[Scan]
initial_time=2016-01-18T17:04:22
final_time=2016-01-18T17:04:42
ip_count=19
run=1024
dataset=2
scan=89
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08752E-4
ql1_vset=
ql1_vmon=-8.18229E-1
ql1_imon=1.40056E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=1.98075E-9
ql3_vset=
ql3_vmon=-9.13248E0
ql3_imon=9.76169E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-1.98197E-10
mult1=-1.00432E-8
mult2=-2.75657E-9
rf_tmon=-4.02576E-3
rf_agc=3.23771E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.3617E-3
ql5_imon=1.67335E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67152E0
bslens_imon=2.26011E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20143E1
lens5a_imon=1.99961E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.04852E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54015E1
cs_ef1b_imon=2.7813E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04434E1
cs_ea1_imon=2.63953E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32301E0
lens1_imon=2.70961E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64417E1
os_ef1alow_imon=2.98009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.4602E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84551E1
cs_ef1a_imon=2.93456E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.2159E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11569E1
os_restr1_imon=4.27288E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15105E1
os_ea1_imon=2.39779E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.06488E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23676E0
cs_ionrep_imon=1.18236E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92011E2
cs_nozzle_imon=1.93547E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01549E1
cs_anode1_imon=2.90259E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.21554E-8
tplens_vset=1.4E-1
tplens_vmon=1.73936E0
tplens_imon=-3.23663E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26396E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26714E1
iondef2_imon=1.55046E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03205E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.65357E-2
ql6_imon=4.02296E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25564E0
ionrepsh_imon=1.70619E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.19888E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74837E1
cs_ef2b_imon=3.12501E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.36831E0
os_ea2_imon=-5.36028E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0616E2
lens4b_imon=2.00683E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71263E1
cs_ef2a_imon=3.14933E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03371E0
os_ef2alow_imon=-2.46685E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83909E-1
os_ef2bup_imon=-5.22968E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11564E1
os_restr2_imon=3.41554E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.28619E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01705E1
cs_anode2_imon=2.24055E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73198E1
iondef1_imon=1.10591E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68508E1
iondef4_imon=1.08468E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.84543E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.45503E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-1.7301E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02135E2
cs_ionfocb_imon=1.47598E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.73649E-6
window_vset=0.0E0
window_vmon=2.70394E-1
window_imon=-8.23055E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82802E2
mask1_imon=2.39209E-4
mask2_vset=0.0E0
mask2_vmon=-1.87039E1
mask2_imon=-7.18797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.36039E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.34812E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.27545E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32288E0
defgridb_imon=6.04019E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33309E1
os_fil1_imon=9.37555E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07109E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6183E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.93275E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61874E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62667E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74977E-2
os_fil2_imon=-2.70973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.75018E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.96049E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.28691E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10726E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22238E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.12594E-2
chamber_ion_pmon=2.23964E-9
chamber_cvt_pmon=2.52815E-3
foreline_cvt_pmon=2.52815E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.20399E-1
res40_imon=-2.42862E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-8.18396E-1	-7.98893E-1	-9.13217E0	-9.14299E0	3.62396E-3	9.66311E-2	2.7308E1	-3.26726E1	-3.2613E1	2.684E1	2.23731E-9	2.51814E-3	2.51814E-3	6.30212E-3	2.12422E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.18586E-1	-7.98559E-1	-9.13212E0	-9.14304E0	3.76701E-3	9.63449E-2	2.73181E1	-3.26272E1	-3.26071E1	2.68638E1	2.24207E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.12403E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.18133E-1	-7.98774E-1	-9.13219E0	-9.14304E0	3.8147E-3	9.65595E-2	2.73339E1	-3.26476E1	-3.26212E1	2.68028E1	2.24347E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.12775E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.18372E-1	-7.98774E-1	-9.1321E0	-9.14309E0	3.67165E-3	9.66072E-2	2.73183E1	-3.26873E1	-3.2617E1	2.68496E1	2.2406E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.1187E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.18396E-1	-7.98678E-1	-9.13222E0	-9.14292E0	4.1008E-3	9.64642E-2	2.73231E1	-3.26338E1	-3.26368E1	2.68617E1	2.23235E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.11666E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.18372E-1	-7.98965E-1	-9.13248E0	-9.14304E0	4.29153E-3	9.62973E-2	2.72827E1	-3.26661E1	-3.25977E1	2.68713E1	2.22945E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.13142E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.18729E-1	-7.98607E-1	-9.13241E0	-9.14302E0	3.74317E-3	9.64403E-2	2.73141E1	-3.26296E1	-3.26212E1	2.68188E1	2.21882E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.12587E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.18706E-1	-7.98464E-1	-9.13231E0	-9.14295E0	3.79086E-3	9.61065E-2	2.73173E1	-3.26829E1	-3.25985E1	2.68437E1	2.21968E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.12413E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.18682E-1	-7.98607E-1	-9.13241E0	-9.14288E0	4.1008E-3	9.64403E-2	2.73568E1	-3.26621E1	-3.25803E1	2.68148E1	2.22974E-9	2.51693E-3	2.51693E-3	6.30182E-3	2.12204E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.18729E-1	-7.98559E-1	-9.13229E0	-9.14273E0	3.76701E-3	9.66072E-2	2.73169E1	-3.26402E1	-3.26419E1	2.68016E1	2.23915E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.12034E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.1861E-1	-7.98655E-1	-9.13231E0	-9.1428E0	3.57628E-3	9.66072E-2	2.73492E1	-3.26278E1	-3.25421E1	2.68563E1	2.2372E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.13698E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.18443E-1	-7.9906E-1	-9.13193E0	-9.14283E0	3.69549E-3	9.66311E-2	2.73464E1	-3.26708E1	-3.26484E1	2.68178E1	2.24109E-9	2.5188E-3	2.5188E-3	6.28552E-3	2.12772E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.18205E-1	-7.98607E-1	-9.13212E0	-9.14292E0	3.88622E-3	9.68218E-2	2.73123E1	-3.26897E1	-3.25773E1	2.6834E1	2.23773E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.12594E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.183E-1	-7.98965E-1	-9.13196E0	-9.14302E0	3.95775E-3	9.6488E-2	2.73369E1	-3.26825E1	-3.26512E1	2.6855E1	2.24012E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.13698E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.18133E-1	-7.98988E-1	-9.13208E0	-9.14292E0	3.8147E-3	9.62496E-2	2.73147E1	-3.26068E1	-3.26296E1	2.68701E1	2.23332E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.13142E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.18276E-1	-7.98821E-1	-9.13215E0	-9.14309E0	3.79086E-3	9.61781E-2	2.73607E1	-3.26695E1	-3.26405E1	2.68123E1	2.2372E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.13327E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.18181E-1	-7.98702E-1	-9.1325E0	-9.14283E0	3.17097E-3	9.62973E-2	2.73195E1	-3.27017E1	-3.26332E1	2.68331E1	2.23169E-9	2.52342E-3	2.52342E-3	6.3445E-3	2.12244E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.18253E-1	-7.98559E-1	-9.1321E0	-9.14288E0	3.48091E-3	9.63449E-2	2.73228E1	-3.26891E1	-3.26425E1	2.68406E1	2.24207E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.12218E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.18253E-1	-7.9875E-1	-9.13222E0	-9.14288E0	3.09944E-3	9.65118E-2	2.73246E1	-3.27033E1	-3.26048E1	2.68372E1	2.24359E-9	2.52473E-3	2.52473E-3	6.3074E-3	2.12204E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.18229E-1	-7.98845E-1	-9.13248E0	-9.14295E0	3.3617E-3	9.65357E-2	2.73198E1	-3.26714E1	-3.26396E1	2.68508E1	2.23964E-9	2.52815E-3	2.52815E-3	6.29665E-3	2.12594E-2