[Scan]
initial_time=2016-01-18T17:09:15
final_time=2016-01-18T17:09:35
ip_count=19
run=1024
dataset=2
scan=100
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.17919E-1
ql1_imon=1.37691E-8
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=2.00077E-9
ql3_vset=
ql3_vmon=-9.13217E0
ql3_imon=3.59762E-10
ql4_vset=
ql4_vmon=-9.14321E0
ql4_imon=-1.38581E-10
mult1=-9.75243E-9
mult2=-2.76652E-9
rf_tmon=-5.26346E-3
rf_agc=3.35619E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.26633E-3
ql5_imon=1.66546E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62076E0
bslens_imon=2.45491E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19541E1
lens5a_imon=2.00668E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.04983E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=2.787E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02095E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04449E1
cs_ea1_imon=2.60758E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3597E0
lens1_imon=2.64957E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.47961E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=2.93477E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.23252E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11394E1
os_restr1_imon=4.2722E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15104E1
os_ea1_imon=2.3861E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25271E0
cs_ionrep_imon=1.181E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92001E2
cs_nozzle_imon=1.93545E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02109E1
cs_anode1_imon=2.90882E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.20084E-8
tplens_vset=1.4E-1
tplens_vmon=1.68184E0
tplens_imon=-3.80627E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.52332E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.57988E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03161E2
lens6_imon=2.98199E-4
ql6_vset=1.0E-1
ql6_vmon=9.65357E-2
ql6_imon=4.03341E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24904E0
ionrepsh_imon=1.71541E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33786E1
lens5b_imon=2.2131E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40453E0
os_ea2_imon=-9.02189E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06189E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.15821E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04915E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.68592E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1131E1
os_restr2_imon=3.39968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.30369E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.2374E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.08366E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68508E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71773E1
olens3_imon=4.79829E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.42513E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-1.59958E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02142E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=2.81613E-1
window_imon=-7.74273E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82755E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86837E1
mask2_imon=-7.88688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.17835E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.65311E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=6.92491E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43726E0
defgridb_imon=5.96627E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33314E1
os_fil1_imon=9.39351E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06921E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61834E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3093E1
cs_fil1_imon=9.95092E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62642E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63323E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52853E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.00161E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.81613E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22287E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.1332E-2
chamber_ion_pmon=2.24825E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40072E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.17585E-1	-7.98821E-1	-9.13224E0	-9.14283E0	4.3869E-3	9.69887E-2	2.73369E1	-3.26735E1	-3.2626E1	2.68719E1	2.24062E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.13334E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.17585E-1	-7.98702E-1	-9.13241E0	-9.14316E0	4.29153E-3	9.68218E-2	2.73784E1	-3.26975E1	-3.25713E1	2.68052E1	2.23583E-9	2.51417E-3	2.51417E-3	6.33436E-3	2.13139E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.17633E-1	-7.98583E-1	-9.1321E0	-9.14319E0	4.26769E-3	9.66311E-2	2.72831E1	-3.26527E1	-3.26272E1	2.68453E1	2.24207E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.13884E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.17657E-1	-7.98655E-1	-9.132E0	-9.14328E0	4.12464E-3	9.67026E-2	2.72811E1	-3.26717E1	-3.26224E1	2.68304E1	2.23964E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.13502E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.17609E-1	-7.98321E-1	-9.13217E0	-9.14299E0	3.83854E-3	9.65834E-2	2.7358E1	-3.26993E1	-3.25707E1	2.6825E1	2.23869E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.1187E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.17323E-1	-7.98392E-1	-9.13229E0	-9.1429E0	3.83854E-3	9.68456E-2	2.73472E1	-3.26416E1	-3.26518E1	2.6834E1	2.23623E-9	2.51443E-3	2.51443E-3	6.28552E-3	2.13698E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.17609E-1	-7.98678E-1	-9.132E0	-9.14283E0	3.71933E-3	9.67741E-2	2.72956E1	-3.26126E1	-3.2631E1	2.68602E1	2.24207E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.13698E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.1749E-1	-7.98297E-1	-9.13224E0	-9.14276E0	3.67165E-3	9.66311E-2	2.73242E1	-3.26451E1	-3.26069E1	2.68043E1	2.23922E-9	2.52364E-3	2.52364E-3	6.32784E-3	2.13474E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.17704E-1	-7.98845E-1	-9.13241E0	-9.1429E0	3.76701E-3	9.66787E-2	2.73213E1	-3.26494E1	-3.26008E1	2.681E1	2.23907E-9	2.51557E-3	2.51557E-3	6.3074E-3	2.12558E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.17609E-1	-7.98798E-1	-9.13255E0	-9.14297E0	3.40939E-3	9.69648E-2	2.73616E1	-3.26771E1	-3.26086E1	2.68377E1	2.23429E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.12218E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.17633E-1	-7.98607E-1	-9.13227E0	-9.14266E0	3.05176E-3	9.67741E-2	2.73797E1	-3.26784E1	-3.25805E1	2.68065E1	2.22726E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.1405E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.17776E-1	-7.98512E-1	-9.13255E0	-9.14283E0	3.24249E-3	9.63211E-2	2.73466E1	-3.26579E1	-3.26422E1	2.68334E1	2.21401E-9	2.51919E-3	2.51919E-3	6.26527E-3	2.13135E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.17657E-1	-7.98225E-1	-9.13255E0	-9.14285E0	3.31402E-3	9.64642E-2	2.73285E1	-3.26482E1	-3.26116E1	2.68316E1	2.21497E-9	2.5199E-3	2.5199E-3	6.36797E-3	2.12957E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.17609E-1	-7.98249E-1	-9.13243E0	-9.14288E0	3.55244E-3	9.63688E-2	2.73315E1	-3.26765E1	-3.25894E1	2.68304E1	2.2159E-9	2.51417E-3	2.51417E-3	6.28592E-3	2.13139E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.1749E-1	-7.98559E-1	-9.13229E0	-9.14299E0	3.40939E-3	9.6488E-2	2.73045E1	-3.26693E1	-3.26296E1	2.68172E1	2.23764E-9	2.51581E-3	2.51581E-3	6.27954E-3	2.12204E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.17251E-1	-7.98559E-1	-9.13248E0	-9.14288E0	3.52859E-3	9.64642E-2	2.73334E1	-3.26862E1	-3.26095E1	2.68454E1	2.23297E-9	2.51739E-3	2.51739E-3	6.41047E-3	2.11689E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.17251E-1	-7.98702E-1	-9.13205E0	-9.14295E0	3.57628E-3	9.63449E-2	2.73423E1	-3.26585E1	-3.259E1	2.68424E1	2.23138E-9	2.5199E-3	2.5199E-3	6.34588E-3	2.12403E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.17418E-1	-7.98821E-1	-9.1321E0	-9.14323E0	3.40939E-3	9.68456E-2	2.73139E1	-3.26478E1	-3.26325E1	2.68238E1	2.23869E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.12232E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.17776E-1	-7.9875E-1	-9.13219E0	-9.14304E0	3.3617E-3	9.66311E-2	2.73346E1	-3.26219E1	-3.26107E1	2.68221E1	2.23297E-9	2.51203E-3	2.51203E-3	6.26985E-3	2.12051E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.17919E-1	-7.98821E-1	-9.13217E0	-9.14321E0	3.26633E-3	9.65357E-2	2.73237E1	-3.26554E1	-3.26128E1	2.68508E1	2.24825E-9	2.51739E-3	2.51739E-3	6.29128E-3	2.1332E-2