[Scan]
initial_time=2016-01-18T17:00:49
final_time=2016-01-18T17:01:09
ip_count=19
run=1024
dataset=2
scan=81
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.20756E-1
ql1_imon=1.62098E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.845E-9
ql3_vset=
ql3_vmon=-9.13198E0
ql3_imon=7.34842E-9
ql4_vset=
ql4_vmon=-9.14309E0
ql4_imon=-6.47974E-10
mult1=-9.53661E-9
mult2=-2.77887E-9
rf_tmon=-6.21117E-3
rf_agc=3.22571E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.83854E-3
ql5_imon=1.44428E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70161E0
bslens_imon=2.42292E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19818E1
lens5a_imon=2.00067E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53835E1
cs_ef1b_imon=2.79694E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04386E1
cs_ea1_imon=2.6006E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35191E0
lens1_imon=2.69191E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.97557E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03655E1
cs_ea2_imon=1.49312E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85002E1
cs_ef1a_imon=2.92553E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.23308E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11465E1
os_restr1_imon=4.27114E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15093E1
os_ea1_imon=2.38293E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63583E1
os_ef1bup_imon=3.08921E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22201E0
cs_ionrep_imon=1.18625E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92022E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02018E1
cs_anode1_imon=2.91336E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.33683E-8
tplens_vset=1.4E-1
tplens_vmon=1.70868E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.50232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2604E1
iondef2_imon=1.56638E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03241E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.62973E-2
ql6_imon=3.89892E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25682E0
ionrepsh_imon=1.73451E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34236E1
lens5b_imon=2.19357E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74582E1
cs_ef2b_imon=3.12709E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34412E0
os_ea2_imon=-7.30695E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06197E2
lens4b_imon=2.00683E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71229E1
cs_ef2a_imon=3.15628E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07309E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82751E-1
os_ef2bup_imon=-5.26443E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11239E1
os_restr2_imon=3.40546E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.29185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.24194E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73247E1
iondef1_imon=1.1321E-5
iondef4_vset=2.691E1
iondef4_vmon=2.682E1
iondef4_imon=1.1031E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.19776E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.42198E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13767E0
cs_ionaccel_imon=-1.63626E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02135E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56486E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=2.63443E-1
window_imon=-8.9951E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82799E2
mask1_imon=2.39161E-4
mask2_vset=0.0E0
mask2_vmon=-1.86813E1
mask2_imon=-7.605E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=7.74973E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.30211E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.41702E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.27733E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33309E1
os_fil1_imon=9.41737E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0726E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61982E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30846E1
cs_fil1_imon=9.96657E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62389E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63221E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73711E-2
os_fil2_imon=-2.70973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8834E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.97188E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36394E-1
cs_fil2_imon=-2.18265E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.85622E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22211E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=2.12957E-2
chamber_ion_pmon=2.22516E-9
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.20978E-1
res40_imon=-2.51898E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.22663E-1	-7.98368E-1	-9.13296E0	-9.14297E0	3.83854E-3	9.64165E-2	2.73105E1	-3.26597E1	-3.2611E1	2.68743E1	2.23869E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.12413E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.22711E-1	-7.98178E-1	-9.13308E0	-9.14295E0	4.00543E-3	9.65595E-2	2.73498E1	-3.26738E1	-3.26652E1	2.68076E1	2.22945E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.12218E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.22568E-1	-7.98297E-1	-9.13289E0	-9.1433E0	4.1008E-3	9.64642E-2	2.73375E1	-3.27164E1	-3.26138E1	2.68325E1	2.2327E-9	2.51136E-3	2.51136E-3	6.31299E-3	2.12016E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.22186E-1	-7.98512E-1	-9.13265E0	-9.14307E0	3.79086E-3	9.63449E-2	2.73204E1	-3.26708E1	-3.26254E1	2.68447E1	2.22983E-9	2.52131E-3	2.52131E-3	6.31798E-3	2.12422E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.21638E-1	-7.98583E-1	-9.13258E0	-9.14323E0	3.71933E-3	9.66549E-2	2.73303E1	-3.26308E1	-3.26056E1	2.68244E1	2.22347E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.12051E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.21543E-1	-7.98702E-1	-9.13267E0	-9.14273E0	3.83854E-3	9.68695E-2	2.73314E1	-3.26664E1	-3.26027E1	2.68052E1	2.22075E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.12218E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.21376E-1	-7.98559E-1	-9.13272E0	-9.1428E0	3.76701E-3	9.66072E-2	2.73151E1	-3.26691E1	-3.2626E1	2.68364E1	2.22654E-9	2.51116E-3	2.51116E-3	6.31837E-3	2.13142E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.20708E-1	-7.98273E-1	-9.13262E0	-9.14314E0	3.83854E-3	9.65357E-2	2.73027E1	-3.25521E1	-3.26152E1	2.68238E1	2.24207E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.12403E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.20756E-1	-7.98535E-1	-9.13286E0	-9.14285E0	4.17233E-3	9.68933E-2	2.73405E1	-3.27324E1	-3.2608E1	2.68478E1	2.2372E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.12772E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.20804E-1	-7.98655E-1	-9.13267E0	-9.14264E0	4.36306E-3	9.65118E-2	2.73305E1	-3.27416E1	-3.26142E1	2.6813E1	2.23818E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.12587E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.20851E-1	-7.98559E-1	-9.13253E0	-9.14285E0	4.22001E-3	9.66549E-2	2.72793E1	-3.2626E1	-3.26579E1	2.68563E1	2.23202E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.12051E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.20732E-1	-7.98607E-1	-9.13284E0	-9.1428E0	4.22001E-3	9.66787E-2	2.73437E1	-3.26021E1	-3.26193E1	2.68046E1	2.23332E-9	2.51225E-3	2.51225E-3	6.3074E-3	2.12587E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.20851E-1	-7.98464E-1	-9.13298E0	-9.14309E0	3.71933E-3	9.63926E-2	2.73442E1	-3.27143E1	-3.26284E1	2.68538E1	2.23818E-9	2.53087E-3	2.53087E-3	6.30192E-3	2.12034E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.20732E-1	-7.98512E-1	-9.13272E0	-9.14342E0	3.74317E-3	9.65118E-2	2.73261E1	-3.2599E1	-3.26254E1	2.6834E1	2.23665E-9	2.52362E-3	2.52362E-3	6.32978E-3	2.12957E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.20518E-1	-7.98631E-1	-9.1325E0	-9.14338E0	3.57628E-3	9.66311E-2	2.73293E1	-3.27039E1	-3.26207E1	2.68442E1	2.23487E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.12775E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.20851E-1	-7.98583E-1	-9.13234E0	-9.14307E0	3.76701E-3	9.63926E-2	2.73321E1	-3.2587E1	-3.26134E1	2.68292E1	2.23818E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.13513E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.20804E-1	-7.98321E-1	-9.13219E0	-9.14307E0	3.93391E-3	9.61304E-2	2.73128E1	-3.27163E1	-3.25841E1	2.68204E1	2.23915E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.12957E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.20851E-1	-7.98655E-1	-9.13215E0	-9.14288E0	3.95775E-3	9.59158E-2	2.73352E1	-3.25853E1	-3.26207E1	2.68302E1	2.22347E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.12051E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.20541E-1	-7.98774E-1	-9.13198E0	-9.14299E0	3.83854E-3	9.64165E-2	2.73131E1	-3.27734E1	-3.26072E1	2.6818E1	2.23263E-9	2.51709E-3	2.51709E-3	6.32328E-3	2.12244E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.20756E-1	-7.98321E-1	-9.13198E0	-9.14309E0	3.83854E-3	9.62973E-2	2.73247E1	-3.2604E1	-3.26272E1	2.682E1	2.22516E-9	2.52025E-3	2.52025E-3	6.32858E-3	2.12957E-2