[Scan]
initial_time=2016-01-18T17:03:56
final_time=2016-01-18T17:04:15
ip_count=19
run=1024
dataset=2
scan=88
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08745E-4
ql1_vset=
ql1_vmon=-8.18515E-1
ql1_imon=1.39558E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.00739E-9
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=1.08833E-9
ql4_vset=
ql4_vmon=-9.14354E0
ql4_imon=-1.79839E-10
mult1=-9.3575E-9
mult2=-2.69582E-9
rf_tmon=-3.57153E-3
rf_agc=3.42706E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.68513E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65507E0
bslens_imon=2.45887E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20483E1
lens5a_imon=1.99904E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12558E2
lens4a_imon=2.04867E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54073E1
cs_ef1b_imon=2.79433E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04269E1
cs_ea1_imon=2.62427E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33757E0
lens1_imon=2.55429E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64803E1
os_ef1alow_imon=2.97999E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0355E1
cs_ea2_imon=1.46084E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84303E1
cs_ef1a_imon=2.92083E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.22064E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11409E1
os_restr1_imon=4.29091E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15147E1
os_ea1_imon=2.40021E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63577E1
os_ef1bup_imon=3.07224E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22602E0
cs_ionrep_imon=1.1864E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92013E2
cs_nozzle_imon=1.93638E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01763E1
cs_anode1_imon=2.89086E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.22047E-8
tplens_vset=1.4E-1
tplens_vmon=1.70441E0
tplens_imon=-3.61902E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26089E1
iondef3_imon=1.5097E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26242E1
iondef2_imon=1.56123E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0321E2
lens6_imon=2.98262E-4
ql6_vset=1.0E-1
ql6_vmon=9.65118E-2
ql6_imon=4.02085E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26037E0
ionrepsh_imon=1.71467E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.18569E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74683E1
cs_ef2b_imon=3.13957E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3787E0
os_ea2_imon=-5.22217E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0619E2
lens4b_imon=2.00695E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.714E1
cs_ef2a_imon=3.17344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0578E0
os_ef2alow_imon=-2.58E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9591E-1
os_ef2bup_imon=-5.32796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11493E1
os_restr2_imon=3.38634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.2989E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.22683E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73216E1
iondef1_imon=1.0925E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68635E1
iondef4_imon=1.10663E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.83267E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.38098E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11327E0
cs_ionaccel_imon=-1.89107E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0213E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56548E1
einzel_imon=7.85132E-6
window_vset=0.0E0
window_vmon=2.46415E-1
window_imon=-8.79076E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82801E2
mask1_imon=2.39111E-4
mask2_vset=0.0E0
mask2_vmon=-1.8711E1
mask2_imon=-5.4434E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.10798E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.5278E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=6.89423E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37273E0
defgridb_imon=6.07739E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.40708E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07887E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62025E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3093E1
cs_fil1_imon=9.94921E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61996E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62885E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57671E-2
os_fil2_imon=-2.77553E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88224E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.8426E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35804E-1
cs_fil2_imon=-2.32143E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.57269E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22185E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.12403E-2
chamber_ion_pmon=2.23818E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.62079E-1
res40_imon=-2.67731E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.18896E-1	-7.98535E-1	-9.13179E0	-9.14285E0	3.74317E-3	9.66072E-2	2.73159E1	-3.26434E1	-3.26392E1	2.68221E1	2.24137E-9	2.51596E-3	2.51596E-3	6.31586E-3	2.12197E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.18849E-1	-7.98583E-1	-9.13217E0	-9.14288E0	3.8147E-3	9.68218E-2	2.72949E1	-3.26567E1	-3.2605E1	2.68038E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.18491E-1	-7.98512E-1	-9.13188E0	-9.14273E0	3.74317E-3	9.66311E-2	2.73063E1	-3.26703E1	-3.26408E1	2.68458E1	2.2426E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.12392E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.18515E-1	-7.98726E-1	-9.13177E0	-9.14302E0	3.74317E-3	9.66072E-2	2.73165E1	-3.26699E1	-3.25912E1	2.68569E1	2.23507E-9	2.51593E-3	2.51593E-3	6.33734E-3	2.1186E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.18467E-1	-7.98655E-1	-9.13188E0	-9.14297E0	3.98159E-3	9.67026E-2	2.73263E1	-3.26496E1	-3.26095E1	2.6828E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.18419E-1	-7.98512E-1	-9.13157E0	-9.14326E0	3.79086E-3	9.65118E-2	2.73309E1	-3.2638E1	-3.25978E1	2.6843E1	2.23169E-9	2.51603E-3	2.51603E-3	6.3074E-3	2.11534E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.18706E-1	-7.98821E-1	-9.13198E0	-9.14297E0	4.00543E-3	9.67979E-2	2.7304E1	-3.26676E1	-3.26109E1	2.68439E1	2.24109E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.1185E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.18801E-1	-7.98607E-1	-9.13234E0	-9.14292E0	3.88622E-3	9.68218E-2	2.73181E1	-3.26071E1	-3.26319E1	2.68256E1	2.23487E-9	2.52187E-3	2.52187E-3	6.31727E-3	2.11464E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.18658E-1	-7.98178E-1	-9.1321E0	-9.14299E0	3.98159E-3	9.67741E-2	2.73027E1	-3.26673E1	-3.26018E1	2.684E1	2.23964E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.11148E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.18586E-1	-7.98225E-1	-9.13203E0	-9.14307E0	3.76701E-3	9.67264E-2	2.7358E1	-3.2626E1	-3.26128E1	2.68082E1	2.24207E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.12403E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.19063E-1	-7.98583E-1	-9.13203E0	-9.14292E0	3.95775E-3	9.66311E-2	2.72985E1	-3.26344E1	-3.26759E1	2.68294E1	2.23678E-9	2.51632E-3	2.51632E-3	6.29128E-3	2.1187E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.18682E-1	-7.98607E-1	-9.13186E0	-9.14309E0	3.83854E-3	9.66787E-2	2.73249E1	-3.26717E1	-3.26152E1	2.68241E1	2.24304E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.12587E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09364E0	-8.18706E-1	-7.98512E-1	-9.13162E0	-9.14288E0	3.93391E-3	9.66549E-2	2.73081E1	-3.26627E1	-3.2641E1	2.68194E1	2.23429E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.12218E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0934E0	-8.18682E-1	-7.98702E-1	-9.13157E0	-9.14285E0	3.93391E-3	9.68695E-2	2.73273E1	-3.26729E1	-3.25972E1	2.68381E1	2.24012E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.1185E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.18634E-1	-7.9844E-1	-9.13196E0	-9.14285E0	3.67165E-3	9.66787E-2	2.73321E1	-3.26482E1	-3.25948E1	2.6855E1	2.23665E-9	2.51248E-3	2.51248E-3	6.32418E-3	2.12204E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.1861E-1	-7.98345E-1	-9.13208E0	-9.14333E0	3.91006E-3	9.63211E-2	2.73275E1	-3.26472E1	-3.26496E1	2.67923E1	2.23773E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.12413E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.18706E-1	-7.98631E-1	-9.13208E0	-9.14295E0	3.95775E-3	9.62973E-2	2.7324E1	-3.26467E1	-3.26213E1	2.67445E1	2.23964E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.13685E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.18467E-1	-7.98464E-1	-9.132E0	-9.1428E0	4.02927E-3	9.66072E-2	2.73222E1	-3.26767E1	-3.26455E1	2.68198E1	2.24109E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.1185E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.18419E-1	-7.98678E-1	-9.13198E0	-9.14311E0	3.93391E-3	9.6488E-2	2.73388E1	-3.26376E1	-3.26009E1	2.69415E1	2.23773E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.1187E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.18515E-1	-7.98535E-1	-9.13179E0	-9.14354E0	4.43459E-3	9.65118E-2	2.73216E1	-3.26242E1	-3.26089E1	2.68635E1	2.23818E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.12403E-2