[Scan]
initial_time=2016-01-18T17:12:22
final_time=2016-01-18T17:12:41
ip_count=19
run=1024
dataset=2
scan=107
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.17299E-1
ql1_imon=1.37472E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.95578E-9
ql3_vset=
ql3_vmon=-9.13241E0
ql3_imon=3.09539E-10
ql4_vset=
ql4_vmon=-9.14288E0
ql4_imon=-1.21248E-10
mult1=-9.95712E-9
mult2=-2.74057E-9
rf_tmon=-4.52444E-3
rf_agc=3.31653E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.67165E-3
ql5_imon=1.68815E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.33089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.98262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12557E2
lens4a_imon=2.05153E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=2.80106E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04699E1
cs_ea1_imon=2.59069E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32242E0
lens1_imon=2.77332E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03425E1
cs_ea2_imon=1.48993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84676E1
cs_ef1a_imon=2.93513E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.25289E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.28157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15129E1
os_ea1_imon=2.38788E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22024E0
cs_ionrep_imon=1.17988E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92007E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.92071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.24175E-8
tplens_vset=1.4E-1
tplens_vmon=1.69334E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.50728E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03142E2
lens6_imon=2.98286E-4
ql6_vset=1.0E-1
ql6_vmon=9.63449E-2
ql6_imon=4.04844E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=1.75114E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33823E1
lens5b_imon=2.17976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42848E0
os_ea2_imon=-7.6255E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0617E2
lens4b_imon=2.00786E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.15893E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03654E0
os_ef2alow_imon=-2.42129E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.14588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11586E1
os_restr2_imon=3.4195E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.28477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.23019E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.11759E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68477E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.95056E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.80973E-1
olens1_imon=7.53966E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0929E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.55449E-6
window_vset=0.0E0
window_vmon=2.82815E-1
window_imon=-8.57164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82778E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.87125E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.11263E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.43661E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.86842E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=6.05789E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33311E1
os_fil1_imon=9.43111E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07365E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63252E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30895E1
cs_fil1_imon=9.95549E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62144E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64216E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36988E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.04677E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22475E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.12772E-2
chamber_ion_pmon=2.22751E-9
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.97734E-1
res40_imon=-2.65915E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0934E0	-8.17513E-1	-7.98321E-1	-9.13196E0	-9.14288E0	3.71933E-3	9.64403E-2	2.73517E1	-3.26809E1	-3.26573E1	2.68366E1	2.23041E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.13327E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0924E0	-8.17204E-1	-7.98392E-1	-9.13219E0	-9.14295E0	3.76701E-3	9.65357E-2	2.73109E1	-3.26341E1	-3.26231E1	2.68441E1	2.21401E-9	2.51954E-3	2.51954E-3	6.35059E-3	2.1332E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09248E0	-8.17466E-1	-7.98559E-1	-9.13231E0	-9.14295E0	3.69549E-3	9.64642E-2	2.73247E1	-3.26676E1	-3.26217E1	2.68388E1	2.22703E-9	2.52553E-3	2.52553E-3	6.3074E-3	2.13851E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09309E0	-8.17275E-1	-7.98368E-1	-9.13229E0	-9.14302E0	3.88622E-3	9.66311E-2	2.73099E1	-3.26561E1	-3.25996E1	2.6855E1	2.23468E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.1485E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.1718E-1	-7.98273E-1	-9.13229E0	-9.14307E0	3.55244E-3	9.65834E-2	2.73287E1	-3.26708E1	-3.2626E1	2.68583E1	2.2159E-9	2.51739E-3	2.51739E-3	6.28592E-3	2.14964E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17132E-1	-7.98249E-1	-9.13241E0	-9.14335E0	3.76701E-3	9.6488E-2	2.73118E1	-3.26946E1	-3.26358E1	2.68327E1	2.23915E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.14256E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09356E0	-8.17418E-1	-7.98297E-1	-9.13248E0	-9.14314E0	3.88622E-3	9.64165E-2	2.73309E1	-3.26398E1	-3.25828E1	2.68316E1	2.22558E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.12957E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.17323E-1	-7.98178E-1	-9.13265E0	-9.14288E0	4.00543E-3	9.63211E-2	2.73287E1	-3.26555E1	-3.25611E1	2.68184E1	2.23566E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.13334E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.1718E-1	-7.98202E-1	-9.13246E0	-9.14299E0	3.71933E-3	9.67264E-2	2.73546E1	-3.26425E1	-3.26343E1	2.68343E1	2.22063E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.1405E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.1718E-1	-7.98225E-1	-9.13219E0	-9.14326E0	3.98159E-3	9.66549E-2	2.73405E1	-3.26452E1	-3.26104E1	2.68322E1	2.23459E-9	2.51809E-3	2.51809E-3	6.31555E-3	2.13324E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.17132E-1	-7.98106E-1	-9.13205E0	-9.14326E0	3.91006E-3	9.67503E-2	2.73452E1	-3.26927E1	-3.25776E1	2.68166E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.17132E-1	-7.98202E-1	-9.13203E0	-9.14309E0	3.8147E-3	9.66311E-2	2.73291E1	-3.26579E1	-3.2623E1	2.68347E1	2.24155E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.14232E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.17084E-1	-7.98249E-1	-9.13191E0	-9.14321E0	3.8147E-3	9.65595E-2	2.73532E1	-3.26494E1	-3.2605E1	2.68583E1	2.23235E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.14815E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.17037E-1	-7.98082E-1	-9.13198E0	-9.14307E0	3.74317E-3	9.62973E-2	2.73333E1	-3.26338E1	-3.26591E1	2.684E1	2.23138E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.12403E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.17251E-1	-7.98202E-1	-9.13179E0	-9.14307E0	3.6478E-3	9.65118E-2	2.73345E1	-3.26663E1	-3.25785E1	2.68556E1	2.23915E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.14442E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16989E-1	-7.98202E-1	-9.13205E0	-9.14295E0	3.8147E-3	9.65834E-2	2.73104E1	-3.26596E1	-3.26579E1	2.68214E1	2.23623E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.14442E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17132E-1	-7.98368E-1	-9.13239E0	-9.14295E0	3.8147E-3	9.66549E-2	2.73296E1	-3.26474E1	-3.26346E1	2.68394E1	2.23487E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.14964E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.17132E-1	-7.98416E-1	-9.13227E0	-9.14311E0	3.6478E-3	9.67741E-2	2.73364E1	-3.2662E1	-3.26319E1	2.6843E1	2.23915E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.13513E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.17084E-1	-7.98154E-1	-9.13234E0	-9.14295E0	3.33786E-3	9.65595E-2	2.73405E1	-3.26431E1	-3.26526E1	2.68589E1	2.23583E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.13502E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.17299E-1	-7.98106E-1	-9.13241E0	-9.14288E0	3.67165E-3	9.63449E-2	2.73057E1	-3.26639E1	-3.2623E1	2.68477E1	2.22751E-9	2.52647E-3	2.52647E-3	6.32386E-3	2.12772E-2