[Scan]
initial_time=2016-01-18T16:59:19
final_time=2016-01-18T16:59:38
ip_count=19
run=1024
dataset=1
scan=78
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.74834E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-7.23195E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.21251E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.32788E-9
ql4_vset=
ql4_vmon=1.00136E-3
ql4_imon=1.39038E-8
mult1=-9.12632E-9
mult2=-2.71063E-9
rf_tmon=-4.44033E-3
rf_agc=3.30452E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.76701E-3
ql5_imon=6.17516E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65442E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19571E1
lens5a_imon=1.98368E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12575E2
lens4a_imon=2.05005E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=2.79025E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02351E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04504E1
cs_ea1_imon=2.6006E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99349E0
lens1_imon=1.577E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64975E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03566E1
cs_ea2_imon=1.50515E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=2.93729E-5
olens2_vset=0.0E0
olens2_vmon=9.77516E-4
olens2_imon=1.03039E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.27797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15075E1
os_ea1_imon=2.38045E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=1.182E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91997E2
cs_nozzle_imon=1.93717E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=2.91603E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.23866E-9
tplens_vset=0.0E0
tplens_vmon=-1.71517E0
tplens_imon=-4.75858E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99408E1
iondef3_imon=8.83279E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98741E1
iondef2_imon=9.35662E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03214E2
lens6_imon=2.98017E-4
ql6_vset=1.0E-1
ql6_vmon=9.6941E-2
ql6_imon=8.51095E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23086E0
ionrepsh_imon=1.74442E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33333E1
lens5b_imon=2.18543E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28159E0
os_ea2_imon=-8.01483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06188E2
lens4b_imon=2.00885E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.1629E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.40327E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.08822E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11394E1
os_restr2_imon=3.38274E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.29397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.24857E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58053E1
iondef1_imon=5.13764E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49728E1
iondef4_imon=5.34526E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27949E1
olens3_imon=2.4967E-8
olens1_vset=0.0E0
olens1_vmon=1.62125E-3
olens1_imon=1.20328E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15177E0
cs_ionaccel_imon=-1.69328E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02113E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=2.68399E-1
window_imon=-7.27421E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82805E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86849E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.51967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93676E3
defgrida_imon=6.2561E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.33208E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59454E0
defgridb_imon=5.88446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.38834E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07605E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62251E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=9.9505E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61987E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63609E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67379E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.51628E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.11336E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68031E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22329E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.12403E-2
chamber_ion_pmon=2.23915E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.46077E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.261E3	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80023E1	-2.86102E-4	-8.8002E1	9.05991E-4	4.1008E-3	9.64165E-2	1.58091E1	-1.97673E1	-1.99443E1	1.49941E1	2.23964E-9	2.51847E-3	2.51847E-3	6.28592E-3	2.12051E-2
2.0E0	2.959E3	6.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80024E1	-7.86781E-4	-8.80019E1	8.10623E-4	4.05312E-3	9.64165E-2	1.58069E1	-1.98851E1	-1.99188E1	1.50216E1	2.23297E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.12051E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80025E1	-6.91414E-4	-8.80017E1	6.91414E-4	3.83854E-3	9.67264E-2	1.5812E1	-1.97986E1	-1.99756E1	1.50062E1	2.24062E-9	2.5147E-3	2.5147E-3	6.31299E-3	2.12957E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80024E1	-3.09944E-4	-8.80015E1	5.48363E-4	3.43323E-3	9.65118E-2	1.58122E1	-1.99338E1	-1.9917E1	1.50532E1	2.2372E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.12587E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80026E1	-5.72205E-4	-8.80018E1	8.10623E-4	3.52859E-3	9.63926E-2	1.58075E1	-1.98318E1	-1.99255E1	1.50103E1	2.24106E-9	2.51814E-3	2.51814E-3	6.31798E-3	2.12067E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80028E1	-3.33786E-4	-8.80017E1	7.39098E-4	3.57628E-3	9.66072E-2	1.58244E1	-1.97485E1	-1.99478E1	1.50115E1	2.23623E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.11666E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80028E1	-6.67572E-4	-8.80018E1	7.86781E-4	3.33786E-3	9.65357E-2	1.58185E1	-1.99313E1	-1.99473E1	1.50196E1	2.2406E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.10249E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.8003E1	-6.91414E-4	-8.80014E1	8.82149E-4	3.3617E-3	9.65595E-2	1.58077E1	-1.97107E1	-1.99173E1	1.50316E1	2.23869E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.11689E-2
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80026E1	-4.76837E-4	-8.80014E1	8.10623E-4	3.26633E-3	9.62973E-2	1.58071E1	-1.98789E1	-1.99414E1	1.50175E1	2.23235E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.12587E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80029E1	-5.00679E-4	-8.80014E1	9.05991E-4	3.50475E-3	9.63926E-2	1.58138E1	-1.98116E1	-1.9939E1	1.50287E1	2.23526E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.1185E-2
1.4E1	1.1E2	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80026E1	-4.29153E-4	-8.80016E1	8.58307E-4	3.31402E-3	9.64403E-2	1.58594E1	-1.98176E1	-1.993E1	1.50394E1	2.24109E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.12772E-2
1.5E1	7.0E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.8003E1	-4.05312E-4	-8.80017E1	1.00136E-3	3.31402E-3	9.62973E-2	1.58143E1	-1.98897E1	-1.99258E1	1.49968E1	2.24499E-9	2.52647E-3	2.52647E-3	6.34037E-3	2.12034E-2
1.6E1	2.94E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80029E1	-5.96046E-4	-8.80019E1	6.91414E-4	3.6478E-3	9.66787E-2	1.58252E1	-1.97859E1	-1.99249E1	1.50202E1	2.23869E-9	2.52599E-3	2.52599E-3	6.29665E-3	2.12413E-2
1.7E1	7.99E2	2.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80027E1	-9.53674E-5	-8.80015E1	6.4373E-4	3.55244E-3	9.66311E-2	1.58675E1	-1.99555E1	-1.99207E1	1.50136E1	2.24062E-9	2.52473E-3	2.52473E-3	6.33538E-3	2.1258E-2
1.8E1	3.429E3	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80029E1	-2.14577E-4	-8.80018E1	5.72205E-4	3.67165E-3	9.6488E-2	1.5848E1	-1.97611E1	-1.99498E1	1.5025E1	2.23964E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.12232E-2
1.9E1	1.804E3	1.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80027E1	-5.72205E-4	-8.80018E1	8.82149E-4	3.60012E-3	9.65595E-2	1.58001E1	-1.99555E1	-1.99512E1	1.50238E1	2.24207E-9	2.51552E-3	2.51552E-3	6.29098E-3	2.12403E-2
2.0E1	2.7E1	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80031E1	-9.05991E-4	-8.80014E1	8.34465E-4	3.95775E-3	9.67264E-2	1.58415E1	-1.99071E1	-1.99266E1	1.5019E1	2.2426E-9	2.52697E-3	2.52697E-3	6.3074E-3	2.12392E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.8003E1	-8.10623E-4	-8.80013E1	8.58307E-4	3.8147E-3	9.66549E-2	1.57973E1	-1.97042E1	-1.9936E1	1.5016E1	2.23869E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.12051E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.8003E1	-6.19888E-4	-8.80014E1	8.82149E-4	3.8147E-3	9.67264E-2	1.58427E1	-1.99178E1	-1.9929E1	1.49929E1	2.2406E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.1187E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80028E1	-5.72205E-4	-8.80017E1	1.00136E-3	3.76701E-3	9.6941E-2	1.58053E1	-1.98741E1	-1.99408E1	1.49728E1	2.23915E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.12403E-2