[Scan]
initial_time=2016-01-18T17:06:09
final_time=2016-01-18T17:06:28
ip_count=19
run=1024
dataset=2
scan=93
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08847E-4
ql1_vset=
ql1_vmon=-8.17823E-1
ql1_imon=1.38706E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.04457E-9
ql3_vset=
ql3_vmon=-9.13219E0
ql3_imon=6.18374E-10
ql4_vset=
ql4_vmon=-9.14321E0
ql4_imon=-1.76358E-10
mult1=-9.88488E-9
mult2=-2.67669E-9
rf_tmon=-5.38362E-3
rf_agc=3.23182E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.3617E-3
ql5_imon=1.68262E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62688E0
bslens_imon=2.4145E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=2.0008E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12552E2
lens4a_imon=2.05016E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54293E1
cs_ef1b_imon=2.8093E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04333E1
cs_ea1_imon=2.62117E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32359E0
lens1_imon=2.61652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65083E1
os_ef1alow_imon=2.96572E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0358E1
cs_ea2_imon=1.4752E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=2.91358E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.2216E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11582E1
os_restr1_imon=4.30048E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.40703E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63981E1
os_ef1bup_imon=3.07661E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23251E0
cs_ionrep_imon=1.16484E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9202E2
cs_nozzle_imon=1.93534E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01607E1
cs_anode1_imon=2.87098E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.21839E-8
tplens_vset=1.4E-1
tplens_vmon=1.70081E0
tplens_imon=-1.52903E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25924E1
iondef3_imon=1.50679E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.58208E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03166E2
lens6_imon=2.9817E-4
ql6_vset=1.0E-1
ql6_vmon=9.60827E-2
ql6_imon=4.02932E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27781E0
ionrepsh_imon=1.7257E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33701E1
lens5b_imon=2.17049E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74373E1
cs_ef2b_imon=3.13904E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38494E0
os_ea2_imon=-7.95673E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06175E2
lens4b_imon=2.00549E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71747E1
cs_ef2a_imon=3.1809E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06098E0
os_ef2alow_imon=-2.72218E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86204E-1
os_ef2bup_imon=-5.35498E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11203E1
os_restr2_imon=3.39167E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.30626E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.2104E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73333E1
iondef1_imon=1.10276E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.12129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.82941E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.80973E-1
olens1_imon=7.41263E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10383E0
cs_ionaccel_imon=-1.92537E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56589E1
einzel_imon=7.9816E-6
window_vset=0.0E0
window_vmon=2.21751E-1
window_imon=-9.26591E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82738E2
mask1_imon=2.38897E-4
mask2_vset=0.0E0
mask2_vmon=-1.86919E1
mask2_imon=-4.41892E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.26283E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.67515E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.32894E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39129E0
defgridb_imon=6.02136E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33308E1
os_fil1_imon=9.40976E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07384E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61862E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30945E1
cs_fil1_imon=9.94501E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62194E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63007E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.94903E-2
os_fil2_imon=-3.02534E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74821E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.97665E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36709E-1
cs_fil2_imon=-2.27871E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.0782E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22334E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.14598E-2
chamber_ion_pmon=2.2406E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.62825E-1
res40_imon=-3.00492E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.17537E-1	-7.98225E-1	-9.13231E0	-9.14292E0	3.48091E-3	9.64642E-2	2.73446E1	-3.26738E1	-3.26201E1	2.681E1	2.22383E-9	2.52697E-3	2.52697E-3	6.31299E-3	2.1258E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.17609E-1	-7.98416E-1	-9.13215E0	-9.14276E0	3.79086E-3	9.64403E-2	2.73284E1	-3.26658E1	-3.26119E1	2.68375E1	2.21968E-9	2.5131E-3	2.5131E-3	6.32356E-3	2.12594E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.17966E-1	-7.98583E-1	-9.13224E0	-9.14323E0	3.93391E-3	9.65118E-2	2.73416E1	-3.26625E1	-3.25901E1	2.68116E1	2.23764E-9	2.52362E-3	2.52362E-3	6.33538E-3	2.1258E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.17871E-1	-7.98392E-1	-9.132E0	-9.14314E0	3.60012E-3	9.64165E-2	2.73181E1	-3.26573E1	-3.26278E1	2.68328E1	2.24012E-9	2.51814E-3	2.51814E-3	6.32858E-3	2.11889E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-8.17657E-1	-7.98368E-1	-9.13193E0	-9.1433E0	3.6478E-3	9.6488E-2	2.73363E1	-3.26615E1	-3.26464E1	2.68556E1	2.23773E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.12594E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.17895E-1	-7.98631E-1	-9.13193E0	-9.1433E0	3.79086E-3	9.64165E-2	2.73219E1	-3.26573E1	-3.26158E1	2.68226E1	2.24304E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.12218E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.17943E-1	-7.98631E-1	-9.13227E0	-9.14309E0	3.8147E-3	9.65357E-2	2.73399E1	-3.26645E1	-3.2614E1	2.68328E1	2.2372E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.12957E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.17537E-1	-7.98678E-1	-9.13203E0	-9.14299E0	3.86238E-3	9.63211E-2	2.73051E1	-3.26741E1	-3.25834E1	2.68563E1	2.23429E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.12957E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.18205E-1	-7.98678E-1	-9.13193E0	-9.14285E0	4.00543E-3	9.63926E-2	2.73283E1	-3.26474E1	-3.26011E1	2.68424E1	2.23429E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.12403E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.18229E-1	-7.9875E-1	-9.13181E0	-9.14309E0	3.57628E-3	9.63688E-2	2.73045E1	-3.26716E1	-3.26216E1	2.68319E1	2.24012E-9	2.51919E-3	2.51919E-3	6.3074E-3	2.11534E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.18014E-1	-7.98488E-1	-9.13203E0	-9.14311E0	3.50475E-3	9.62019E-2	2.72709E1	-3.26206E1	-3.26536E1	2.6828E1	2.24012E-9	2.51498E-3	2.51498E-3	6.3131E-3	2.13727E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.17752E-1	-7.98583E-1	-9.13205E0	-9.14326E0	3.60012E-3	9.63926E-2	2.73472E1	-3.26554E1	-3.2626E1	2.68436E1	2.24792E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.13884E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.17895E-1	-7.98464E-1	-9.13181E0	-9.14342E0	3.50475E-3	9.62734E-2	2.73231E1	-3.26753E1	-3.26359E1	2.68424E1	2.23623E-9	2.52647E-3	2.52647E-3	6.28006E-3	2.12772E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.18086E-1	-7.98512E-1	-9.13179E0	-9.14328E0	3.6478E-3	9.64642E-2	2.73235E1	-3.26891E1	-3.26364E1	2.68313E1	2.24012E-9	2.52025E-3	2.52025E-3	6.31798E-3	2.13314E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.1799E-1	-7.98535E-1	-9.13217E0	-9.14302E0	3.71933E-3	9.65834E-2	2.73429E1	-3.26543E1	-3.2602E1	2.68076E1	2.2426E-9	2.5147E-3	2.5147E-3	6.32978E-3	2.11267E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.17895E-1	-7.98583E-1	-9.13217E0	-9.14307E0	3.50475E-3	9.63926E-2	2.73628E1	-3.26549E1	-3.2623E1	2.68094E1	2.23429E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.13698E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17871E-1	-7.98512E-1	-9.13188E0	-9.14292E0	3.33786E-3	9.62019E-2	2.73369E1	-3.26855E1	-3.2638E1	2.68069E1	2.21978E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.13513E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.17823E-1	-7.98345E-1	-9.13174E0	-9.14285E0	3.3617E-3	9.62973E-2	2.73178E1	-3.26614E1	-3.26202E1	2.68412E1	2.23917E-9	2.51847E-3	2.51847E-3	6.29128E-3	2.12232E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17728E-1	-7.98535E-1	-9.1321E0	-9.14278E0	3.52859E-3	9.61304E-2	2.73706E1	-3.26615E1	-3.2602E1	2.68581E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.17823E-1	-7.98535E-1	-9.13219E0	-9.14321E0	3.3617E-3	9.60827E-2	2.73333E1	-3.26663E1	-3.25924E1	2.68202E1	2.2406E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.14598E-2