[Scan]
initial_time=2016-01-18T17:02:36
final_time=2016-01-18T17:02:55
ip_count=19
run=1024
dataset=2
scan=85
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08837E-4
ql1_vset=
ql1_vmon=-8.19325E-1
ql1_imon=1.41827E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=1.9682E-9
ql3_vset=
ql3_vmon=-9.1321E0
ql3_imon=1.67516E-9
ql4_vset=
ql4_vmon=-9.14302E0
ql4_imon=-2.24996E-10
mult1=-8.96738E-9
mult2=-2.60175E-9
rf_tmon=-4.85162E-3
rf_agc=3.34153E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.45707E-3
ql5_imon=1.66898E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65324E0
bslens_imon=2.56449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19317E1
lens5a_imon=2.00846E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53967E1
cs_ef1b_imon=2.78286E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04674E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04439E1
cs_ea1_imon=2.62219E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3177E0
lens1_imon=2.67776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6493E1
os_ef1alow_imon=2.98066E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03673E1
cs_ea2_imon=1.50268E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84792E1
cs_ef1a_imon=2.92617E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.2188E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11471E1
os_restr1_imon=4.2683E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14881E1
os_ea1_imon=2.39779E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63526E1
os_ef1bup_imon=3.07443E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22378E0
cs_ionrep_imon=1.17882E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92015E2
cs_nozzle_imon=1.93533E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01957E1
cs_anode1_imon=2.89397E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.23136E-8
tplens_vset=1.4E-1
tplens_vmon=1.6957E0
tplens_imon=-1.71468E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2593E1
iondef3_imon=1.50409E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26431E1
iondef2_imon=1.58337E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03169E2
lens6_imon=2.98385E-4
ql6_vset=1.0E-1
ql6_vmon=9.68695E-2
ql6_imon=3.95653E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25328E0
ionrepsh_imon=1.72495E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.17835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74725E1
cs_ef2b_imon=3.13458E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34353E0
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06171E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71435E1
cs_ef2a_imon=3.16077E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05839E0
os_ef2alow_imon=-2.46748E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74621E-1
os_ef2bup_imon=-5.19562E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11766E1
os_restr2_imon=3.41023E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.3053E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01986E1
cs_anode2_imon=2.24431E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73411E1
iondef1_imon=1.11299E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6822E1
iondef4_imon=1.09078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.86434E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.39588E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12424E0
cs_ionaccel_imon=-1.67487E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0214E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56382E1
einzel_imon=7.79753E-6
window_vset=0.0E0
window_vmon=2.66761E-1
window_imon=-7.26569E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82781E2
mask1_imon=2.39049E-4
mask2_vset=0.0E0
mask2_vmon=-1.86875E1
mask2_imon=-6.09801E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.28253E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.74454E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.06308E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39079E0
defgridb_imon=6.15345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33308E1
os_fil1_imon=9.4288E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07736E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61944E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30889E1
cs_fil1_imon=9.96163E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62443E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62954E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69912E-2
os_fil2_imon=-2.56145E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92647E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.92758E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33783E-1
cs_fil2_imon=-2.92119E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08904E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22253E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.12218E-2
chamber_ion_pmon=2.23138E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40069E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.8844E-1
res40_imon=-2.42856E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.19016E-1	-7.98798E-1	-9.13217E0	-9.14304E0	3.71933E-3	9.65834E-2	2.73375E1	-3.26797E1	-3.26142E1	2.68827E1	2.23041E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.14256E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.19039E-1	-7.98464E-1	-9.132E0	-9.14316E0	3.91006E-3	9.65357E-2	2.73504E1	-3.25862E1	-3.26009E1	2.68821E1	2.22442E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.13139E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.19016E-1	-7.98464E-1	-9.13205E0	-9.1428E0	3.76701E-3	9.65357E-2	2.73381E1	-3.26538E1	-3.26503E1	2.67885E1	2.23623E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.12772E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.19135E-1	-7.98249E-1	-9.13217E0	-9.14273E0	3.57628E-3	9.63688E-2	2.73321E1	-3.26813E1	-3.26128E1	2.69301E1	2.23678E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.12232E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.19135E-1	-7.97987E-1	-9.13208E0	-9.14311E0	3.52859E-3	9.62973E-2	2.73261E1	-3.26693E1	-3.25864E1	2.69007E1	2.23392E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.12051E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.1923E-1	-7.98249E-1	-9.13191E0	-9.14297E0	3.50475E-3	9.66311E-2	2.73187E1	-3.26531E1	-3.2613E1	2.68118E1	2.23526E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.11482E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.19182E-1	-7.97939E-1	-9.13179E0	-9.14283E0	3.33786E-3	9.68218E-2	2.73225E1	-3.26627E1	-3.26422E1	2.68482E1	2.23429E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.12772E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.19063E-1	-7.98535E-1	-9.13188E0	-9.14316E0	3.45707E-3	9.65595E-2	2.73198E1	-3.26856E1	-3.26113E1	2.68827E1	2.22916E-9	2.5131E-3	2.5131E-3	6.33977E-3	2.12594E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.19302E-1	-7.9813E-1	-9.13198E0	-9.14257E0	3.76701E-3	9.64642E-2	2.73057E1	-3.26729E1	-3.2605E1	2.68436E1	2.23818E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.12034E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.19182E-1	-7.98297E-1	-9.13198E0	-9.14283E0	3.74317E-3	9.67503E-2	2.73387E1	-3.26573E1	-3.26014E1	2.69445E1	2.24347E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.12775E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.19063E-1	-7.97868E-1	-9.132E0	-9.14302E0	3.67165E-3	9.66311E-2	2.73111E1	-3.26152E1	-3.26206E1	2.68112E1	2.23665E-9	2.51804E-3	2.51804E-3	6.30182E-3	2.1258E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.19206E-1	-7.97915E-1	-9.13191E0	-9.14304E0	3.71933E-3	9.63688E-2	2.73333E1	-3.26567E1	-3.26068E1	2.68947E1	2.22916E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.13139E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.1923E-1	-7.98368E-1	-9.13222E0	-9.14321E0	3.79086E-3	9.65595E-2	2.73081E1	-3.26386E1	-3.26176E1	2.68791E1	2.23235E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.12957E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.19016E-1	-7.98464E-1	-9.13212E0	-9.14302E0	3.74317E-3	9.68933E-2	2.73478E1	-3.26705E1	-3.262E1	2.67631E1	2.24597E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.12218E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-8.19016E-1	-7.98655E-1	-9.13212E0	-9.14299E0	3.40939E-3	9.67741E-2	2.73452E1	-3.26626E1	-3.26372E1	2.68106E1	2.23863E-9	2.5147E-3	2.5147E-3	6.31858E-3	2.12016E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.18992E-1	-7.98488E-1	-9.13196E0	-9.14326E0	3.93391E-3	9.68695E-2	2.72913E1	-3.26543E1	-3.26116E1	2.69362E1	2.23487E-9	2.51954E-3	2.51954E-3	6.28592E-3	2.12594E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.18992E-1	-7.98464E-1	-9.13169E0	-9.14297E0	3.91006E-3	9.68695E-2	2.73641E1	-3.26396E1	-3.25965E1	2.68088E1	2.23773E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.12051E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.19182E-1	-7.98392E-1	-9.13174E0	-9.14297E0	3.6478E-3	9.68218E-2	2.73207E1	-3.26458E1	-3.26134E1	2.68214E1	2.24012E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.12772E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.19135E-1	-7.98678E-1	-9.13177E0	-9.14321E0	3.6478E-3	9.69172E-2	2.73105E1	-3.26759E1	-3.26218E1	2.68653E1	2.23392E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.12413E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.19325E-1	-7.98488E-1	-9.1321E0	-9.14302E0	3.45707E-3	9.68695E-2	2.73411E1	-3.26431E1	-3.2593E1	2.6822E1	2.23138E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.12218E-2