[Scan]
initial_time=2016-01-18T17:02:09
final_time=2016-01-18T17:02:28
ip_count=19
run=1024
dataset=2
scan=84
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-8.19111E-1
ql1_imon=1.42592E-8
ql2_vset=
ql2_vmon=-7.98941E-1
ql2_imon=1.91157E-9
ql3_vset=
ql3_vmon=-9.13181E0
ql3_imon=2.07241E-9
ql4_vset=
ql4_vmon=-9.1434E0
ql4_imon=-2.81596E-10
mult1=-9.72397E-9
mult2=-2.76441E-9
rf_tmon=-3.70131E-3
rf_agc=3.30613E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.98159E-3
ql5_imon=1.6458E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62768E0
bslens_imon=2.30704E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1928E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.04895E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54188E1
cs_ef1b_imon=2.78478E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.02016E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04273E1
cs_ea1_imon=2.6179E-5
lens1_vset=-5.0E0
lens1_vmon=-5.29445E0
lens1_imon=2.62067E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6491E1
os_ef1alow_imon=2.96375E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03564E1
cs_ea2_imon=1.47117E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84348E1
cs_ef1a_imon=2.92796E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.22327E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11471E1
os_restr1_imon=4.28887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14669E1
os_ea1_imon=2.37962E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63612E1
os_ef1bup_imon=3.07635E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24369E0
cs_ionrep_imon=1.18205E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92027E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01867E1
cs_anode1_imon=2.90085E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20358E0
olens4_imon=3.23203E-8
tplens_vset=1.4E-1
tplens_vmon=1.73216E0
tplens_imon=-3.8226E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26478E1
iondef2_imon=1.56526E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03187E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.66311E-2
ql6_imon=3.9829E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24789E0
ionrepsh_imon=1.70189E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74594E1
cs_ef2b_imon=3.13995E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34463E0
os_ea2_imon=-5.48088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06208E2
lens4b_imon=2.00666E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71437E1
cs_ef2a_imon=3.16636E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07541E0
os_ef2alow_imon=-2.57806E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85067E-1
os_ef2bup_imon=-5.31308E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1132E1
os_restr2_imon=3.40233E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.3274E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.22978E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73104E1
iondef1_imon=1.11175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6816E1
iondef4_imon=1.10415E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.87639E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81021E-1
olens1_imon=7.45562E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13941E0
cs_ionaccel_imon=-1.83435E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47351E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56486E1
einzel_imon=7.83728E-6
window_vset=0.0E0
window_vmon=2.56493E-1
window_imon=-8.50857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82761E2
mask1_imon=2.39119E-4
mask2_vset=0.0E0
mask2_vmon=-1.86721E1
mask2_imon=-5.03332E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.55224E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.58611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.20977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25119E0
defgridb_imon=6.18236E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3331E1
os_fil1_imon=9.41424E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07069E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61944E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.93408E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62806E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6308E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86045E-2
os_fil2_imon=-2.67498E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82547E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.92911E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37143E-1
cs_fil2_imon=-2.47225E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28102E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22358E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.1187E-2
chamber_ion_pmon=2.23583E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.68097E-1
res40_imon=-2.56763E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.19564E-1	-7.98869E-1	-9.13146E0	-9.1434E0	3.38554E-3	9.67741E-2	2.72877E1	-3.26897E1	-3.26277E1	2.681E1	2.24155E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.12413E-2
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.19707E-1	-7.98917E-1	-9.1321E0	-9.14323E0	3.43323E-3	9.67741E-2	2.72904E1	-3.26529E1	-3.26181E1	2.68725E1	2.23583E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.12413E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.19564E-1	-7.98512E-1	-9.13198E0	-9.14314E0	3.3617E-3	9.66311E-2	2.73187E1	-3.26083E1	-3.2606E1	2.6829E1	2.23566E-9	2.51248E-3	2.51248E-3	6.32978E-3	2.11829E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.1954E-1	-7.98607E-1	-9.13181E0	-9.14288E0	3.26633E-3	9.6488E-2	2.73491E1	-3.26695E1	-3.25947E1	2.68106E1	2.23825E-9	2.51709E-3	2.51709E-3	6.31269E-3	2.12779E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.19135E-1	-7.98392E-1	-9.13162E0	-9.14299E0	3.24249E-3	9.66072E-2	2.7302E1	-3.26536E1	-3.26174E1	2.68437E1	2.23297E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.12413E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.19063E-1	-7.98798E-1	-9.13179E0	-9.14314E0	3.62396E-3	9.66072E-2	2.73219E1	-3.26669E1	-3.2644E1	2.68022E1	2.22171E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.12218E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.19302E-1	-7.98583E-1	-9.13169E0	-9.14302E0	3.67165E-3	9.69172E-2	2.73263E1	-3.26986E1	-3.26124E1	2.68325E1	2.22461E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.12957E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.1954E-1	-7.98583E-1	-9.13165E0	-9.14302E0	3.6478E-3	9.67264E-2	2.73256E1	-3.26801E1	-3.25953E1	2.68337E1	2.24634E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.1187E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.19349E-1	-7.98821E-1	-9.13181E0	-9.1428E0	3.76701E-3	9.66549E-2	2.72932E1	-3.2656E1	-3.25961E1	2.68338E1	2.24243E-9	2.51575E-3	2.51575E-3	6.3282E-3	2.12607E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.19302E-1	-7.98726E-1	-9.13179E0	-9.14292E0	3.67165E-3	9.6488E-2	2.72985E1	-3.26362E1	-3.2638E1	2.68839E1	2.23652E-9	2.52106E-3	2.52106E-3	6.31902E-3	2.13153E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.19349E-1	-7.98416E-1	-9.13181E0	-9.14295E0	3.67165E-3	9.63688E-2	2.73033E1	-3.26278E1	-3.26518E1	2.67728E1	2.24402E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.1185E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.19492E-1	-7.98464E-1	-9.13177E0	-9.14283E0	3.86238E-3	9.61781E-2	2.73694E1	-3.26626E1	-3.25894E1	2.68737E1	2.24155E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.12051E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.19421E-1	-7.98488E-1	-9.13174E0	-9.14276E0	3.69549E-3	9.64642E-2	2.73435E1	-3.26308E1	-3.26026E1	2.6796E1	2.24012E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.12034E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.1954E-1	-7.98869E-1	-9.13174E0	-9.14302E0	3.57628E-3	9.65834E-2	2.73523E1	-3.26484E1	-3.26178E1	2.68496E1	2.23869E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.12051E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.19349E-1	-7.98845E-1	-9.13141E0	-9.14285E0	3.8147E-3	9.64165E-2	2.73363E1	-3.26713E1	-3.26144E1	2.6807E1	2.23526E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.12587E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.19492E-1	-7.98726E-1	-9.13153E0	-9.14299E0	3.8147E-3	9.63688E-2	2.73169E1	-3.2711E1	-3.26124E1	2.68623E1	2.23041E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.1185E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.19349E-1	-7.98821E-1	-9.13188E0	-9.14307E0	3.98159E-3	9.65595E-2	2.73544E1	-3.26296E1	-3.26254E1	2.68556E1	2.23526E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.11482E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.19373E-1	-7.98559E-1	-9.13203E0	-9.14326E0	4.05312E-3	9.66072E-2	2.73248E1	-3.2688E1	-3.26393E1	2.68528E1	2.23964E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.12413E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.19182E-1	-7.98464E-1	-9.13205E0	-9.14292E0	4.00543E-3	9.67264E-2	2.73399E1	-3.26512E1	-3.25888E1	2.68148E1	2.23678E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.12051E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.19111E-1	-7.98941E-1	-9.13181E0	-9.1434E0	3.98159E-3	9.66311E-2	2.73104E1	-3.26478E1	-3.26272E1	2.6816E1	2.23583E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.1187E-2