056E1	-1.98499E1	-1.99001E1	1.5041E1	2.2363E-9	2.52115E-3	2.52115E-3	6.33436E-3	2.11689E-2