[Scan]
initial_time=2016-01-18T17:11:02
final_time=2016-01-18T17:11:21
ip_count=19
run=1024
dataset=2
scan=104
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08787E-4
ql1_vset=
ql1_vmon=-8.17132E-1
ql1_imon=1.37547E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=1.98975E-9
ql3_vset=
ql3_vmon=-9.13198E0
ql3_imon=2.7833E-10
ql4_vset=
ql4_vmon=-9.14321E0
ql4_imon=-1.44553E-10
mult1=-9.9604E-9
mult2=-2.83301E-9
rf_tmon=-3.7485E-3
rf_agc=3.3781E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.57628E-3
ql5_imon=1.65677E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67402E0
bslens_imon=2.54306E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19811E1
lens5a_imon=1.99933E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05056E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54391E1
cs_ef1b_imon=2.80475E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04327E1
cs_ea1_imon=2.60464E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32359E0
lens1_imon=2.92505E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64895E1
os_ef1alow_imon=2.98626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.035E1
cs_ea2_imon=1.48769E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84194E1
cs_ef1a_imon=2.92563E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.24021E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1161E1
os_restr1_imon=4.28606E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14889E1
os_ea1_imon=2.40079E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63754E1
os_ef1bup_imon=3.07534E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21782E0
cs_ionrep_imon=1.1832E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91965E2
cs_nozzle_imon=1.93648E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01865E1
cs_anode1_imon=2.90168E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.23302E-8
tplens_vset=1.4E-1
tplens_vmon=1.66347E0
tplens_imon=-2.19017E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26354E1
iondef3_imon=1.51707E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26779E1
iondef2_imon=1.56409E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03176E2
lens6_imon=2.98302E-4
ql6_vset=1.0E-1
ql6_vmon=9.63926E-2
ql6_imon=4.02759E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24965E0
ionrepsh_imon=1.74076E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33486E1
lens5b_imon=2.18555E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7462E1
cs_ef2b_imon=3.13073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37637E0
os_ea2_imon=-6.04679E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06175E2
lens4b_imon=2.00586E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71439E1
cs_ef2a_imon=3.16553E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05019E0
os_ef2alow_imon=-2.59303E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88899E-1
os_ef2bup_imon=-5.34382E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11441E1
os_restr2_imon=3.40431E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.29194E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02058E1
cs_anode2_imon=2.23438E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.09542E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68163E1
iondef4_imon=1.1015E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=4.87314E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.51153E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10581E0
cs_ionaccel_imon=-1.79586E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.8862E-6
window_vset=0.0E0
window_vmon=2.65626E-1
window_imon=-7.62906E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82753E2
mask1_imon=2.39114E-4
mask2_vset=0.0E0
mask2_vmon=-1.86968E1
mask2_imon=-5.49579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92574E3
multa_neg_imon=7.52728E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.71188E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.28854E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36984E0
defgridb_imon=6.0434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.39925E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07629E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62262E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30911E1
cs_fil1_imon=9.95203E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62883E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62991E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4891E-2
os_fil2_imon=-2.78726E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91592E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.59186E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34627E-1
cs_fil2_imon=-2.30072E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.18097E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22361E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.13502E-2
chamber_ion_pmon=2.23869E-9
chamber_cvt_pmon=2.52707E-3
foreline_cvt_pmon=2.52707E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.77276E-1
res40_imon=-2.51443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.17323E-1	-7.98392E-1	-9.13222E0	-9.14271E0	3.38554E-3	9.65118E-2	2.73346E1	-3.26455E1	-3.26266E1	2.68354E1	2.22186E-9	2.52027E-3	2.52027E-3	6.29624E-3	2.13145E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.17466E-1	-7.98082E-1	-9.13229E0	-9.14271E0	3.55244E-3	9.64165E-2	2.73399E1	-3.26609E1	-3.26254E1	2.68448E1	2.21401E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.1405E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.17585E-1	-7.98464E-1	-9.13229E0	-9.1428E0	3.45707E-3	9.61065E-2	2.73005E1	-3.26608E1	-3.25791E1	2.68376E1	2.21497E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.15376E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.17108E-1	-7.98559E-1	-9.13229E0	-9.14278E0	3.24249E-3	9.64403E-2	2.73363E1	-3.26777E1	-3.26194E1	2.68442E1	2.22051E-9	2.51709E-3	2.51709E-3	6.29684E-3	2.13672E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.17299E-1	-7.98726E-1	-9.13217E0	-9.14297E0	3.67165E-3	9.64165E-2	2.73141E1	-3.26567E1	-3.26008E1	2.68194E1	2.23235E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.13513E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.17251E-1	-7.98583E-1	-9.13246E0	-9.1429E0	3.45707E-3	9.65357E-2	2.73187E1	-3.26585E1	-3.26107E1	2.68388E1	2.21639E-9	2.52297E-3	2.52297E-3	6.30197E-3	2.14244E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.17275E-1	-7.98392E-1	-9.13229E0	-9.14321E0	3.67165E-3	9.70364E-2	2.73165E1	-3.26543E1	-3.26158E1	2.68538E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.17156E-1	-7.98607E-1	-9.13253E0	-9.14292E0	3.60012E-3	9.63449E-2	2.73093E1	-3.26843E1	-3.25996E1	2.68388E1	2.23915E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.13513E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.17442E-1	-7.98655E-1	-9.1325E0	-9.14307E0	3.60012E-3	9.62019E-2	2.73334E1	-3.26354E1	-3.26313E1	2.68256E1	2.23138E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.13698E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.17323E-1	-7.98726E-1	-9.13217E0	-9.14285E0	3.50475E-3	9.6488E-2	2.73327E1	-3.27095E1	-3.26092E1	2.68279E1	2.2406E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.13502E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.17323E-1	-7.98631E-1	-9.1326E0	-9.1428E0	3.86238E-3	9.64403E-2	2.73424E1	-3.26879E1	-3.26819E1	2.68046E1	2.2372E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.13513E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.17299E-1	-7.98225E-1	-9.1326E0	-9.14283E0	4.00543E-3	9.66787E-2	2.73145E1	-3.26242E1	-3.26419E1	2.68274E1	2.23526E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.13513E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.17466E-1	-7.98345E-1	-9.13236E0	-9.1428E0	3.8147E-3	9.67503E-2	2.73063E1	-3.26536E1	-3.26428E1	2.68418E1	2.24442E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.13139E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.17227E-1	-7.98488E-1	-9.13205E0	-9.14264E0	3.76701E-3	9.67503E-2	2.73311E1	-3.26331E1	-3.26738E1	2.68441E1	2.24109E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.13327E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.17275E-1	-7.98702E-1	-9.13196E0	-9.14268E0	3.95775E-3	9.64642E-2	2.73814E1	-3.26795E1	-3.2617E1	2.68412E1	2.23869E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.14415E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.17418E-1	-7.98321E-1	-9.13239E0	-9.14297E0	3.95775E-3	9.70364E-2	2.73175E1	-3.26236E1	-3.26071E1	2.68153E1	2.23526E-9	2.51225E-3	2.51225E-3	6.32936E-3	2.13142E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16894E-1	-7.98225E-1	-9.13239E0	-9.14304E0	3.57628E-3	9.66787E-2	2.73087E1	-3.27023E1	-3.26038E1	2.68304E1	2.23963E-9	2.51552E-3	2.51552E-3	6.29372E-3	2.13235E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.17084E-1	-7.98464E-1	-9.13208E0	-9.14311E0	3.45707E-3	9.65357E-2	2.73623E1	-3.26573E1	-3.26236E1	2.6822E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.16989E-1	-7.98631E-1	-9.13208E0	-9.14278E0	3.67165E-3	9.66549E-2	2.73511E1	-3.26408E1	-3.26183E1	2.68655E1	2.24294E-9	2.51393E-3	2.51393E-3	6.32858E-3	2.13672E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.17132E-1	-7.98488E-1	-9.13198E0	-9.14321E0	3.57628E-3	9.63926E-2	2.73381E1	-3.26779E1	-3.26354E1	2.68163E1	2.23869E-9	2.52707E-3	2.52707E-3	6.30202E-3	2.13502E-2