[Scan]
initial_time=2016-01-18T16:58:26
final_time=2016-01-18T16:58:45
ip_count=19
run=1024
dataset=1
scan=76
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.86095E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-6.8866E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.21127E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.21217E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.39297E-8
mult1=-9.23468E-9
mult2=-2.76253E-9
rf_tmon=-5.2935E-3
rf_agc=3.2925E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=6.15346E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67996E0
bslens_imon=2.36471E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19923E1
lens5a_imon=2.00074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05057E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53935E1
cs_ef1b_imon=2.79205E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04669E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04063E1
cs_ea1_imon=2.61214E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98848E0
lens1_imon=1.68338E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64957E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.47513E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.93837E-5
olens2_vset=0.0E0
olens2_vmon=7.39098E-4
olens2_imon=1.0287E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.27725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=2.38574E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23588E0
cs_ionrep_imon=1.16907E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92028E2
cs_nozzle_imon=1.93474E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.90774E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.20876E-9
tplens_vset=0.0E0
tplens_vmon=-1.7646E0
tplens_imon=-1.33518E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99125E1
iondef3_imon=8.76711E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.99047E1
iondef2_imon=9.46647E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03199E2
lens6_imon=2.98656E-4
ql6_vset=1.0E-1
ql6_vmon=9.67264E-2
ql6_imon=8.52764E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23648E0
ionrepsh_imon=1.72784E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.19432E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.14344E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21845E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06196E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.16614E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03774E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11298E1
os_restr2_imon=3.38238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.28522E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23452E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58161E1
iondef1_imon=5.15855E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50202E1
iondef4_imon=5.37409E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.50468E-8
olens1_vset=0.0E0
olens1_vmon=1.33514E-3
olens1_imon=1.20869E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16378E0
cs_ionaccel_imon=-1.59237E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02143E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=2.64194E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82799E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86897E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.4477E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93751E3
defgrida_imon=6.43831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.26385E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32637E0
defgridb_imon=6.08503E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.43609E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07311E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62598E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30822E1
cs_fil1_imon=9.96359E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62414E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63913E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73148E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.43543E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.92058E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22324E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.1332E-2
chamber_ion_pmon=2.24347E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7611E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=191
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.287E3	2.0E0	1.47E2	4.1E1	-7.286E-2	-8.8003E1	-1.43051E-4	-8.80014E1	7.62939E-4	3.8147E-3	9.65595E-2	1.5815E1	-1.97844E1	-1.9949E1	1.50398E1	2.23964E-9	2.51096E-3	2.51096E-3	6.34518E-3	2.12051E-2
2.0E0	2.945E3	1.0E0	3.16E2	1.6E2	-7.25507E-2	-8.8003E1	-3.8147E-4	-8.80014E1	7.62939E-4	3.45707E-3	9.65595E-2	1.58372E1	-1.99258E1	-1.99564E1	1.49929E1	2.23915E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.12403E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80032E1	-3.8147E-4	-8.80014E1	6.91414E-4	3.3617E-3	9.64403E-2	1.58315E1	-1.98682E1	-1.99319E1	1.50172E1	2.24161E-9	2.52697E-3	2.52697E-3	6.31299E-3	2.11641E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80033E1	-1.43051E-4	-8.80016E1	4.29153E-4	3.45707E-3	9.63688E-2	1.5838E1	-1.98523E1	-1.99502E1	1.5012E1	2.24442E-9	2.51847E-3	2.51847E-3	6.28592E-3	2.12775E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80032E1	-4.05312E-4	-8.80013E1	4.29153E-4	3.24249E-3	9.65834E-2	1.57951E1	-1.97786E1	-1.99384E1	1.50154E1	2.23332E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.12218E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80027E1	-3.09944E-4	-8.80015E1	5.48363E-4	3.45707E-3	9.63211E-2	1.58083E1	-1.98609E1	-1.99552E1	1.50118E1	2.23773E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.12232E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80031E1	-3.33786E-4	-8.80016E1	8.58307E-4	3.45707E-3	9.64165E-2	1.58179E1	-1.982E1	-1.9927E1	1.50148E1	2.23623E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.1185E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80031E1	-8.10623E-4	-8.80011E1	6.67572E-4	3.60012E-3	9.67264E-2	1.58287E1	-1.98326E1	-1.99354E1	1.5022E1	2.23235E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.11115E-2
1.2E1	8.0E1	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80028E1	-6.91414E-4	-8.80014E1	6.4373E-4	3.8147E-3	9.66072E-2	1.57961E1	-1.98352E1	-1.99284E1	1.50298E1	2.24012E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.12034E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80028E1	-3.09944E-4	-8.80014E1	6.4373E-4	3.60012E-3	9.6488E-2	1.58142E1	-1.98661E1	-1.9939E1	1.5019E1	2.24442E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.12594E-2
1.4E1	1.05E2	3.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80028E1	-1.66893E-4	-8.80015E1	5.96046E-4	3.6478E-3	9.62734E-2	1.58321E1	-1.98806E1	-1.99514E1	1.50076E1	2.23863E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.11454E-2
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80023E1	-2.6226E-4	-8.80013E1	8.10623E-4	4.14848E-3	9.63449E-2	1.58329E1	-1.9829E1	-1.99534E1	1.50364E1	2.23964E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.12051E-2
1.6E1	3.25E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80023E1	-3.57628E-4	-8.80012E1	5.24521E-4	3.86238E-3	9.6488E-2	1.58295E1	-1.98086E1	-1.99445E1	1.50328E1	2.23915E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.12218E-2
1.7E1	8.06E2	3.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80025E1	-7.62939E-4	-8.80014E1	6.19888E-4	4.17233E-3	9.70602E-2	1.58083E1	-1.98332E1	-1.99246E1	1.50136E1	2.24062E-9	2.52473E-3	2.52473E-3	6.32418E-3	2.11829E-2
1.8E1	3.387E3	1.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80027E1	-5.24521E-4	-8.80015E1	7.39098E-4	4.57764E-3	9.67741E-2	1.58057E1	-1.98305E1	-1.99486E1	1.50195E1	2.23964E-9	2.51739E-3	2.51739E-3	6.31548E-3	2.13048E-2
1.9E1	1.903E3	1.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80027E1	-5.24521E-4	-8.80016E1	4.52995E-4	4.14848E-3	9.69172E-2	1.58159E1	-1.9797E1	-1.99294E1	1.50243E1					
2.0E1	2.9E1	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80025E1	-4.76837E-4	-8.80015E1	2.6226E-4	4.05312E-3	9.68695E-2	1.58065E1	-1.98957E1	-1.99522E1	1.50322E1	2.24113E-9	2.51838E-3	2.51838E-3	6.33592E-3	2.12765E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80028E1	-4.05312E-4	-8.80014E1	6.67572E-4	3.86238E-3	9.67264E-2	1.58239E1	-1.98098E1	-1.99468E1	1.49962E1	2.24251E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.12413E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80027E1	-4.52995E-4	-8.80017E1	9.05991E-4	3.95775E-3	9.67026E-2	1.58551E1	-1.98092E1	-1.99242E1	1.50317E1	2.23429E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.11298E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80027E1	-4.76837E-4	-8.80018E1	6.91414E-4	4.17233E-3	9.67264E-2	1.58161E1	-1.99047E1	-1.99125E1	1.50202E1	2.24347E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.1332E-2