[Scan]
initial_time=2016-01-18T17:01:16
final_time=2016-01-18T17:01:35
ip_count=19
run=1024
dataset=2
scan=82
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.19874E-1
ql1_imon=1.47915E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.93679E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=3.71795E-9
ql4_vset=
ql4_vmon=-9.14304E0
ql4_imon=-3.88813E-10
mult1=-9.67668E-9
mult2=-2.72914E-9
rf_tmon=-5.33534E-3
rf_agc=3.33799E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.3617E-3
ql5_imon=1.57608E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.46893E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19659E1
lens5a_imon=1.99041E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.05302E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5328E1
cs_ef1b_imon=2.75421E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0418E1
cs_ea1_imon=2.61086E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33127E0
lens1_imon=2.69191E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=3.00288E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.48462E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84749E1
cs_ef1a_imon=2.93333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.22661E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=4.24481E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15016E1
os_ea1_imon=2.38116E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63431E1
os_ef1bup_imon=3.10271E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21552E0
cs_ionrep_imon=1.18484E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92025E2
cs_nozzle_imon=1.9353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02512E1
cs_anode1_imon=2.93008E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.2552E-8
tplens_vset=1.4E-1
tplens_vmon=1.73405E0
tplens_imon=-3.55518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25995E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25511E1
iondef2_imon=1.58337E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03257E2
lens6_imon=2.98452E-4
ql6_vset=1.0E-1
ql6_vmon=9.64642E-2
ql6_imon=3.92317E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25505E0
ionrepsh_imon=1.70478E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33835E1
lens5b_imon=2.1872E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35238E0
os_ea2_imon=-6.35131E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06184E2
lens4b_imon=2.00506E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70657E1
cs_ef2a_imon=3.15497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10561E0
os_ef2alow_imon=-2.2555E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60784E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=3.40797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.29397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01611E1
cs_anode2_imon=2.26263E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73387E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68292E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.74368E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.45421E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16438E0
cs_ionaccel_imon=-1.38334E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02186E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56045E1
einzel_imon=7.51845E-6
window_vset=0.0E0
window_vmon=2.99033E-1
window_imon=-5.03975E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82863E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-9.54471E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.53736E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.61358E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.15511E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52662E0
defgridb_imon=6.0048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33275E1
os_fil1_imon=9.39309E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06843E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62181E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30879E1
cs_fil1_imon=9.95158E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63093E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63405E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.66113E-2
os_fil2_imon=-2.21547E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.77192E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22358E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.12218E-2
chamber_ion_pmon=2.23818E-9
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.9413E-1
res40_imon=-2.21225E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.20374E-1	-7.98559E-1	-9.13138E0	-9.14316E0	3.71933E-3	9.63688E-2	2.73576E1	-3.28236E1	-3.26248E1	2.68111E1	2.23583E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.1187E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.20541E-1	-7.98774E-1	-9.13138E0	-9.14328E0	3.3617E-3	9.65595E-2	2.73663E1	-3.26217E1	-3.26187E1	2.68762E1	2.23964E-9	2.52599E-3	2.52599E-3	6.33436E-3	2.12594E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.20565E-1	-7.98583E-1	-9.13153E0	-9.14314E0	3.71933E-3	9.67503E-2	2.73345E1	-3.25185E1	-3.26314E1	2.68178E1	2.23764E-9	2.52027E-3	2.52027E-3	6.29624E-3	2.11641E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.20589E-1	-7.98321E-1	-9.1315E0	-9.1429E0	3.52859E-3	9.67026E-2	2.73346E1	-3.27275E1	-3.26018E1	2.68302E1	2.23818E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.12403E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.20303E-1	-7.98702E-1	-9.13129E0	-9.14307E0	3.24249E-3	9.66311E-2	2.72921E1	-3.27346E1	-3.26006E1	2.68514E1	2.23825E-9	2.51709E-3	2.51709E-3	6.31798E-3	2.12957E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.2016E-1	-7.98535E-1	-9.13122E0	-9.14299E0	3.38554E-3	9.62496E-2	2.73291E1	-3.27582E1	-3.26224E1	2.68184E1	2.2372E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.12587E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.20112E-1	-7.98297E-1	-9.13134E0	-9.1429E0	3.50475E-3	9.67741E-2	2.73424E1	-3.26272E1	-3.25978E1	2.68302E1	2.24304E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.13513E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.19993E-1	-7.98726E-1	-9.1315E0	-9.14311E0	3.69549E-3	9.68218E-2	2.73135E1	-3.25828E1	-3.26194E1	2.67602E1	2.24109E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.13142E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.20374E-1	-7.98607E-1	-9.13124E0	-9.14273E0	3.55244E-3	9.66549E-2	2.73237E1	-3.2632E1	-3.25996E1	2.68464E1	2.23915E-9	2.51443E-3	2.51443E-3	6.34037E-3	2.12218E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.19993E-1	-7.98583E-1	-9.13146E0	-9.14295E0	3.69549E-3	9.66787E-2	2.73139E1	-3.26909E1	-3.26337E1	2.68394E1	2.23487E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.12775E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.20017E-1	-7.98965E-1	-9.13119E0	-9.14283E0	3.74317E-3	9.68695E-2	2.72949E1	-3.26446E1	-3.25671E1	2.68142E1	2.23818E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.12587E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.19921E-1	-7.98821E-1	-9.13148E0	-9.14299E0	3.74317E-3	9.67741E-2	2.73629E1	-3.25511E1	-3.26649E1	2.68202E1	2.2372E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.12218E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.20351E-1	-7.98202E-1	-9.13141E0	-9.14316E0	3.57628E-3	9.65834E-2	2.73141E1	-3.27125E1	-3.25906E1	2.68442E1	2.23392E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.13139E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.20398E-1	-7.98631E-1	-9.13134E0	-9.14299E0	3.69549E-3	9.66072E-2	2.73213E1	-3.27612E1	-3.26272E1	2.68094E1	2.24499E-9	2.51662E-3	2.51662E-3	6.28552E-3	2.12587E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.20112E-1	-7.98678E-1	-9.13172E0	-9.14285E0	3.93391E-3	9.63449E-2	2.73617E1	-3.25629E1	-3.26101E1	2.68224E1	2.23818E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.11666E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.20303E-1	-7.98678E-1	-9.13174E0	-9.14295E0	3.52859E-3	9.64165E-2	2.73184E1	-3.25408E1	-3.2626E1	2.68337E1	2.2406E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.12413E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.1985E-1	-7.9875E-1	-9.13165E0	-9.14321E0	3.38554E-3	9.61781E-2	2.73393E1	-3.26621E1	-3.26488E1	2.68232E1	2.24106E-9	2.51603E-3	2.51603E-3	6.31269E-3	2.13672E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.19898E-1	-7.98607E-1	-9.13196E0	-9.14299E0	3.52859E-3	9.62496E-2	2.73263E1	-3.27481E1	-3.25936E1	2.68609E1	2.23429E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.13513E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09356E0	-8.20279E-1	-7.98798E-1	-9.1316E0	-9.14288E0	3.52859E-3	9.63211E-2	2.73231E1	-3.27233E1	-3.25629E1	2.68238E1	2.24012E-9	2.51919E-3	2.51919E-3	6.3445E-3	2.13314E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.19874E-1	-7.98655E-1	-9.13153E0	-9.14304E0	3.3617E-3	9.64642E-2	2.73387E1	-3.25511E1	-3.25995E1	2.68292E1	2.23818E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.12218E-2