[Scan]
initial_time=2016-01-18T17:07:29
final_time=2016-01-18T17:07:48
ip_count=19
run=1024
dataset=2
scan=96
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.17585E-1
ql1_imon=1.38079E-8
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=1.95966E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=4.86743E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-1.73235E-10
mult1=-9.61998E-9
mult2=-2.61681E-9
rf_tmon=-5.66E-3
rf_agc=3.33456E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.50475E-3
ql5_imon=1.66996E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19658E1
lens5a_imon=1.98668E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54078E1
cs_ef1b_imon=2.78165E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04736E1
cs_ea1_imon=2.63016E-5
lens1_vset=-5.0E0
lens1_vmon=-5.27402E0
lens1_imon=2.62067E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64828E1
os_ef1alow_imon=2.96897E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.47766E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84522E1
cs_ef1a_imon=2.92761E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.22321E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.29547E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14927E1
os_ea1_imon=2.38502E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63508E1
os_ef1bup_imon=3.08539E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23648E0
cs_ionrep_imon=1.1734E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9202E2
cs_nozzle_imon=1.93669E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01537E1
cs_anode1_imon=2.88626E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.2135E-8
tplens_vset=1.4E-1
tplens_vmon=1.66847E0
tplens_imon=-2.92136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.49712E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26218E1
iondef2_imon=1.56418E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03179E2
lens6_imon=2.9814E-4
ql6_vset=1.0E-1
ql6_vmon=9.6488E-2
ql6_imon=4.02497E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25871E0
ionrepsh_imon=1.7401E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33916E1
lens5b_imon=2.17449E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.14169E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35304E0
os_ea2_imon=-5.80532E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06172E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70395E1
cs_ef2a_imon=3.15802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04761E0
os_ef2alow_imon=-2.56416E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86805E-1
os_ef2bup_imon=-5.1845E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11367E1
os_restr2_imon=3.39886E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.2672E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02018E1
cs_anode2_imon=2.23326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73526E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.82198E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.36645E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1174E0
cs_ionaccel_imon=-1.7579E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02146E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56926E1
einzel_imon=7.7782E-6
window_vset=0.0E0
window_vmon=2.65181E-1
window_imon=-9.86392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82768E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86732E1
mask2_imon=-5.31134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.48014E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.68345E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.27106E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42562E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33314E1
os_fil1_imon=9.41181E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07248E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61873E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30903E1
cs_fil1_imon=9.95018E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62059E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62973E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.51222E-2
os_fil2_imon=-2.74448E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81389E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.89173E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36893E-1
cs_fil2_imon=-2.2927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.16117E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22297E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.13513E-2
chamber_ion_pmon=2.21401E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.66157E-1
res40_imon=-2.4738E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.17871E-1	-7.98368E-1	-9.13241E0	-9.14342E0	3.74317E-3	9.64642E-2	2.73175E1	-3.26472E1	-3.2649E1	2.68538E1	2.23332E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.12218E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.17227E-1	-7.9875E-1	-9.13262E0	-9.1434E0	4.12464E-3	9.66072E-2	2.73417E1	-3.26771E1	-3.26062E1	2.68292E1	2.22403E-9	2.51809E-3	2.51809E-3	6.29926E-3	2.11951E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.17752E-1	-7.98512E-1	-9.13224E0	-9.14302E0	3.48091E-3	9.65834E-2	2.73364E1	-3.26608E1	-3.26419E1	2.68377E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.17728E-1	-7.98464E-1	-9.1326E0	-9.14309E0	3.76701E-3	9.61304E-2	2.73399E1	-3.26496E1	-3.26396E1	2.68424E1	2.24155E-9	2.51739E-3	2.51739E-3	6.28592E-3	2.12594E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.17537E-1	-7.98583E-1	-9.13267E0	-9.14314E0	3.79086E-3	9.64642E-2	2.73291E1	-3.26579E1	-3.2593E1	2.6825E1	2.24155E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.1332E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.178E-1	-7.98655E-1	-9.13267E0	-9.14316E0	3.8147E-3	9.66072E-2	2.73225E1	-3.26368E1	-3.26506E1	2.68346E1	2.22848E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.1185E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.17657E-1	-7.98893E-1	-9.13241E0	-9.14309E0	3.67165E-3	9.68218E-2	2.73345E1	-3.26344E1	-3.26561E1	2.68454E1	2.21786E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.12957E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.17728E-1	-7.9875E-1	-9.1325E0	-9.14316E0	3.74317E-3	9.70125E-2	2.73363E1	-3.26194E1	-3.26104E1	2.68502E1	2.21401E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.12218E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.17633E-1	-7.98869E-1	-9.13239E0	-9.14288E0	3.62396E-3	9.66311E-2	2.73508E1	-3.26609E1	-3.25942E1	2.68226E1	2.21305E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.13884E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.178E-1	-7.98512E-1	-9.13231E0	-9.14307E0	3.88622E-3	9.64642E-2	2.73098E1	-3.2629E1	-3.26113E1	2.68233E1	2.22157E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.12775E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.17752E-1	-7.98655E-1	-9.13265E0	-9.14302E0	3.95775E-3	9.65357E-2	2.72925E1	-3.26326E1	-3.26428E1	2.68282E1	2.24012E-9	2.5188E-3	2.5188E-3	6.36244E-3	2.12772E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.17704E-1	-7.98655E-1	-9.1326E0	-9.14314E0	3.88622E-3	9.62973E-2	2.73382E1	-3.26517E1	-3.26009E1	2.6831E1	2.24109E-9	2.51662E-3	2.51662E-3	6.26916E-3	2.12957E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.17561E-1	-7.98917E-1	-9.13217E0	-9.14304E0	3.69549E-3	9.63449E-2	2.73135E1	-3.26543E1	-3.26002E1	2.68514E1	2.23138E-9	2.5199E-3	2.5199E-3	6.36244E-3	2.11666E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-8.17537E-1	-7.98845E-1	-9.13231E0	-9.14278E0	3.76701E-3	9.65118E-2	2.73287E1	-3.26797E1	-3.26101E1	2.68279E1	2.24109E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.11482E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.17847E-1	-7.98368E-1	-9.13188E0	-9.1428E0	3.48091E-3	9.63449E-2	2.73345E1	-3.26603E1	-3.26482E1	2.68327E1	2.23964E-9	2.51847E-3	2.51847E-3	6.26985E-3	2.12775E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.18133E-1	-7.98321E-1	-9.13208E0	-9.14271E0	3.21865E-3	9.63926E-2	2.73363E1	-3.26506E1	-3.26128E1	2.68492E1	2.24062E-9	2.51693E-3	2.51693E-3	6.28511E-3	2.1258E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.17871E-1	-7.98392E-1	-9.13215E0	-9.14273E0	3.43323E-3	9.63449E-2	2.73219E1	-3.26771E1	-3.26146E1	2.68615E1	2.22558E-9	2.52099E-3	2.52099E-3	6.35692E-3	2.12218E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.17442E-1	-7.98678E-1	-9.13219E0	-9.14304E0	3.38554E-3	9.63449E-2	2.7357E1	-3.2672E1	-3.26178E1	2.68226E1	2.21684E-9	2.52061E-3	2.52061E-3	6.39408E-3	2.11328E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.1749E-1	-7.98726E-1	-9.13212E0	-9.1429E0	3.74317E-3	9.65595E-2	2.73339E1	-3.2644E1	-3.26332E1	2.68364E1	2.21401E-9	2.52384E-3	2.52384E-3	6.39408E-3	2.12775E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.17585E-1	-7.98821E-1	-9.13224E0	-9.14295E0	3.50475E-3	9.6488E-2	2.73526E1	-3.26218E1	-3.26266E1	2.68178E1	2.21401E-9	2.51552E-3	2.51552E-3	6.29645E-3	2.13513E-2