[Scan]
initial_time=2016-01-18T17:09:42
final_time=2016-01-18T17:10:01
ip_count=19
run=1024
dataset=2
scan=101
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.17633E-1
ql1_imon=1.37813E-8
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=1.95638E-9
ql3_vset=
ql3_vmon=-9.13248E0
ql3_imon=3.86441E-10
ql4_vset=
ql4_vmon=-9.14292E0
ql4_imon=-1.66106E-10
mult1=-9.87283E-9
mult2=-2.78049E-9
rf_tmon=-5.20938E-3
rf_agc=3.24023E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.60012E-3
ql5_imon=1.6999E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64144E0
bslens_imon=2.28842E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19765E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12552E2
lens4a_imon=2.05114E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5402E1
cs_ef1b_imon=2.78269E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0466E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04274E1
cs_ea1_imon=2.59883E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37433E0
lens1_imon=2.78748E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64863E1
os_ef1alow_imon=2.98426E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03384E1
cs_ea2_imon=1.47896E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84614E1
cs_ef1a_imon=2.92692E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.23746E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.27184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14928E1
os_ea1_imon=2.3847E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63438E1
os_ef1bup_imon=3.07878E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26095E0
cs_ionrep_imon=1.16537E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92009E2
cs_nozzle_imon=1.93636E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01873E1
cs_anode1_imon=2.89772E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=3.22291E-8
tplens_vset=1.4E-1
tplens_vmon=1.68745E0
tplens_imon=-3.97991E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26597E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2641E1
iondef2_imon=1.57559E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03178E2
lens6_imon=2.98243E-4
ql6_vset=1.0E-1
ql6_vmon=9.64403E-2
ql6_imon=4.04387E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=1.73734E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33787E1
lens5b_imon=2.16242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35061E0
os_ea2_imon=-6.59907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06188E2
lens4b_imon=2.00778E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71043E1
cs_ef2a_imon=3.15385E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.39039E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76379E-1
os_ef2bup_imon=-5.19145E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11338E1
os_restr2_imon=3.40372E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23096E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.23048E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.12608E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6849E1
iondef4_imon=1.09407E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.86925E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.80902E-1
olens1_imon=7.40194E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12435E0
cs_ionaccel_imon=-1.69187E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02141E2
cs_ionfocb_imon=1.47348E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56324E1
einzel_imon=7.69131E-6
window_vset=0.0E0
window_vmon=2.50701E-1
window_imon=-7.98728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82799E2
mask1_imon=2.39303E-4
mask2_vset=0.0E0
mask2_vmon=-1.87056E1
mask2_imon=-6.63193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.42764E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.75515E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41146E0
defgridb_imon=6.19947E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33328E1
os_fil1_imon=9.41453E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.073E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62037E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.95452E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63368E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63675E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64847E-2
os_fil2_imon=-2.79661E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94132E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.87823E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3552E-1
cs_fil2_imon=-2.51859E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35028E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22394E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.13513E-2
chamber_ion_pmon=2.2372E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79478E-1
res40_imon=-2.45642E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.178E-1	-7.9844E-1	-9.13217E0	-9.1434E0	3.79086E-3	9.63926E-2	2.73446E1	-3.26425E1	-3.2636E1	2.68382E1	2.24347E-9	2.51847E-3	2.51847E-3	6.29128E-3	2.12957E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.17752E-1	-7.97987E-1	-9.13227E0	-9.14328E0	4.05312E-3	9.62496E-2	2.73321E1	-3.26621E1	-3.2632E1	2.6804E1	2.24251E-9	2.52815E-3	2.52815E-3	6.3074E-3	2.12413E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.17776E-1	-7.97868E-1	-9.13234E0	-9.14314E0	3.57628E-3	9.61304E-2	2.73375E1	-3.26474E1	-3.26005E1	2.68389E1	2.24304E-9	2.52647E-3	2.52647E-3	6.36797E-3	2.12403E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.17585E-1	-7.98202E-1	-9.1321E0	-9.14283E0	3.52859E-3	9.65834E-2	2.73628E1	-3.26524E1	-3.2629E1	2.68238E1	2.23918E-9	2.52236E-3	2.52236E-3	6.27577E-3	2.12957E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.17561E-1	-7.98202E-1	-9.13208E0	-9.1428E0	3.76701E-3	9.63926E-2	2.73279E1	-3.26873E1	-3.26104E1	2.6837E1	2.23623E-9	2.52977E-3	2.52977E-3	6.26371E-3	2.13513E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.17633E-1	-7.97987E-1	-9.132E0	-9.1428E0	3.71933E-3	9.59873E-2	2.73195E1	-3.26518E1	-3.26002E1	2.68401E1	2.2372E-9	2.52209E-3	2.52209E-3	6.25284E-3	2.12957E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.1749E-1	-7.98273E-1	-9.13191E0	-9.1429E0	3.71933E-3	9.62257E-2	2.73081E1	-3.2653E1	-3.26176E1	2.68346E1	2.23773E-9	2.51632E-3	2.51632E-3	6.36144E-3	2.11689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.17609E-1	-7.98345E-1	-9.132E0	-9.14311E0	3.79086E-3	9.62973E-2	2.73267E1	-3.26615E1	-3.26392E1	2.6837E1	2.23818E-9	2.52099E-3	2.52099E-3	6.35692E-3	2.11482E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.1749E-1	-7.9844E-1	-9.13188E0	-9.1433E0	3.8147E-3	9.62973E-2	2.73169E1	-3.26897E1	-3.26537E1	2.68358E1	2.24109E-9	2.52318E-3	2.52318E-3	6.25284E-3	2.12957E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.17561E-1	-7.98345E-1	-9.13231E0	-9.14323E0	3.55244E-3	9.62496E-2	2.73273E1	-3.26963E1	-3.25954E1	2.6828E1	2.23583E-9	2.51954E-3	2.51954E-3	6.22721E-3	2.1332E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.1737E-1	-7.98416E-1	-9.13248E0	-9.14307E0	3.62396E-3	9.65118E-2	2.72907E1	-3.2635E1	-3.26008E1	2.68424E1	2.23818E-9	2.51771E-3	2.51771E-3	6.26371E-3	2.1407E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.17847E-1	-7.98202E-1	-9.13231E0	-9.14302E0	3.60012E-3	9.63211E-2	2.73231E1	-3.26518E1	-3.2617E1	2.68352E1	2.24012E-9	2.52428E-3	2.52428E-3	6.22573E-3	2.13698E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.17585E-1	-7.98416E-1	-9.13248E0	-9.14297E0	3.38554E-3	9.63926E-2	2.73375E1	-3.26771E1	-3.26128E1	2.68304E1	2.23623E-9	2.51552E-3	2.51552E-3	6.28552E-3	2.12957E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.1749E-1	-7.98535E-1	-9.13224E0	-9.14316E0	3.52859E-3	9.62734E-2	2.73269E1	-3.26785E1	-3.26101E1	2.68221E1	2.23818E-9	2.52757E-3	2.52757E-3	6.34037E-3	2.14256E-2
1.8E1	6.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.1749E-1	-7.98392E-1	-9.13231E0	-9.14288E0	3.43323E-3	9.64165E-2	2.73123E1	-3.26609E1	-3.26278E1	2.6834E1	2.23678E-9	2.52707E-3	2.52707E-3	6.29128E-3	2.13867E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.17704E-1	-7.98416E-1	-9.13241E0	-9.14295E0	3.79086E-3	9.62496E-2	2.73169E1	-3.26567E1	-3.25965E1	2.68334E1	2.23235E-9	2.51552E-3	2.51552E-3	6.28006E-3	2.1185E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.17633E-1	-7.9813E-1	-9.13219E0	-9.14285E0	3.76701E-3	9.6488E-2	2.73369E1	-3.26699E1	-3.26488E1	2.6825E1	2.23678E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.13502E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.17323E-1	-7.97868E-1	-9.13222E0	-9.14311E0	3.71933E-3	9.62019E-2	2.73187E1	-3.2672E1	-3.2636E1	2.68146E1	2.24012E-9	2.51116E-3	2.51116E-3	6.3074E-3	2.12772E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17299E-1	-7.97844E-1	-9.13231E0	-9.14314E0	3.76701E-3	9.61065E-2	2.73446E1	-3.26455E1	-3.26148E1	2.68262E1	2.24251E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.13502E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.17633E-1	-7.98059E-1	-9.13248E0	-9.14292E0	3.60012E-3	9.64403E-2	2.73237E1	-3.2641E1	-3.26597E1	2.6849E1	2.2372E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.13513E-2