[Scan]
initial_time=2016-01-18T17:10:35
final_time=2016-01-18T17:10:55
ip_count=19
run=1024
dataset=2
scan=103
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.17108E-1
ql1_imon=1.38496E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.97614E-9
ql3_vset=
ql3_vmon=-9.13234E0
ql3_imon=3.27754E-10
ql4_vset=
ql4_vmon=-9.14335E0
ql4_imon=-1.60837E-10
mult1=-9.66815E-9
mult2=-2.70663E-9
rf_tmon=-4.57852E-3
rf_agc=3.33276E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.43323E-3
ql5_imon=1.68217E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6397E0
bslens_imon=2.48007E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19935E1
lens5a_imon=1.99929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12527E2
lens4a_imon=2.04949E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53222E1
cs_ef1b_imon=2.78396E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04796E1
cs_ea1_imon=2.61718E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34312E0
lens1_imon=2.66753E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64703E1
os_ef1alow_imon=2.97417E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03552E1
cs_ea2_imon=1.47117E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84507E1
cs_ef1a_imon=2.91835E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.23995E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11595E1
os_restr1_imon=4.27257E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.40413E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63608E1
os_ef1bup_imon=3.05862E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=1.16691E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9198E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0206E1
cs_anode1_imon=2.91542E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.22003E-8
tplens_vset=1.4E-1
tplens_vmon=1.70031E0
tplens_imon=-2.70506E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2632E1
iondef2_imon=1.55949E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03157E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.69172E-2
ql6_imon=4.00996E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26772E0
ionrepsh_imon=1.74154E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33934E1
lens5b_imon=2.16945E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74648E1
cs_ef2b_imon=3.15116E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38608E0
os_ea2_imon=-7.71595E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06201E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70994E1
cs_ef2a_imon=3.10011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03467E0
os_ef2alow_imon=-2.82867E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.14201E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.13008E1
os_restr2_imon=3.41701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.27261E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01956E1
cs_anode2_imon=2.22619E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.10743E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68328E1
iondef4_imon=1.05556E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.85189E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.48268E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11423E0
cs_ionaccel_imon=-9.55967E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02137E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56466E1
einzel_imon=7.60706E-6
window_vset=0.0E0
window_vmon=2.67651E-1
window_imon=-8.86199E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82753E2
mask1_imon=2.39198E-4
mask2_vset=0.0E0
mask2_vmon=-1.87201E1
mask2_imon=-5.59395E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.53061E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.41668E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=7.05476E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32637E0
defgridb_imon=5.9949E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.40046E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07115E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62829E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30915E1
cs_fil1_imon=9.94831E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61888E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63528E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.51222E-2
os_fil2_imon=-2.95191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80329E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.19439E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34467E-1
cs_fil2_imon=-2.49291E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05054E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22394E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.1332E-2
chamber_ion_pmon=2.23678E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.88652E-1
res40_imon=-1.24972E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16798E-1	-7.98559E-1	-9.13217E0	-9.14295E0	3.93391E-3	9.64642E-2	2.73281E1	-3.26608E1	-3.26201E1	2.68465E1	2.24109E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.13513E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.17013E-1	-7.98678E-1	-9.13212E0	-9.14271E0	3.76701E-3	9.65595E-2	2.73339E1	-3.2678E1	-3.26383E1	2.68322E1	2.24251E-9	2.51525E-3	2.51525E-3	6.34518E-3	2.13139E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.17108E-1	-7.98225E-1	-9.13227E0	-9.14292E0	4.00543E-3	9.66787E-2	2.73097E1	-3.26382E1	-3.26556E1	2.68406E1	2.23566E-9	2.52585E-3	2.52585E-3	6.30182E-3	2.13145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16989E-1	-7.98106E-1	-9.13222E0	-9.14278E0	3.86238E-3	9.66072E-2	2.73339E1	-3.26284E1	-3.26687E1	2.68302E1	2.23773E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.13867E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.17227E-1	-7.98106E-1	-9.13215E0	-9.14273E0	3.62396E-3	9.62734E-2	2.73231E1	-3.26308E1	-3.26338E1	2.68442E1	2.23869E-9	2.51847E-3	2.51847E-3	6.29128E-3	2.15883E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.1718E-1	-7.98297E-1	-9.13227E0	-9.14297E0	3.74317E-3	9.63211E-2	2.73418E1	-3.26829E1	-3.2615E1	2.68487E1	2.23818E-9	2.52757E-3	2.52757E-3	6.30192E-3	2.13513E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.1706E-1	-7.98202E-1	-9.1327E0	-9.14288E0	3.62396E-3	9.63926E-2	2.73175E1	-3.26667E1	-3.26107E1	2.68412E1	2.23764E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.13712E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.1706E-1	-7.98106E-1	-9.1326E0	-9.1429E0	3.74317E-3	9.64165E-2	2.73141E1	-3.26813E1	-3.26032E1	2.68644E1	2.23678E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.13139E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.17299E-1	-7.98535E-1	-9.1326E0	-9.14283E0	3.91006E-3	9.6488E-2	2.7301E1	-3.26626E1	-3.26024E1	2.68226E1	2.24109E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.14442E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.1749E-1	-7.98607E-1	-9.13224E0	-9.14297E0	3.76701E-3	9.65357E-2	2.73454E1	-3.2644E1	-3.26278E1	2.68466E1	2.24109E-9	2.51552E-3	2.51552E-3	6.27461E-3	2.14628E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.17442E-1	-7.98941E-1	-9.13227E0	-9.14299E0	3.86238E-3	9.64165E-2	2.73458E1	-3.2708E1	-3.2649E1	2.68286E1	2.23392E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.12775E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.17299E-1	-7.98368E-1	-9.13229E0	-9.14297E0	3.88622E-3	9.66311E-2	2.73424E1	-3.26799E1	-3.26089E1	2.68412E1	2.23818E-9	2.51771E-3	2.51771E-3	6.29098E-3	2.12772E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.17251E-1	-7.98488E-1	-9.13253E0	-9.14326E0	3.67165E-3	9.62496E-2	2.73297E1	-3.26657E1	-3.26128E1	2.68412E1	2.24207E-9	2.52318E-3	2.52318E-3	6.34588E-3	2.13698E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.17132E-1	-7.98655E-1	-9.1325E0	-9.14266E0	3.3617E-3	9.66072E-2	2.73616E1	-3.26657E1	-3.25918E1	2.68496E1	2.23623E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.12587E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.17442E-1	-7.98464E-1	-9.13243E0	-9.14299E0	3.33786E-3	9.65595E-2	2.73508E1	-3.26458E1	-3.26098E1	2.68322E1	2.24304E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.13142E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.17084E-1	-7.9844E-1	-9.13241E0	-9.14304E0	3.74317E-3	9.69172E-2	2.73267E1	-3.2635E1	-3.26416E1	2.68262E1	2.23332E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.13327E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0934E0	-8.17156E-1	-7.98488E-1	-9.13224E0	-9.14273E0	3.40939E-3	9.67264E-2	2.73393E1	-3.26673E1	-3.26195E1	2.68166E1	2.24109E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.13884E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09348E0	-8.17657E-1	-7.98249E-1	-9.13215E0	-9.14295E0	3.45707E-3	9.66311E-2	2.73081E1	-3.26795E1	-3.26332E1	2.68406E1	2.23818E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.13698E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.17394E-1	-7.98559E-1	-9.13255E0	-9.14309E0	3.48091E-3	9.69172E-2	2.73434E1	-3.26543E1	-3.26307E1	2.68322E1	2.23392E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.12957E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.17108E-1	-7.98249E-1	-9.13234E0	-9.14335E0	3.43323E-3	9.69172E-2	2.73135E1	-3.2632E1	-3.26248E1	2.68328E1	2.23678E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.1332E-2