[Scan]
initial_time=2016-01-18T17:00:12
final_time=2016-01-18T17:00:32
ip_count=19
run=1024
dataset=1
scan=80
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.78597E-6
ql1_vset=
ql1_vmon=-8.8003E1
ql1_imon=-7.3055E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.20875E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.36393E-9
ql4_vset=
ql4_vmon=8.34465E-4
ql4_imon=1.38909E-8
mult1=-9.34568E-9
mult2=-2.73306E-9
rf_tmon=-5.06398E-3
rf_agc=3.22414E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.69549E-3
ql5_imon=5.8533E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67211E0
bslens_imon=2.40876E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19559E1
lens5a_imon=2.0081E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12543E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.79529E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04375E1
cs_ea1_imon=2.63245E-5
lens1_vset=-2.7E0
lens1_vmon=-2.987E0
lens1_imon=1.58762E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64963E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.47825E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.92143E-5
olens2_vset=0.0E0
olens2_vmon=9.77516E-4
olens2_imon=1.02323E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=4.28625E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1481E1
os_ea1_imon=2.38576E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2055E0
cs_ionrep_imon=1.1774E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92004E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=2.90594E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.28419E-9
tplens_vset=0.0E0
tplens_vmon=-1.65559E0
tplens_imon=-3.02427E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99142E1
iondef3_imon=8.74076E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.97278E1
iondef2_imon=9.4628E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03228E2
lens6_imon=2.98116E-4
ql6_vset=1.0E-1
ql6_vmon=9.65834E-2
ql6_imon=8.51607E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28513E0
ionrepsh_imon=1.72814E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.19251E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22142E0
os_ea2_imon=-9.04126E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06199E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0942E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51774E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11153E1
os_restr2_imon=3.36256E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.28937E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.23019E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58233E1
iondef1_imon=5.24029E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50118E1
iondef4_imon=5.44617E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27953E1
olens3_imon=2.49868E-8
olens1_vset=0.0E0
olens1_vmon=1.40667E-3
olens1_imon=1.20701E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.67798E-1
window_imon=-7.41837E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82788E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86933E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.76389E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.41183E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.05246E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37603E0
defgridb_imon=6.28795E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.43663E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06476E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62718E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=9.96948E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63633E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63636E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91439E-2
os_fil2_imon=-2.81613E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.47958E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.61792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.13641E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22308E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.12587E-2
chamber_ion_pmon=2.24012E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.6621E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.359E3	1.0E0	1.47E2	4.1E1	-7.15461E-2	-8.80032E1	-1.66893E-4	-8.80014E1	6.67572E-4	3.74317E-3	9.67264E-2	1.58179E1	-1.97939E1	-1.99113E1	1.49866E1	2.23526E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.12218E-2
2.0E0	2.959E3	1.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80029E1	-2.86102E-4	-8.80013E1	6.19888E-4	4.17233E-3	9.67741E-2	1.58203E1	-1.99261E1	-1.99579E1	1.50184E1	2.2345E-9	2.51393E-3	2.51393E-3	6.29684E-3	2.12067E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80031E1	-3.09944E-4	-8.80017E1	5.96046E-4	3.83854E-3	9.67264E-2	1.58156E1	-1.97856E1	-1.99785E1	1.50647E1	2.23963E-9	2.52362E-3	2.52362E-3	6.31858E-3	2.12768E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80031E1	-4.05312E-4	-8.80015E1	4.29153E-4	3.67165E-3	9.67026E-2	1.58191E1	-1.98326E1	-1.99246E1	1.50178E1	2.22821E-9	2.51203E-3	2.51203E-3	6.31817E-3	2.1187E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80031E1	-7.15256E-4	-8.80014E1	5.96046E-4	3.60012E-3	9.71317E-2	1.58332E1	-1.99512E1	-1.9912E1	1.50292E1	2.21497E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.1185E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80028E1	-6.19888E-4	-8.80014E1	9.29832E-4	3.71933E-3	9.67503E-2	1.58244E1	-1.9847E1	-1.99166E1	1.50376E1	2.21401E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.12768E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80028E1	-6.19888E-4	-8.80015E1	7.62939E-4	3.71933E-3	9.70364E-2	1.58167E1	-1.97975E1	-1.99543E1	1.50382E1	2.23678E-9	2.51632E-3	2.51632E-3	6.28592E-3	2.12413E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80029E1	-4.52995E-4	-8.80014E1	7.15256E-4	3.62396E-3	9.69648E-2	1.58131E1	-1.98699E1	-1.99546E1	1.50352E1	2.23665E-9	2.5147E-3	2.5147E-3	6.36912E-3	2.11829E-2
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80026E1	-7.86781E-4	-8.80015E1	8.58307E-4	3.6478E-3	9.67264E-2	1.57985E1	-1.99968E1	-1.99113E1	1.5025E1	2.24207E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.13698E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.8003E1	-5.72205E-4	-8.80012E1	6.4373E-4	3.48091E-3	9.68456E-2	1.58185E1	-1.97209E1	-1.99726E1	1.50433E1	2.23392E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.12413E-2
1.4E1	1.15E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80028E1	-3.57628E-4	-8.80016E1	6.19888E-4	3.95775E-3	9.67741E-2	1.58356E1	-1.97154E1	-1.98918E1	1.50136E1	2.24792E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.12034E-2
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80029E1	-5.48363E-4	-8.80014E1	7.86781E-4	3.76701E-3	9.67026E-2	1.58197E1	-1.97912E1	-1.99179E1	1.49968E1	2.23487E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.12594E-2
1.6E1	2.98E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80028E1	-5.48363E-4	-8.80013E1	7.62939E-4	3.98159E-3	9.68218E-2	1.58162E1	-1.96853E1	-1.99113E1	1.50514E1	2.23915E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.11115E-2
1.7E1	8.33E2	1.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80029E1	-2.14577E-4	-8.80015E1	8.58307E-4	3.93391E-3	9.68933E-2	1.58162E1	-1.97201E1	-1.99119E1	1.50142E1	2.23773E-9	2.51847E-3	2.51847E-3	6.28592E-3	2.12051E-2
1.8E1	3.343E3	0.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80026E1	-3.57628E-4	-8.80014E1	9.77516E-4	3.88622E-3	9.66311E-2	1.57777E1	-1.97341E1	-1.99131E1	1.50238E1	2.24155E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.12051E-2
1.9E1	1.933E3	2.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80028E1	-4.05312E-4	-8.80016E1	5.24521E-4	3.69549E-3	9.65357E-2	1.58267E1	-1.9804E1	-1.99292E1	1.50016E1	2.24597E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.12403E-2
2.0E1	2.7E1	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80029E1	-3.8147E-4	-8.80015E1	5.00679E-4	3.52859E-3	9.63211E-2	1.57904E1	-1.99196E1	-1.9914E1	1.5016E1	2.23731E-9	2.51814E-3	2.51814E-3	6.30212E-3	2.11889E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80026E1	-4.76837E-4	-8.80014E1	7.86781E-4	4.05312E-3	9.62257E-2	1.57771E1	-1.99197E1	-1.99125E1	1.50166E1	2.2381E-9	2.51725E-3	2.51725E-3	6.31879E-3	2.12573E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.47149E-2	-8.80031E1	-5.24521E-4	-8.80012E1	9.05991E-4	3.74317E-3	9.62019E-2	1.58335E1	-1.97954E1	-1.99726E1	1.50196E1	2.24109E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.12034E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.8003E1	-5.48363E-4	-8.80015E1	8.34465E-4	3.69549E-3	9.65834E-2	1.58233E1	-1.97278E1	-1.99142E1	1.50118E1	2.24012E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.12587E-2