[Scan]
initial_time=2016-01-18T17:08:48
final_time=2016-01-18T17:09:08
ip_count=19
run=1024
dataset=2
scan=99
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-8.17466E-1
ql1_imon=1.38247E-8
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=1.982E-9
ql3_vset=
ql3_vmon=-9.13217E0
ql3_imon=3.85642E-10
ql4_vset=
ql4_vmon=-9.1429E0
ql4_imon=-1.55556E-10
mult1=-9.26292E-9
mult2=-2.73894E-9
rf_tmon=-5.01089E-3
rf_agc=3.27251E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.93391E-3
ql5_imon=1.65895E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60851E0
bslens_imon=2.26758E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20331E1
lens5a_imon=1.96922E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12555E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=2.78845E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05141E1
cs_ea1_imon=2.61199E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32971E0
lens1_imon=2.81118E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03415E1
cs_ea2_imon=1.46455E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.92612E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.22948E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.27472E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15434E1
os_ea1_imon=2.39528E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20557E0
cs_ionrep_imon=1.181E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91983E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02103E1
cs_anode1_imon=2.9254E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20382E0
olens4_imon=3.19902E-8
tplens_vset=1.4E-1
tplens_vmon=1.73142E0
tplens_imon=-2.55746E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.51818E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26419E1
iondef2_imon=1.57621E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03173E2
lens6_imon=2.98122E-4
ql6_vset=1.0E-1
ql6_vmon=9.66549E-2
ql6_imon=4.02396E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25638E0
ionrepsh_imon=1.747E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3405E1
lens5b_imon=2.16095E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7488E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38065E0
os_ea2_imon=-6.48754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06166E2
lens4b_imon=2.00902E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.17047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60784E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.39499E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.28165E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.2511E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73482E1
iondef1_imon=1.09064E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.75427E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.80902E-1
olens1_imon=7.39008E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.71851E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02133E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.57587E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82772E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86921E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.6742E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.31153E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50096E3
multb_neg_imon=7.02408E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35759E0
defgridb_imon=6.25276E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.42648E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07365E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61618E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3094E1
cs_fil1_imon=9.95531E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62918E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63181E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.75192E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.09222E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.578E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22324E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.12594E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.33774E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.17609E-1	-7.98273E-1	-9.13241E0	-9.14319E0	3.19481E-3	9.66072E-2	2.72821E1	-3.26567E1	-3.26514E1	2.68364E1	2.23665E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.1258E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.17752E-1	-7.98392E-1	-9.1325E0	-9.14321E0	3.21865E-3	9.65834E-2	2.73309E1	-3.26699E1	-3.26446E1	2.68376E1	2.2406E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.12594E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.178E-1	-7.98488E-1	-9.13253E0	-9.14316E0	3.48091E-3	9.64165E-2	2.73248E1	-3.27036E1	-3.26185E1	2.68244E1	2.23235E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.12403E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.17609E-1	-7.98321E-1	-9.13234E0	-9.14314E0	3.57628E-3	9.65357E-2	2.73616E1	-3.26368E1	-3.26669E1	2.68346E1	2.24106E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.13135E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.17728E-1	-7.98297E-1	-9.13229E0	-9.14311E0	3.3617E-3	9.65595E-2	2.73265E1	-3.26572E1	-3.26334E1	2.68088E1	2.23764E-9	2.51693E-3	2.51693E-3	6.3074E-3	2.12204E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.1799E-1	-7.98273E-1	-9.13234E0	-9.1429E0	3.6478E-3	9.65834E-2	2.72985E1	-3.26645E1	-3.2605E1	2.68178E1	2.22268E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.12772E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.17609E-1	-7.98607E-1	-9.13224E0	-9.14295E0	3.71933E-3	9.65595E-2	2.73482E1	-3.26425E1	-3.26231E1	2.68442E1	2.22558E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.12957E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.1737E-1	-7.98154E-1	-9.13243E0	-9.14295E0	3.67165E-3	9.63688E-2	2.73123E1	-3.26729E1	-3.26128E1	2.68563E1	2.23526E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.13698E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09673E0	-8.17347E-1	-7.98607E-1	-9.13253E0	-9.1433E0	3.55244E-3	9.63926E-2	2.73532E1	-3.26422E1	-3.2623E1	2.68154E1	2.24402E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.13513E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.17537E-1	-7.9875E-1	-9.13234E0	-9.14304E0	3.69549E-3	9.66072E-2	2.73171E1	-3.26368E1	-3.26338E1	2.68352E1	2.24207E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.13513E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.17442E-1	-7.98917E-1	-9.13222E0	-9.14307E0	3.95775E-3	9.64403E-2	2.73562E1	-3.27005E1	-3.25695E1	2.68166E1	2.23623E-9	2.51552E-3	2.51552E-3	6.28552E-3	2.13884E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.17466E-1	-7.9875E-1	-9.13208E0	-9.14328E0	3.74317E-3	9.64642E-2	2.73634E1	-3.26711E1	-3.2635E1	2.68412E1	2.2372E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.13142E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.17394E-1	-7.98869E-1	-9.13203E0	-9.14311E0	3.83854E-3	9.65834E-2	2.73105E1	-3.26392E1	-3.26062E1	2.68358E1	2.23332E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.13884E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.17251E-1	-7.98512E-1	-9.13198E0	-9.14307E0	3.62396E-3	9.65595E-2	2.73676E1	-3.26705E1	-3.265E1	2.68274E1	2.23773E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.12594E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.17394E-1	-7.9844E-1	-9.13198E0	-9.14316E0	3.55244E-3	9.63211E-2	2.72898E1	-3.26579E1	-3.26124E1	2.68394E1	2.24304E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.12403E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.1737E-1	-7.98559E-1	-9.13241E0	-9.14304E0	3.71933E-3	9.63688E-2	2.73165E1	-3.26783E1	-3.26008E1	2.68447E1	2.22171E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.13142E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.17227E-1	-7.98869E-1	-9.13219E0	-9.14297E0	3.60012E-3	9.61065E-2	2.7334E1	-3.26478E1	-3.26272E1	2.68238E1	2.23487E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.12594E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.17227E-1	-7.98965E-1	-9.1321E0	-9.14319E0	3.57628E-3	9.63688E-2	2.73417E1	-3.26307E1	-3.26508E1	2.68512E1	2.23235E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.11482E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.17323E-1	-7.98774E-1	-9.13234E0	-9.14321E0	3.38554E-3	9.65834E-2	2.73454E1	-3.26627E1	-3.2614E1	2.68442E1	2.23202E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.11689E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.17466E-1	-7.98917E-1	-9.13217E0	-9.1429E0	3.93391E-3	9.66549E-2	2.73482E1	-3.26419E1	-3.2626E1	2.68262E1	2.23773E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.12594E-2