[Scan]
initial_time=2016-01-18T16:58:52
final_time=2016-01-18T16:59:12
ip_count=19
run=1024
dataset=1
scan=77
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.8526E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.37722E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.18064E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.35029E-9
ql4_vset=
ql4_vmon=5.96046E-4
ql4_imon=1.39103E-8
mult1=-1.00173E-8
mult2=-2.66272E-9
rf_tmon=-3.9837E-3
rf_agc=3.39825E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.76701E-3
ql5_imon=5.99694E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63967E0
bslens_imon=2.60697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1963E1
lens5a_imon=2.01483E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.05132E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54433E1
cs_ef1b_imon=2.79818E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02457E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04469E1
cs_ea1_imon=2.60556E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97579E0
lens1_imon=1.72212E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64987E1
os_ef1alow_imon=2.9618E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03531E1
cs_ea2_imon=1.51931E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=2.94846E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.02862E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.30139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.154E1
os_ea1_imon=2.37903E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63221E1
os_ef1bup_imon=3.05766E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21375E0
cs_ionrep_imon=1.1774E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9201E2
cs_nozzle_imon=1.93576E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=2.90161E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.15617E-9
tplens_vset=0.0E0
tplens_vmon=-1.68214E0
tplens_imon=-4.617E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99654E1
iondef3_imon=8.92835E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9814E1
iondef2_imon=9.46634E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03254E2
lens6_imon=2.98052E-4
ql6_vset=1.0E-1
ql6_vmon=9.66072E-2
ql6_imon=8.77321E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25033E0
ionrepsh_imon=1.7292E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33793E1
lens5b_imon=2.18401E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74874E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27746E0
os_ea2_imon=-6.81143E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06205E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.24469E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55978E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11021E1
os_restr2_imon=3.38887E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.28477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01563E1
cs_anode2_imon=2.22118E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57759E1
iondef1_imon=5.17304E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50052E1
iondef4_imon=5.44978E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.504E-8
olens1_vset=0.0E0
olens1_vmon=1.52588E-3
olens1_imon=1.21077E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17759E0
cs_ionaccel_imon=-1.92754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56615E1
einzel_imon=8.03022E-6
window_vset=0.0E0
window_vmon=3.02036E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82791E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.87209E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=6.96398E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=7.0737E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.56568E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30516E0
defgridb_imon=6.15345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.41321E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07161E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62559E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30896E1
cs_fil1_imon=9.97164E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62888E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63688E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74977E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.58209E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.73204E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07615E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22644E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.12051E-2
chamber_ion_pmon=2.23678E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.34975E-1
res40_imon=-2.74925E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.297E3	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80032E1	-3.33786E-4	-8.80015E1	1.16825E-3	4.31538E-3	9.65118E-2	1.58492E1	-1.97719E1	-1.9978E1	1.50449E1	2.23107E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.11689E-2
2.0E0	2.903E3	2.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80027E1	-2.14577E-4	-8.80015E1	8.82149E-4	3.91006E-3	9.65118E-2	1.58166E1	-1.98715E1	-1.99483E1	1.50425E1	2.23915E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.12218E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80031E1	-2.14577E-4	-8.80013E1	9.05991E-4	3.6478E-3	9.66549E-2	1.58145E1	-1.98226E1	-1.99518E1	1.50316E1	2.24113E-9	2.52293E-3	2.52293E-3	6.31879E-3	2.11807E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80031E1	-2.86102E-4	-8.80013E1	1.04904E-3	3.55244E-3	9.64165E-2	1.57997E1	-1.9847E1	-1.99484E1	1.50161E1	2.2345E-9	2.52448E-3	2.52448E-3	6.32858E-3	2.126E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.8003E1	-3.57628E-4	-8.80012E1	8.10623E-4	3.93391E-3	9.63926E-2	1.58253E1	-1.98317E1	-1.99374E1	1.5024E1	2.24207E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.12587E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.8003E1	-5.24521E-4	-8.80013E1	1.0252E-3	3.93391E-3	9.63688E-2	1.58301E1	-1.98143E1	-1.99655E1	1.50321E1	2.24647E-9	2.51956E-3	2.51956E-3	6.31251E-3	2.11412E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80027E1	-5.00679E-4	-8.80014E1	8.58307E-4	3.69549E-3	9.64165E-2	1.57867E1	-1.97762E1	-1.99001E1	1.50184E1	2.23961E-9	2.5199E-3	2.5199E-3	6.31902E-3	2.12565E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80029E1	-3.09944E-4	-8.80013E1	8.34465E-4	3.74317E-3	9.64403E-2	1.58281E1	-1.98915E1	-1.99384E1	1.50406E1	2.23818E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.11482E-2
1.2E1	6.8E1	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80027E1	-6.67572E-4	-8.80014E1	1.00136E-3	3.40939E-3	9.61781E-2	1.58275E1	-1.97263E1	-1.99306E1	1.50109E1	2.23487E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.12051E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.8003E1	-3.09944E-4	-8.80012E1	7.39098E-4	3.67165E-3	9.65357E-2	1.57973E1	-1.99024E1	-1.99119E1	1.50286E1	2.24304E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.1185E-2
1.4E1	9.2E1	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80028E1	-3.33786E-4	-8.80011E1	6.4373E-4	3.52859E-3	9.67979E-2	1.57664E1	-1.97785E1	-1.99778E1	1.50317E1	2.24155E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.11689E-2
1.5E1	7.6E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80027E1	-9.05991E-4	-8.80013E1	5.48363E-4	3.79086E-3	9.66311E-2	1.58472E1	-1.98397E1	-1.9962E1	1.50521E1	2.24347E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.11689E-2
1.6E1	3.37E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80027E1	-1.16825E-3	-8.80012E1	9.05991E-4	3.60012E-3	9.63926E-2	1.58185E1	-1.98537E1	-1.99282E1	1.50064E1	2.24359E-9	2.51359E-3	2.51359E-3	6.31858E-3	2.12957E-2
1.7E1	8.45E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80028E1	-8.34465E-4	-8.80014E1	7.86781E-4	3.60012E-3	9.64165E-2	1.58245E1	-1.99161E1	-1.9942E1	1.50172E1	2.2372E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.12034E-2
1.8E1	3.418E3	1.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80029E1	-6.4373E-4	-8.80014E1	6.19888E-4	3.43323E-3	9.6488E-2	1.5838E1	-1.97555E1	-1.99242E1	1.50437E1	2.2372E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.13142E-2
1.9E1	1.872E3	1.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80031E1	-7.62939E-4	-8.80015E1	6.91414E-4	3.76701E-3	9.63688E-2	1.58425E1	-1.99077E1	-1.9933E1	1.4995E1	2.24304E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.12772E-2
2.0E1	2.6E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80029E1	-5.96046E-4	-8.80016E1	6.4373E-4	3.67165E-3	9.64642E-2	1.58221E1	-1.98511E1	-1.9936E1	1.50375E1	2.2406E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.12232E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80026E1	-5.72205E-4	-8.80015E1	4.76837E-4	4.14848E-3	9.65118E-2	1.58035E1	-1.98206E1	-1.99684E1	1.50238E1	2.23487E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.12232E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80024E1	-3.8147E-4	-8.80015E1	8.34465E-4	3.86238E-3	9.66311E-2	1.57242E1	-1.97874E1	-2.00499E1	1.50166E1	2.23818E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.11666E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80025E1	-5.96046E-4	-8.80018E1	5.96046E-4	3.76701E-3	9.66072E-2	1.57759E1	-1.9814E1	-1.99654E1	1.50052E1	2.23678E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.12051E-2