[Scan]
initial_time=2016-01-18T17:03:29
final_time=2016-01-18T17:03:48
ip_count=19
run=1024
dataset=2
scan=87
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08831E-4
ql1_vset=
ql1_vmon=-8.18729E-1
ql1_imon=1.40466E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.91814E-9
ql3_vset=
ql3_vmon=-9.13234E0
ql3_imon=1.25215E-9
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-2.01356E-10
mult1=-9.70427E-9
mult2=-2.77366E-9
rf_tmon=-3.86638E-3
rf_agc=3.41735E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.69549E-3
ql5_imon=1.64469E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68509E0
bslens_imon=2.46185E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19187E1
lens5a_imon=1.9943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12526E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54015E1
cs_ef1b_imon=2.79312E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02086E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04451E1
cs_ea1_imon=2.61617E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32537E0
lens1_imon=2.63882E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64991E1
os_ef1alow_imon=2.98391E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03348E1
cs_ea2_imon=1.49383E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84191E1
cs_ef1a_imon=2.92761E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.22341E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11343E1
os_restr1_imon=4.26941E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15223E1
os_ea1_imon=2.39673E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63502E1
os_ef1bup_imon=3.06523E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22555E0
cs_ionrep_imon=1.1728E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92018E2
cs_nozzle_imon=1.93572E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01676E1
cs_anode1_imon=2.88243E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.21939E-8
tplens_vset=1.4E-1
tplens_vmon=1.71635E0
tplens_imon=-4.08609E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26032E1
iondef3_imon=1.50445E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26419E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03185E2
lens6_imon=2.9819E-4
ql6_vset=1.0E-1
ql6_vmon=9.67741E-2
ql6_imon=4.02423E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22496E0
ionrepsh_imon=1.72991E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33864E1
lens5b_imon=2.17481E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74768E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37539E0
os_ea2_imon=-6.24513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06185E2
lens4b_imon=2.00701E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71507E1
cs_ef2a_imon=3.15698E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07773E0
os_ef2alow_imon=-2.39039E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6827E-1
os_ef2bup_imon=-5.42777E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11448E1
os_restr2_imon=3.39608E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23096E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.21623E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7329E1
iondef1_imon=1.10095E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68048E1
iondef4_imon=1.09337E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.79923E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.43137E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09307E0
cs_ionaccel_imon=-1.82393E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47254E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.8477E-6
window_vset=0.0E0
window_vmon=2.70394E-1
window_imon=-8.57807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82795E2
mask1_imon=2.39216E-4
mask2_vset=0.0E0
mask2_vmon=-1.86715E1
mask2_imon=-2.98292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.71433E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.61358E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=6.96398E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28449E0
defgridb_imon=5.98002E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.36732E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07816E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62091E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30955E1
cs_fil1_imon=9.94572E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62575E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62918E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67379E-2
os_fil2_imon=-2.64023E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.82508E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37642E-1
cs_fil2_imon=-2.30428E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13042E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22204E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.12218E-2
chamber_ion_pmon=2.23041E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.12493E-1
res40_imon=-2.57111E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.19063E-1	-7.98798E-1	-9.13203E0	-9.14304E0	3.62396E-3	9.64642E-2	2.73346E1	-3.26809E1	-3.26166E1	2.68364E1	2.21882E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.1185E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.18872E-1	-7.98655E-1	-9.13222E0	-9.14299E0	3.71933E-3	9.63688E-2	2.73326E1	-3.26756E1	-3.26548E1	2.68208E1	2.23202E-9	2.51632E-3	2.51632E-3	6.29128E-3	2.12051E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.19016E-1	-7.98726E-1	-9.13203E0	-9.1428E0	3.74317E-3	9.62973E-2	2.73535E1	-3.26166E1	-3.26036E1	2.68412E1	2.24012E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.12403E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.18825E-1	-7.98512E-1	-9.13203E0	-9.14321E0	4.12464E-3	9.62973E-2	2.73093E1	-3.26825E1	-3.26128E1	2.6798E1	2.24012E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.12034E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.18849E-1	-7.98774E-1	-9.13184E0	-9.14292E0	3.86238E-3	9.63926E-2	2.73177E1	-3.26338E1	-3.26098E1	2.68514E1	2.24442E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.10968E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.19063E-1	-7.98297E-1	-9.13169E0	-9.14299E0	4.02927E-3	9.65118E-2	2.73045E1	-3.26446E1	-3.26164E1	2.68322E1	2.23863E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.11641E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.19397E-1	-7.98655E-1	-9.13198E0	-9.14299E0	3.86238E-3	9.63926E-2	2.73442E1	-3.26843E1	-3.26561E1	2.68502E1	2.24012E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.12403E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.19063E-1	-7.98678E-1	-9.13217E0	-9.14302E0	3.91006E-3	9.64403E-2	2.73243E1	-3.26687E1	-3.26386E1	2.6831E1	2.2372E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.13142E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.18777E-1	-7.98535E-1	-9.1321E0	-9.14328E0	3.91006E-3	9.62257E-2	2.73351E1	-3.26368E1	-3.26068E1	2.68394E1	2.23818E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.11482E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.19254E-1	-7.98702E-1	-9.13231E0	-9.14338E0	3.8147E-3	9.6488E-2	2.73381E1	-3.26482E1	-3.26074E1	2.68112E1	2.22461E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.11482E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.18801E-1	-7.9844E-1	-9.13229E0	-9.14328E0	3.74317E-3	9.63926E-2	2.72898E1	-3.26537E1	-3.2629E1	2.68406E1	2.23678E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.12413E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.18539E-1	-7.98631E-1	-9.13212E0	-9.14307E0	3.79086E-3	9.65118E-2	2.73234E1	-3.26561E1	-3.26201E1	2.68058E1	2.23107E-9	2.51847E-3	2.51847E-3	6.35059E-3	2.12051E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.18777E-1	-7.98655E-1	-9.13217E0	-9.14283E0	3.83854E-3	9.63926E-2	2.73256E1	-3.26983E1	-3.26209E1	2.68222E1	2.22461E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.12034E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.18825E-1	-7.98488E-1	-9.13203E0	-9.14292E0	3.98159E-3	9.62973E-2	2.73363E1	-3.26701E1	-3.26658E1	2.68144E1	2.23966E-9	2.51679E-3	2.51679E-3	6.31779E-3	2.12082E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.18753E-1	-7.98678E-1	-9.132E0	-9.14321E0	4.05312E-3	9.65834E-2	2.73646E1	-3.26771E1	-3.26158E1	2.68626E1	2.24499E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.11482E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.18825E-1	-7.98607E-1	-9.13193E0	-9.14316E0	4.24385E-3	9.65595E-2	2.73688E1	-3.26331E1	-3.25983E1	2.68406E1	2.23526E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.12587E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.18777E-1	-7.98631E-1	-9.13217E0	-9.14273E0	4.1008E-3	9.64403E-2	2.73574E1	-3.26879E1	-3.26543E1	2.68436E1	2.23818E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.12218E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.18419E-1	-7.98798E-1	-9.13188E0	-9.14285E0	3.95775E-3	9.67979E-2	2.73252E1	-3.26425E1	-3.26231E1	2.68314E1	2.2372E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.1185E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.18944E-1	-7.98583E-1	-9.13193E0	-9.14292E0	3.79086E-3	9.66549E-2	2.73193E1	-3.26467E1	-3.26213E1	2.6843E1	2.242E-9	2.52342E-3	2.52342E-3	6.33388E-3	2.11712E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.18729E-1	-7.98655E-1	-9.13234E0	-9.14283E0	3.69549E-3	9.67741E-2	2.7329E1	-3.26419E1	-3.26032E1	2.68048E1	2.23041E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.12218E-2