[Scan]
initial_time=2016-01-18T17:03:02
final_time=2016-01-18T17:03:22
ip_count=19
run=1024
dataset=2
scan=86
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.19159E-1
ql1_imon=1.41032E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=1.96558E-9
ql3_vset=
ql3_vmon=-9.13193E0
ql3_imon=1.42685E-9
ql4_vset=
ql4_vmon=-9.14323E0
ql4_imon=-2.14517E-10
mult1=-9.60575E-9
mult2=-2.7311E-9
rf_tmon=-4.21452E-3
rf_agc=3.35746E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.69549E-3
ql5_imon=1.69461E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6438E0
bslens_imon=2.26011E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20473E1
lens5a_imon=2.00492E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12545E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53771E1
cs_ef1b_imon=2.77922E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02238E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04787E1
cs_ea1_imon=2.6183E-5
lens1_vset=-5.0E0
lens1_vmon=-5.2882E0
lens1_imon=2.53972E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.98634E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.48356E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84626E1
cs_ef1a_imon=2.92379E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.2229E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11401E1
os_restr1_imon=4.28053E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15005E1
os_ea1_imon=2.37797E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.18484E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92016E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02006E1
cs_anode1_imon=2.89946E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.21978E-8
tplens_vset=1.4E-1
tplens_vmon=1.69629E0
tplens_imon=-2.63493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26148E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.56674E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03209E2
lens6_imon=2.98296E-4
ql6_vset=1.0E-1
ql6_vmon=9.64165E-2
ql6_imon=4.02023E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24266E0
ionrepsh_imon=1.71327E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.17552E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.12327E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.36418E0
os_ea2_imon=-7.73168E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06181E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71524E1
cs_ef2a_imon=3.15802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06556E0
os_ef2alow_imon=-2.60238E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8333E-1
os_ef2bup_imon=-5.26443E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11407E1
os_restr2_imon=3.3919E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29645E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.22978E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7311E1
iondef1_imon=1.1183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68364E1
iondef4_imon=1.11144E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71774E1
olens3_imon=4.84943E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.4185E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.72662E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02134E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56324E1
einzel_imon=7.75387E-6
window_vset=0.0E0
window_vmon=2.53597E-1
window_imon=-8.30005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82777E2
mask1_imon=2.39028E-4
mask2_vset=0.0E0
mask2_vmon=-1.86946E1
mask2_imon=-7.36173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9261E3
multa_neg_imon=7.27191E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.25964E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.34978E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3967E0
defgridb_imon=6.15345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.41146E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06148E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62018E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30917E1
cs_fil1_imon=9.9558E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62766E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63103E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.78776E-2
os_fil2_imon=-2.68077E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8776E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.07312E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35769E-1
cs_fil2_imon=-2.42013E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04933E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22182E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.12403E-2
chamber_ion_pmon=2.21401E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01488E-1
res40_imon=-2.56416E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=187
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.19159E-1	-7.98512E-1	-9.132E0	-9.14309E0	3.48091E-3	9.64403E-2	2.73281E1	-3.2662E1	-3.26012E1	2.67764E1	2.24889E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.12772E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.18968E-1	-7.98512E-1	-9.13198E0	-9.14304E0	3.60012E-3	9.6035E-2	2.73051E1	-3.26744E1	-3.26034E1	2.67788E1	2.24012E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.12218E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.19039E-1	-7.99012E-1	-9.13212E0	-9.14321E0	3.71933E-3	9.60827E-2	2.7321E1	-3.26539E1	-3.26493E1	2.68395E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.18992E-1	-7.98726E-1	-9.132E0	-9.14314E0	3.74317E-3	9.64165E-2	2.73333E1	-3.26482E1	-3.25966E1	2.68238E1	2.24103E-9	2.51752E-3	2.51752E-3	6.35349E-3	2.11583E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.19087E-1	-7.98655E-1	-9.132E0	-9.14302E0	3.8147E-3	9.63211E-2	2.73143E1	-3.26842E1	-3.26052E1	2.68268E1	2.23665E-9	2.52139E-3	2.52139E-3	6.34099E-3	2.12204E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.18944E-1	-7.98798E-1	-9.13198E0	-9.14321E0	3.62396E-3	9.64642E-2	2.73165E1	-3.26122E1	-3.25846E1	2.67974E1	2.23665E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.12016E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.19182E-1	-7.98559E-1	-9.13188E0	-9.14316E0	3.45707E-3	9.63688E-2	2.73393E1	-3.26326E1	-3.26308E1	2.68797E1	2.2406E-9	2.5131E-3	2.5131E-3	6.35059E-3	2.12957E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.19159E-1	-7.98655E-1	-9.13188E0	-9.14314E0	3.95775E-3	9.62257E-2	2.73225E1	-3.26512E1	-3.25834E1	2.67926E1	2.24012E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.1185E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.19039E-1	-7.9875E-1	-9.13165E0	-9.14297E0	3.74317E-3	9.6488E-2	2.72951E1	-3.2659E1	-3.26065E1	2.695E1	2.23818E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.12034E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.18849E-1	-7.98821E-1	-9.13184E0	-9.14297E0	3.95775E-3	9.64403E-2	2.73406E1	-3.26682E1	-3.26395E1	2.69325E1	2.2372E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.12218E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.18896E-1	-7.98631E-1	-9.13177E0	-9.14319E0	4.05312E-3	9.64165E-2	2.73889E1	-3.26791E1	-3.25812E1	2.68935E1	2.23915E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.12772E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.19159E-1	-7.98535E-1	-9.13184E0	-9.14323E0	3.6478E-3	9.6488E-2	2.73051E1	-3.26944E1	-3.25995E1	2.68285E1	2.2372E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.12034E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.19254E-1	-7.98655E-1	-9.13208E0	-9.1429E0	3.76701E-3	9.64403E-2	2.73345E1	-3.26416E1	-3.26356E1	2.68364E1	2.23583E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.12594E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.19254E-1	-7.98869E-1	-9.13198E0	-9.14321E0	3.74317E-3	9.64642E-2	2.73478E1	-3.26476E1	-3.26194E1	2.67439E1	2.24155E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.12232E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.19135E-1	-7.99251E-1	-9.13196E0	-9.14295E0	3.91006E-3	9.65357E-2	2.73129E1	-3.26681E1	-3.26032E1	2.68376E1	2.24304E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.12218E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09356E0	-8.19206E-1	-7.98917E-1	-9.13191E0	-9.14288E0	3.67165E-3	9.67264E-2	2.73688E1	-3.26366E1	-3.26449E1	2.68749E1	2.21401E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.12034E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.19206E-1	-7.98798E-1	-9.13217E0	-9.14283E0	3.67165E-3	9.65357E-2	2.73308E1	-3.26848E1	-3.26395E1	2.68064E1	2.23623E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.12034E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0934E0	-8.19063E-1	-7.98702E-1	-9.13191E0	-9.14278E0	3.45707E-3	9.65118E-2	2.73399E1	-3.26526E1	-3.26012E1	2.68949E1	2.22678E-9	2.51136E-3	2.51136E-3	6.31858E-3	2.12016E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.19182E-1	-7.98488E-1	-9.13169E0	-9.14283E0	3.6478E-3	9.67264E-2	2.7337E1	-3.26384E1	-3.26236E1	2.6843E1	2.21401E-9	2.51393E-3	2.51393E-3	6.32858E-3	2.12244E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.19159E-1	-7.98726E-1	-9.13193E0	-9.14323E0	3.69549E-3	9.64165E-2	2.7311E1	-3.26579E1	-3.26148E1	2.68364E1	2.21401E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.12403E-2