[Scan]
initial_time=2016-01-18T17:11:55
final_time=2016-01-18T17:12:15
ip_count=19
run=1024
dataset=2
scan=106
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08725E-4
ql1_vset=
ql1_vmon=-8.17776E-1
ql1_imon=1.37441E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.022E-9
ql3_vset=
ql3_vmon=-9.13236E0
ql3_imon=2.50447E-10
ql4_vset=
ql4_vmon=-9.14311E0
ql4_imon=-1.17636E-10
mult1=-9.48754E-9
mult2=-2.78793E-9
rf_tmon=-5.27045E-3
rf_agc=3.22237E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.67165E-3
ql5_imon=1.67688E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66376E0
bslens_imon=2.60358E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19649E1
lens5a_imon=2.00023E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54062E1
cs_ef1b_imon=2.79077E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02062E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04574E1
cs_ea1_imon=2.61189E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32554E0
lens1_imon=2.75029E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.97794E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03629E1
cs_ea2_imon=1.47153E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84427E1
cs_ef1a_imon=2.93387E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.25E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11462E1
os_restr1_imon=4.28186E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.38506E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63607E1
os_ef1bup_imon=3.08755E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22389E0
cs_ionrep_imon=1.17106E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91999E2
cs_nozzle_imon=1.93629E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01806E1
cs_anode1_imon=2.90782E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20389E0
olens4_imon=3.23433E-8
tplens_vset=1.4E-1
tplens_vmon=1.70961E0
tplens_imon=-2.68469E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26408E1
iondef3_imon=1.4862E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26773E1
iondef2_imon=1.5604E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03163E2
lens6_imon=2.98304E-4
ql6_vset=1.0E-1
ql6_vmon=9.65118E-2
ql6_imon=4.06431E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23893E0
ionrepsh_imon=1.73588E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33948E1
lens5b_imon=2.17374E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74783E1
cs_ef2b_imon=3.12476E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4068E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06192E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71568E1
cs_ef2a_imon=3.1654E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06314E0
os_ef2alow_imon=-2.44641E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92972E-1
os_ef2bup_imon=-5.36276E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11414E1
os_restr2_imon=3.40666E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.30351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.23383E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.10787E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68514E1
iondef4_imon=1.09677E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.88975E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81045E-1
olens1_imon=7.48774E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14493E0
cs_ionaccel_imon=-1.71947E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47444E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5652E1
einzel_imon=7.70787E-6
window_vset=0.0E0
window_vmon=2.53665E-1
window_imon=-8.80908E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82769E2
mask1_imon=2.39236E-4
mask2_vset=0.0E0
mask2_vmon=-1.86926E1
mask2_imon=-5.08851E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.57183E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.5195E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.12607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35985E0
defgridb_imon=6.05399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3333E1
os_fil1_imon=9.40732E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06924E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62576E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30907E1
cs_fil1_imon=9.95619E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62505E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63519E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.5868E-2
os_fil2_imon=-2.70837E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94234E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.47914E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36746E-1
cs_fil2_imon=-2.33154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12668E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22482E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.13513E-2
chamber_ion_pmon=2.24694E-9
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.84247E-1
res40_imon=-2.49792E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=280
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.1737E-1	-7.97987E-1	-9.13265E0	-9.1428E0	3.67165E-3	9.67264E-2	2.73387E1	-3.26777E1	-3.26296E1	2.6792E1	2.23366E-9	2.51647E-3	2.51647E-3	6.32888E-3	2.15286E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.1768E-1	-7.98154E-1	-9.13246E0	-9.14283E0	3.76701E-3	9.65595E-2	2.73296E1	-3.26446E1	-3.26101E1	2.68121E1	2.24012E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.14442E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-8.17513E-1	-7.98178E-1	-9.1325E0	-9.14261E0	3.83854E-3	9.6941E-2	2.73097E1	-3.26666E1	-3.25884E1	2.68372E1	2.23958E-9	2.5207E-3	2.5207E-3	6.34374E-3	2.13365E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09364E0	-8.17418E-1	-7.97987E-1	-9.13227E0	-9.1428E0	4.1008E-3	9.65357E-2	2.73135E1	-3.26657E1	-3.25894E1	2.68635E1	2.23731E-9	2.52025E-3	2.52025E-3	6.32328E-3	2.14209E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.17561E-1	-7.98225E-1	-9.13241E0	-9.14283E0	3.79086E-3	9.66311E-2	2.7337E1	-3.26172E1	-3.26166E1	2.68292E1	2.24304E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.14442E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.17418E-1	-7.98273E-1	-9.13219E0	-9.14292E0	3.76701E-3	9.66787E-2	2.73505E1	-3.26402E1	-3.26178E1	2.68274E1	2.23869E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.13685E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.17347E-1	-7.98297E-1	-9.1321E0	-9.14283E0	4.00543E-3	9.67264E-2	2.73271E1	-3.26909E1	-3.26034E1	2.68526E1	2.23964E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.13502E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.17561E-1	-7.98321E-1	-9.13217E0	-9.14278E0	3.79086E-3	9.66072E-2	2.73387E1	-3.26657E1	-3.26146E1	2.68581E1	2.23665E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.13145E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.17299E-1	-7.98535E-1	-9.13241E0	-9.14285E0	3.60012E-3	9.63211E-2	2.73128E1	-3.26537E1	-3.26065E1	2.68586E1	2.23964E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.13867E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.17561E-1	-7.98488E-1	-9.13227E0	-9.14273E0	3.26633E-3	9.64403E-2	2.73285E1	-3.26705E1	-3.26104E1	2.68307E1	2.23818E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.13513E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.17633E-1	-7.98583E-1	-9.13248E0	-9.14288E0	3.76701E-3	9.65595E-2	2.7358E1	-3.26561E1	-3.25617E1	2.68377E1	2.22945E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.13327E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.17466E-1	-7.98512E-1	-9.13262E0	-9.1429E0	3.31402E-3	9.66549E-2	2.7355E1	-3.26549E1	-3.26146E1	2.68412E1	2.22654E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.12587E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.17585E-1	-7.98178E-1	-9.13258E0	-9.14295E0	3.43323E-3	9.66072E-2	2.73098E1	-3.26667E1	-3.26172E1	2.6852E1	2.23297E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.14964E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.17728E-1	-7.98202E-1	-9.13255E0	-9.14297E0	3.43323E-3	9.66072E-2	2.73169E1	-3.2639E1	-3.26207E1	2.68346E1	2.23915E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.14628E-2
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17299E-1	-7.98297E-1	-9.13224E0	-9.14304E0	3.31402E-3	9.67026E-2	2.73249E1	-3.26759E1	-3.26549E1	2.68472E1	2.23583E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.14232E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.17108E-1	-7.98297E-1	-9.13236E0	-9.14297E0	3.40939E-3	9.62973E-2	2.73322E1	-3.26266E1	-3.26425E1	2.6825E1	2.23915E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.14256E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.17084E-1	-7.98202E-1	-9.13222E0	-9.14297E0	3.45707E-3	9.63211E-2	2.73251E1	-3.26822E1	-3.26553E1	2.68207E1	2.23773E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.14232E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.17156E-1	-7.98082E-1	-9.13234E0	-9.14311E0	3.45707E-3	9.63926E-2	2.73499E1	-3.26531E1	-3.26213E1	2.68325E1	2.23407E-9	2.52521E-3	2.52521E-3	6.3245E-3	2.12957E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.17561E-1	-7.98082E-1	-9.13236E0	-9.14326E0	3.33786E-3	9.63926E-2	2.73574E1	-3.26849E1	-3.25954E1	2.6843E1	2.23773E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.12775E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.17776E-1	-7.98249E-1	-9.13236E0	-9.14311E0	3.67165E-3	9.65118E-2	2.73187E1	-3.26773E1	-3.26408E1	2.68514E1	2.24694E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.13513E-2