[Scan]
initial_time=2016-01-18T17:05:15
final_time=2016-01-18T17:05:35
ip_count=19
run=1024
dataset=2
scan=91
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.18086E-1
ql1_imon=1.39318E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=1.9549E-9
ql3_vset=
ql3_vmon=-9.13229E0
ql3_imon=7.96044E-10
ql4_vset=
ql4_vmon=-9.14302E0
ql4_imon=-1.88303E-10
mult1=-9.22746E-9
mult2=-2.69778E-9
rf_tmon=-3.7721E-3
rf_agc=3.29434E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.52859E-3
ql5_imon=1.71347E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61807E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20163E1
lens5a_imon=2.00362E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12553E2
lens4a_imon=2.04873E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.79879E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=2.63016E-5
lens1_vset=-5.0E0
lens1_vmon=-5.28063E0
lens1_imon=2.78649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65148E1
os_ef1alow_imon=2.99092E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.036E1
cs_ea2_imon=1.48847E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8435E1
cs_ef1a_imon=2.90105E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.21141E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11324E1
os_restr1_imon=4.29625E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15366E1
os_ea1_imon=2.39476E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6421E1
os_ef1bup_imon=3.09991E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.19214E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91996E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02063E1
cs_anode1_imon=2.87699E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.20016E-8
tplens_vset=1.4E-1
tplens_vmon=1.70512E0
tplens_imon=1.4285E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.51803E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.56706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03192E2
lens6_imon=2.98277E-4
ql6_vset=1.0E-1
ql6_vmon=9.66549E-2
ql6_imon=4.01582E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24429E0
ionrepsh_imon=1.73938E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.17377E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74218E1
cs_ef2b_imon=3.1314E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.32239E0
os_ea2_imon=-6.95891E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06181E2
lens4b_imon=2.0072E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71777E1
cs_ef2a_imon=3.18802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09083E0
os_ef2alow_imon=-2.58779E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.62236E-1
os_ef2bup_imon=-5.51054E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10976E1
os_restr2_imon=3.36812E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.28703E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01567E1
cs_anode2_imon=2.21459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73316E1
iondef1_imon=1.1049E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.13678E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.91401E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.80926E-1
olens1_imon=7.37657E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1555E0
cs_ionaccel_imon=-1.75626E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47067E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56222E1
einzel_imon=7.93199E-6
window_vset=0.0E0
window_vmon=2.04838E-1
window_imon=-6.06262E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82748E2
mask1_imon=2.38925E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-5.92108E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.83125E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.04755E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30532E0
defgridb_imon=5.98409E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3333E1
os_fil1_imon=9.41547E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07282E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61608E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30931E1
cs_fil1_imon=9.95326E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63498E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62706E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.60251E-2
os_fil2_imon=-2.76786E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94416E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.18819E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36961E-1
cs_fil2_imon=-2.56145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.2904E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22296E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.12413E-2
chamber_ion_pmon=2.23964E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-6.71516E-1
res40_imon=-2.88148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.1811E-1	-7.98774E-1	-9.13222E0	-9.14323E0	3.60012E-3	9.67979E-2	2.73482E1	-3.26738E1	-3.25782E1	2.6831E1	2.21978E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.12957E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.18205E-1	-7.9844E-1	-9.13188E0	-9.14335E0	3.6478E-3	9.67503E-2	2.73284E1	-3.26542E1	-3.2664E1	2.68004E1	2.23678E-9	2.52276E-3	2.52276E-3	6.34518E-3	2.13139E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.18253E-1	-7.98368E-1	-9.13227E0	-9.14292E0	3.86238E-3	9.67026E-2	2.73352E1	-3.26411E1	-3.26011E1	2.68346E1	2.24161E-9	2.52139E-3	2.52139E-3	6.32418E-3	2.11829E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.18443E-1	-7.98321E-1	-9.13229E0	-9.1434E0	3.6478E-3	9.66072E-2	2.73688E1	-3.26615E1	-3.26026E1	2.68476E1	2.23544E-9	2.52025E-3	2.52025E-3	6.32328E-3	2.12067E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.18229E-1	-7.98249E-1	-9.13203E0	-9.14335E0	3.55244E-3	9.64403E-2	2.73193E1	-3.26708E1	-3.2616E1	2.68208E1	2.23332E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.11666E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.18157E-1	-7.98225E-1	-9.13224E0	-9.1435E0	3.50475E-3	9.64165E-2	2.73216E1	-3.26566E1	-3.26352E1	2.68344E1	2.23964E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.12775E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.18324E-1	-7.98583E-1	-9.13215E0	-9.14335E0	3.43323E-3	9.66072E-2	2.73225E1	-3.26765E1	-3.2635E1	2.68256E1	2.24012E-9	2.52293E-3	2.52293E-3	6.3245E-3	2.1219E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.17919E-1	-7.98225E-1	-9.13227E0	-9.14316E0	3.67165E-3	9.65357E-2	2.73333E1	-3.26693E1	-3.26326E1	2.68176E1	2.23678E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.12957E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.17943E-1	-7.98512E-1	-9.132E0	-9.1433E0	3.57628E-3	9.62973E-2	2.73195E1	-3.26651E1	-3.2608E1	2.68424E1	2.23526E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.11666E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.17966E-1	-7.98488E-1	-9.13212E0	-9.14333E0	3.74317E-3	9.64165E-2	2.73183E1	-3.26482E1	-3.26549E1	2.68142E1	2.24062E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.12392E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.18014E-1	-7.98535E-1	-9.13241E0	-9.14345E0	3.60012E-3	9.66311E-2	2.72925E1	-3.26759E1	-3.2635E1	2.68383E1	2.23773E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.12413E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.18205E-1	-7.9844E-1	-9.13253E0	-9.14328E0	3.50475E-3	9.65118E-2	2.73231E1	-3.26482E1	-3.26693E1	2.68325E1	2.24304E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.12957E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.18014E-1	-7.9844E-1	-9.13265E0	-9.14319E0	3.6478E-3	9.65118E-2	2.73097E1	-3.26747E1	-3.26179E1	2.68151E1	2.23818E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.12957E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.18157E-1	-7.98678E-1	-9.13241E0	-9.1434E0	3.62396E-3	9.64165E-2	2.7332E1	-3.26915E1	-3.26499E1	2.6813E1	2.23918E-9	2.51287E-3	2.51287E-3	6.33388E-3	2.13135E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.183E-1	-7.98345E-1	-9.13219E0	-9.1434E0	3.33786E-3	9.6488E-2	2.73449E1	-3.2664E1	-3.25966E1	2.684E1	2.23863E-9	2.51693E-3	2.51693E-3	6.3074E-3	2.13334E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.18133E-1	-7.98059E-1	-9.1321E0	-9.14333E0	3.45707E-3	9.67503E-2	2.73399E1	-3.26632E1	-3.25788E1	2.68262E1	2.23566E-9	2.51581E-3	2.51581E-3	6.31299E-3	2.13334E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.1799E-1	-7.98416E-1	-9.13236E0	-9.14302E0	3.57628E-3	9.66072E-2	2.73256E1	-3.26539E1	-3.26368E1	2.68256E1	2.23869E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.12232E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.17943E-1	-7.98345E-1	-9.13243E0	-9.14283E0	3.52859E-3	9.61304E-2	2.73439E1	-3.26769E1	-3.25993E1	2.683E1	2.24058E-9	2.5199E-3	2.5199E-3	6.31779E-3	2.12257E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17966E-1	-7.98368E-1	-9.1321E0	-9.1435E0	3.69549E-3	9.62257E-2	2.73269E1	-3.2662E1	-3.26148E1	2.68319E1	2.23549E-9	2.52454E-3	2.52454E-3	6.31902E-3	2.1159E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.18086E-1	-7.98607E-1	-9.13229E0	-9.14302E0	3.52859E-3	9.66549E-2	2.73316E1	-3.2675E1	-3.2629E1	2.68304E1	2.23964E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.12413E-2