[Scan]
initial_time=2016-01-18T17:05:42
final_time=2016-01-18T17:06:01
ip_count=19
run=1024
dataset=2
scan=92
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.0874E-4
ql1_vset=
ql1_vmon=-8.18205E-1
ql1_imon=1.38672E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=2.00546E-9
ql3_vset=
ql3_vmon=-9.1321E0
ql3_imon=6.86729E-10
ql4_vset=
ql4_vmon=-9.14321E0
ql4_imon=-1.87123E-10
mult1=-9.86583E-9
mult2=-2.72718E-9
rf_tmon=-4.23222E-3
rf_agc=3.38459E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.43323E-3
ql5_imon=1.68033E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64144E0
bslens_imon=2.28488E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19706E1
lens5a_imon=2.01129E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=2.81223E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04611E1
cs_ea1_imon=2.60874E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33835E0
lens1_imon=2.57511E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65467E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.47613E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.8908E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.22299E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11394E1
os_restr1_imon=4.28373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15022E1
os_ea1_imon=2.40947E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64098E1
os_ef1bup_imon=3.12614E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25564E0
cs_ionrep_imon=1.16679E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92014E2
cs_nozzle_imon=1.93576E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.86053E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=3.18775E-8
tplens_vset=1.4E-1
tplens_vmon=1.68332E0
tplens_imon=-2.77651E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26278E1
iondef2_imon=1.57877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03173E2
lens6_imon=2.98229E-4
ql6_vset=1.0E-1
ql6_vmon=9.62734E-2
ql6_imon=4.01202E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26567E0
ionrepsh_imon=1.72176E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33758E1
lens5b_imon=2.15924E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74303E1
cs_ef2b_imon=3.11136E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.36831E0
os_ea2_imon=-7.48392E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06196E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7193E1
cs_ef2a_imon=3.21444E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12183E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40361E-1
os_ef2bup_imon=-5.53872E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=3.35535E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.30247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01365E1
cs_anode2_imon=2.21686E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73399E1
iondef1_imon=1.1052E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68209E1
iondef4_imon=1.1263E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.77313E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.36565E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17279E0
cs_ionaccel_imon=-1.58517E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47035E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55985E1
einzel_imon=7.86083E-6
window_vset=0.0E0
window_vmon=1.86709E-1
window_imon=-5.11183E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82745E2
mask1_imon=2.38792E-4
mask2_vset=0.0E0
mask2_vmon=-1.86158E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.52321E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.62774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.14095E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42623E0
defgridb_imon=6.09682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33311E1
os_fil1_imon=9.40054E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07443E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61867E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.9356E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63411E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62698E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6358E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.96682E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.74405E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.81826E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22346E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.12403E-2
chamber_ion_pmon=2.24012E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-7.17286E-1
res40_imon=-2.74564E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.18181E-1	-7.98702E-1	-9.13217E0	-9.14292E0	3.43323E-3	9.61065E-2	2.73499E1	-3.26531E1	-3.25995E1	2.68661E1	2.23773E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.14232E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.18038E-1	-7.98488E-1	-9.13227E0	-9.14302E0	3.3617E-3	9.63211E-2	2.73285E1	-3.26771E1	-3.25996E1	2.68238E1	2.24061E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.12772E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.18014E-1	-7.9844E-1	-9.13205E0	-9.14316E0	3.50475E-3	9.67741E-2	2.73399E1	-3.26514E1	-3.2626E1	2.68204E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.18157E-1	-7.98488E-1	-9.13229E0	-9.14304E0	3.52859E-3	9.62973E-2	2.73517E1	-3.26508E1	-3.26225E1	2.68184E1	2.242E-9	2.51287E-3	2.51287E-3	6.27577E-3	2.12957E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.1799E-1	-7.9844E-1	-9.1321E0	-9.14292E0	3.76701E-3	9.61781E-2	2.73231E1	-3.26903E1	-3.26248E1	2.6816E1	2.23773E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.12413E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.18014E-1	-7.98488E-1	-9.13217E0	-9.14302E0	3.83854E-3	9.60827E-2	2.73411E1	-3.27086E1	-3.26101E1	2.68442E1	2.21786E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.1185E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.18157E-1	-7.98249E-1	-9.132E0	-9.14297E0	3.57628E-3	9.62496E-2	2.73291E1	-3.26567E1	-3.26374E1	2.68659E1	2.21779E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.12232E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.17943E-1	-7.98488E-1	-9.13208E0	-9.14273E0	3.6478E-3	9.63211E-2	2.73039E1	-3.26975E1	-3.25978E1	2.68334E1	2.23915E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.12587E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.18372E-1	-7.98607E-1	-9.13222E0	-9.14297E0	3.40939E-3	9.61781E-2	2.73039E1	-3.26524E1	-3.25834E1	2.6816E1	2.24012E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.11666E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09673E0	-8.18229E-1	-7.98345E-1	-9.13212E0	-9.14288E0	3.45707E-3	9.61781E-2	2.73309E1	-3.26573E1	-3.26458E1	2.68482E1	2.24499E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.12218E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.18348E-1	-7.98082E-1	-9.1321E0	-9.14319E0	3.55244E-3	9.63449E-2	2.73856E1	-3.26975E1	-3.25743E1	2.68274E1	2.24012E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.12587E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.183E-1	-7.98249E-1	-9.13208E0	-9.14311E0	3.67165E-3	9.65357E-2	2.73482E1	-3.26638E1	-3.26372E1	2.68328E1	2.24207E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.12034E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.18491E-1	-7.98273E-1	-9.13219E0	-9.1433E0	3.50475E-3	9.62973E-2	2.73093E1	-3.26428E1	-3.26188E1	2.68082E1	2.23964E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.12232E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09758E0	-8.18276E-1	-7.9844E-1	-9.13227E0	-9.14338E0	3.48091E-3	9.64403E-2	2.73594E1	-3.26921E1	-3.26231E1	2.6837E1	2.24109E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.12218E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09704E0	-8.18658E-1	-7.98345E-1	-9.13208E0	-9.14319E0	3.3617E-3	9.64165E-2	2.73222E1	-3.26401E1	-3.25832E1	2.68424E1	2.23623E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.12587E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09665E0	-8.18634E-1	-7.9844E-1	-9.13224E0	-9.14316E0	3.40939E-3	9.66311E-2	2.73496E1	-3.26639E1	-3.26188E1	2.6822E1	2.23429E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.1185E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.1799E-1	-7.98464E-1	-9.13224E0	-9.14316E0	3.40939E-3	9.65595E-2	2.73357E1	-3.26554E1	-3.26128E1	2.68298E1	2.23332E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.12403E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.17919E-1	-7.98678E-1	-9.13231E0	-9.14328E0	3.50475E-3	9.63449E-2	2.73263E1	-3.26992E1	-3.26012E1	2.68208E1	2.24012E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.12218E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.1799E-1	-7.98631E-1	-9.13222E0	-9.14319E0	3.26633E-3	9.63926E-2	2.7349E1	-3.26554E1	-3.26152E1	2.68268E1	2.2406E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.12232E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.18205E-1	-7.98321E-1	-9.1321E0	-9.14321E0	3.43323E-3	9.62734E-2	2.73399E1	-3.26278E1	-3.26236E1	2.68209E1	2.24012E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.12403E-2