[Scan]
initial_time=2016-01-18T17:06:35
final_time=2016-01-18T17:06:55
ip_count=19
run=1024
dataset=2
scan=94
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.17704E-1
ql1_imon=1.38949E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.90803E-9
ql3_vset=
ql3_vmon=-9.13205E0
ql3_imon=5.65147E-10
ql4_vset=
ql4_vmon=-9.14354E0
ql4_imon=-1.72031E-10
mult1=-9.41529E-9
mult2=-2.75254E-9
rf_tmon=-5.02313E-3
rf_agc=3.32074E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.55244E-3
ql5_imon=1.6919E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63852E0
bslens_imon=2.53359E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19488E1
lens5a_imon=2.00499E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12534E2
lens4a_imon=2.04861E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54385E1
cs_ef1b_imon=2.7778E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04751E1
cs_ea1_imon=2.63167E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36382E0
lens1_imon=2.41754E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64371E1
os_ef1alow_imon=2.97242E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03541E1
cs_ea2_imon=1.47527E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84675E1
cs_ef1a_imon=2.91403E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.2225E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1181E1
os_restr1_imon=4.27932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14994E1
os_ea1_imon=2.38909E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63579E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2496E0
cs_ionrep_imon=1.17391E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92006E2
cs_nozzle_imon=1.93443E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01909E1
cs_anode1_imon=2.88184E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.20813E-8
tplens_vset=1.4E-1
tplens_vmon=1.70819E0
tplens_imon=1.78899E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.51233E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.56587E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03166E2
lens6_imon=2.98391E-4
ql6_vset=1.0E-1
ql6_vmon=9.62973E-2
ql6_imon=4.05432E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27206E0
ionrepsh_imon=1.72759E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33745E1
lens5b_imon=2.18394E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74875E1
cs_ef2b_imon=3.1296E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37688E0
os_ea2_imon=-8.1319E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06178E2
lens4b_imon=2.00728E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70777E1
cs_ef2a_imon=3.17002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04894E0
os_ef2alow_imon=-2.66788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84533E-1
os_ef2bup_imon=-5.12675E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11229E1
os_restr2_imon=3.39196E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23123E2
cs_ionfoca_imon=6.29217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01834E1
cs_anode2_imon=2.24448E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73363E1
iondef1_imon=1.10091E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68436E1
iondef4_imon=1.10749E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.84867E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.37992E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12577E0
cs_ionaccel_imon=-1.96053E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02136E2
cs_ionfocb_imon=1.47469E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56349E1
einzel_imon=7.88994E-6
window_vset=0.0E0
window_vmon=2.52527E-1
window_imon=-1.09974E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82789E2
mask1_imon=2.39335E-4
mask2_vset=0.0E0
mask2_vmon=-1.86731E1
mask2_imon=-5.57064E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.15695E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.39699E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.07833E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24945E0
defgridb_imon=6.16489E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33321E1
os_fil1_imon=9.37717E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07622E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61895E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30947E1
cs_fil1_imon=9.95078E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62303E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63111E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.71957E-2
os_fil2_imon=-2.61884E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.75998E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.83328E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36778E-1
cs_fil2_imon=-2.20092E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.30968E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22365E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.12218E-2
chamber_ion_pmon=2.22993E-9
chamber_cvt_pmon=2.52045E-3
foreline_cvt_pmon=2.52045E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01177E-1
res40_imon=-2.59303E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.178E-1	-7.98273E-1	-9.1321E0	-9.14311E0	3.69549E-3	9.64642E-2	2.73016E1	-3.26921E1	-3.26301E1	2.68117E1	2.23407E-9	2.52179E-3	2.52179E-3	6.30171E-3	2.12765E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.17776E-1	-7.98106E-1	-9.13205E0	-9.14309E0	3.67165E-3	9.66549E-2	2.73363E1	-3.26735E1	-3.26687E1	2.68687E1	2.22442E-9	2.51096E-3	2.51096E-3	6.30202E-3	2.12051E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.18014E-1	-7.97987E-1	-9.13208E0	-9.14314E0	3.40939E-3	9.66549E-2	2.73335E1	-3.26318E1	-3.25953E1	2.68296E1	2.22364E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.13142E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.17895E-1	-7.98345E-1	-9.13198E0	-9.14297E0	3.69549E-3	9.65118E-2	2.72962E1	-3.26649E1	-3.25965E1	2.68209E1	2.2345E-9	2.52025E-3	2.52025E-3	6.29684E-3	2.13493E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.17323E-1	-7.98321E-1	-9.132E0	-9.14314E0	3.52859E-3	9.66072E-2	2.73476E1	-3.26714E1	-3.25947E1	2.68406E1	2.23202E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.12775E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.1749E-1	-7.98488E-1	-9.13203E0	-9.14309E0	3.60012E-3	9.62496E-2	2.73516E1	-3.2686E1	-3.25458E1	2.6834E1	2.23297E-9	2.51954E-3	2.51954E-3	6.35059E-3	2.12594E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.1768E-1	-7.9844E-1	-9.13198E0	-9.14297E0	3.67165E-3	9.64642E-2	2.73263E1	-3.26738E1	-3.26006E1	2.68532E1	2.24161E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.12768E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.17871E-1	-7.98416E-1	-9.13198E0	-9.14283E0	3.86238E-3	9.67741E-2	2.73375E1	-3.26765E1	-3.26272E1	2.68046E1	2.23583E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.13139E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.17943E-1	-7.98702E-1	-9.13203E0	-9.14307E0	3.6478E-3	9.67264E-2	2.72883E1	-3.26579E1	-3.26158E1	2.6828E1	2.24304E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.12218E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.18014E-1	-7.98535E-1	-9.13205E0	-9.14321E0	3.86238E-3	9.69172E-2	2.73027E1	-3.26567E1	-3.26272E1	2.68511E1	2.2372E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.12218E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.17919E-1	-7.98392E-1	-9.13224E0	-9.14311E0	3.83854E-3	9.67503E-2	2.72835E1	-3.26152E1	-3.26843E1	2.68394E1	2.24012E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.12587E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.17657E-1	-7.98726E-1	-9.1321E0	-9.14311E0	3.98159E-3	9.66787E-2	2.73075E1	-3.26975E1	-3.26044E1	2.67734E1	2.2372E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.12587E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.17871E-1	-7.9844E-1	-9.13205E0	-9.14326E0	3.62396E-3	9.67741E-2	2.73541E1	-3.26449E1	-3.26213E1	2.6831E1	2.22631E-9	2.51954E-3	2.51954E-3	6.28592E-3	2.1187E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.17895E-1	-7.98535E-1	-9.13196E0	-9.14302E0	3.83854E-3	9.67503E-2	2.72797E1	-3.26744E1	-3.26012E1	2.6825E1	2.22848E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.12587E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.17847E-1	-7.98202E-1	-9.13193E0	-9.14292E0	3.95775E-3	9.68456E-2	2.73327E1	-3.26579E1	-3.2644E1	2.68214E1	2.21401E-9	2.5131E-3	2.5131E-3	6.29128E-3	2.1187E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.18086E-1	-7.98368E-1	-9.13219E0	-9.14345E0	3.91006E-3	9.66787E-2	2.73478E1	-3.26627E1	-3.26128E1	2.68352E1	2.21401E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.12218E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.17943E-1	-7.98273E-1	-9.13219E0	-9.14326E0	3.88622E-3	9.66549E-2	2.73189E1	-3.26591E1	-3.262E1	2.68304E1	2.21497E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.11666E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.17823E-1	-7.98154E-1	-9.13215E0	-9.14338E0	4.07696E-3	9.66072E-2	2.73086E1	-3.26602E1	-3.26384E1	2.68603E1	2.24012E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.13142E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.17776E-1	-7.98607E-1	-9.1321E0	-9.14347E0	3.62396E-3	9.63926E-2	2.73357E1	-3.26506E1	-3.25924E1	2.68454E1	2.23392E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.12775E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.17704E-1	-7.98583E-1	-9.13205E0	-9.14354E0	3.55244E-3	9.62973E-2	2.73363E1	-3.26639E1	-3.262E1	2.68436E1	2.22993E-9	2.52045E-3	2.52045E-3	6.3074E-3	2.12218E-2