[Scan]
initial_time=2016-01-18T17:10:08
final_time=2016-01-18T17:10:28
ip_count=19
run=1024
dataset=2
scan=102
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-8.17609E-1
ql1_imon=1.3754E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=1.95007E-9
ql3_vset=
ql3_vmon=-9.13219E0
ql3_imon=3.38399E-10
ql4_vset=
ql4_vmon=-9.14292E0
ql4_imon=-1.43635E-10
mult1=-9.2106E-9
mult2=-2.59086E-9
rf_tmon=-4.84889E-3
rf_agc=3.24984E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.52859E-3
ql5_imon=1.70681E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.42292E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19282E1
lens5a_imon=2.00492E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1255E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53789E1
cs_ef1b_imon=2.77748E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04428E1
cs_ea1_imon=2.6098E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34601E0
lens1_imon=2.7804E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.97487E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03454E1
cs_ea2_imon=1.47932E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84562E1
cs_ef1a_imon=2.92275E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.23337E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1139E1
os_restr1_imon=4.27184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=2.38788E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.07983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22083E0
cs_ionrep_imon=1.18165E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91994E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01838E1
cs_anode1_imon=2.89251E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.21691E-8
tplens_vset=1.4E-1
tplens_vmon=1.67683E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25545E1
iondef3_imon=1.52108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27281E1
iondef2_imon=1.56674E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03193E2
lens6_imon=2.98257E-4
ql6_vset=1.0E-1
ql6_vmon=9.65595E-2
ql6_imon=4.01834E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26272E0
ionrepsh_imon=1.7161E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.18437E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.13682E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40665E0
os_ea2_imon=-7.83786E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06195E2
lens4b_imon=2.00665E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7164E1
cs_ef2a_imon=3.1674E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07193E0
os_ef2alow_imon=-2.57806E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82751E-1
os_ef2bup_imon=-5.30961E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1154E1
os_restr2_imon=3.3919E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.28619E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02012E1
cs_anode2_imon=2.22248E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73297E1
iondef1_imon=1.10485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68448E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=4.80284E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.42453E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-1.87258E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47476E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56562E1
einzel_imon=7.78862E-6
window_vset=0.0E0
window_vmon=2.62864E-1
window_imon=-7.29223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82777E2
mask1_imon=2.39147E-4
mask2_vset=0.0E0
mask2_vmon=-1.86964E1
mask2_imon=-7.08371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.68791E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.29668E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49119E0
defgridb_imon=6.02604E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.41157E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07584E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61961E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30928E1
cs_fil1_imon=9.94288E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62742E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63631E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58515E-2
os_fil2_imon=-2.59968E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86023E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.83014E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35395E-1
cs_fil2_imon=-2.39117E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14201E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22393E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.13502E-2
chamber_ion_pmon=2.24251E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.45884E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.17871E-1	-7.98535E-1	-9.13255E0	-9.14271E0	3.83854E-3	9.60827E-2	2.73281E1	-3.26236E1	-3.26301E1	2.68262E1	2.2406E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.12957E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.17847E-1	-7.98321E-1	-9.1325E0	-9.14297E0	3.60012E-3	9.66311E-2	2.73455E1	-3.26548E1	-3.25905E1	2.68356E1	2.2372E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.14628E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.1768E-1	-7.98488E-1	-9.13227E0	-9.14292E0	3.62396E-3	9.66787E-2	2.73454E1	-3.26585E1	-3.26031E1	2.68294E1	2.23764E-9	2.5225E-3	2.5225E-3	6.29067E-3	2.13523E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.17609E-1	-7.98392E-1	-9.13262E0	-9.14276E0	3.69549E-3	9.65118E-2	2.73363E1	-3.26419E1	-3.26027E1	2.68322E1	2.23879E-9	2.51623E-3	2.51623E-3	6.32247E-3	2.13465E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.17585E-1	-7.98464E-1	-9.13277E0	-9.14278E0	3.8147E-3	9.66549E-2	2.73039E1	-3.26422E1	-3.26254E1	2.68412E1	2.24012E-9	2.52521E-3	2.52521E-3	6.3131E-3	2.15081E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17513E-1	-7.98273E-1	-9.13241E0	-9.14304E0	3.6478E-3	9.69648E-2	2.73123E1	-3.26873E1	-3.26152E1	2.68472E1	2.23869E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.12957E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.17609E-1	-7.98321E-1	-9.1327E0	-9.14276E0	3.50475E-3	9.67026E-2	2.72449E1	-3.26762E1	-3.26089E1	2.68364E1	2.23623E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.12034E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.17561E-1	-7.98059E-1	-9.1326E0	-9.14307E0	3.67165E-3	9.67026E-2	2.7409E1	-3.26458E1	-3.25834E1	2.68388E1	2.24012E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.12034E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.17418E-1	-7.98488E-1	-9.1325E0	-9.14295E0	3.43323E-3	9.68933E-2	2.73189E1	-3.26597E1	-3.2596E1	2.6847E1	2.2406E-9	2.51203E-3	2.51203E-3	6.33977E-3	2.13502E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.17442E-1	-7.98655E-1	-9.13258E0	-9.14285E0	3.62396E-3	9.65834E-2	2.73293E1	-3.26537E1	-3.28042E1	2.6843E1	2.23818E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.13698E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.17657E-1	-7.98488E-1	-9.13241E0	-9.14283E0	3.69549E-3	9.67503E-2	2.73584E1	-3.26921E1	-3.25348E1	2.68394E1	2.24155E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.12775E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.17609E-1	-7.98678E-1	-9.13267E0	-9.14292E0	3.67165E-3	9.64403E-2	2.73381E1	-3.26437E1	-3.26248E1	2.68358E1	2.23863E-9	2.52585E-3	2.52585E-3	6.28511E-3	2.13523E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.17537E-1	-7.98655E-1	-9.1326E0	-9.14299E0	3.71933E-3	9.65118E-2	2.73387E1	-3.26596E1	-3.26054E1	2.68196E1	2.23678E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.14232E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.17752E-1	-7.98321E-1	-9.13227E0	-9.14295E0	3.60012E-3	9.66311E-2	2.73027E1	-3.26945E1	-3.26044E1	2.68238E1	2.23392E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.13685E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.17442E-1	-7.98512E-1	-9.13239E0	-9.1433E0	3.8147E-3	9.66072E-2	2.72839E1	-3.26413E1	-3.26154E1	2.68388E1	2.24597E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.13327E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.17418E-1	-7.98655E-1	-9.13255E0	-9.14297E0	3.93391E-3	9.66311E-2	2.73411E1	-3.26182E1	-3.25545E1	2.68238E1	2.2406E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.12775E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.17275E-1	-7.98583E-1	-9.13239E0	-9.14283E0	3.69549E-3	9.65118E-2	2.73352E1	-3.26697E1	-3.26124E1	2.68232E1	2.23623E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.13884E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.17418E-1	-7.98559E-1	-9.13248E0	-9.14299E0	3.8147E-3	9.63926E-2	2.7332E1	-3.2664E1	-3.26536E1	2.68394E1	2.2372E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.15002E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.1749E-1	-7.9844E-1	-9.13231E0	-9.14292E0	3.74317E-3	9.64165E-2	2.73157E1	-3.26201E1	-3.2629E1	2.68406E1	2.24012E-9	2.51552E-3	2.51552E-3	6.34588E-3	2.13698E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.17609E-1	-7.9844E-1	-9.13219E0	-9.14292E0	3.52859E-3	9.65595E-2	2.73297E1	-3.27281E1	-3.25545E1	2.68448E1	2.24251E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.13502E-2