[Scan]
initial_time=2016-01-18T17:12:49
final_time=2016-01-18T17:13:08
ip_count=19
run=1024
dataset=2
scan=108
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08747E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.37412E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=1.89295E-9
ql3_vset=
ql3_vmon=-9.13246E0
ql3_imon=3.16536E-10
ql4_vset=
ql4_vmon=-9.14288E0
ql4_imon=-1.50597E-10
mult1=-1.20883E-8
mult2=-2.8145E-9
rf_tmon=-4.85559E-3
rf_agc=3.30422E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.76701E-3
ql5_imon=1.63987E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67978E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19895E1
lens5a_imon=1.98864E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54229E1
cs_ef1b_imon=2.8171E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02093E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04445E1
cs_ea1_imon=2.62007E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33835E0
lens1_imon=2.81225E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=2.97036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.48852E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=2.92066E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.25212E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11378E1
os_restr1_imon=4.28331E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14857E1
os_ea1_imon=2.3808E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63873E1
os_ef1bup_imon=3.07427E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22968E0
cs_ionrep_imon=1.17316E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91981E2
cs_nozzle_imon=1.93551E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01717E1
cs_anode1_imon=2.90815E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=3.23982E-8
tplens_vset=1.4E-1
tplens_vmon=1.6727E0
tplens_imon=-4.47542E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26447E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26466E1
iondef2_imon=1.56355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03165E2
lens6_imon=2.98236E-4
ql6_vset=1.0E-1
ql6_vmon=9.62734E-2
ql6_imon=4.03515E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25387E0
ionrepsh_imon=1.74442E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.16879E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74582E1
cs_ef2b_imon=3.13022E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40075E0
os_ea2_imon=-6.9884E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06161E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71611E1
cs_ef2a_imon=3.16011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07715E0
os_ef2alow_imon=-2.61629E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86226E-1
os_ef2bup_imon=-5.37911E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11372E1
os_restr2_imon=3.39295E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.28619E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01838E1
cs_anode2_imon=2.23326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73101E1
iondef1_imon=1.10308E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68413E1
iondef4_imon=1.11457E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.86269E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81116E-1
olens1_imon=7.53574E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12377E0
cs_ionaccel_imon=-1.76485E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02121E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56504E1
einzel_imon=7.74344E-6
window_vset=0.0E0
window_vmon=2.55914E-1
window_imon=-7.70926E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82748E2
mask1_imon=2.39161E-4
mask2_vset=0.0E0
mask2_vmon=-1.86668E1
mask2_imon=-6.18015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.54798E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.18885E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.28253E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.04019E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33311E1
os_fil1_imon=9.40833E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07625E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62718E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30922E1
cs_fil1_imon=9.94769E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62673E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63995E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.8082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92973E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.37961E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3527E-1
cs_fil2_imon=-2.7329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.45077E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2244E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.13302E-2
chamber_ion_pmon=2.22298E-9
chamber_cvt_pmon=2.51752E-3
foreline_cvt_pmon=2.51752E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.62885E-1
res40_imon=-2.59891E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.17466E-1	-7.9813E-1	-9.13231E0	-9.14309E0	3.93391E-3	9.64642E-2	2.73316E1	-3.26785E1	-3.26325E1	2.68587E1	2.21689E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.13513E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.17156E-1	-7.98225E-1	-9.1326E0	-9.14295E0	3.74317E-3	9.63926E-2	2.73309E1	-3.26675E1	-3.2587E1	2.68556E1	2.23487E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.1187E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09356E0	-8.17204E-1	-7.9844E-1	-9.13236E0	-9.14288E0	3.86238E-3	9.65357E-2	2.73526E1	-3.26527E1	-3.25895E1	2.68233E1	2.21689E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.12587E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.17013E-1	-7.98559E-1	-9.13222E0	-9.14299E0	3.86238E-3	9.66072E-2	2.73069E1	-3.26608E1	-3.2629E1	2.68343E1	2.21401E-9	2.52131E-3	2.52131E-3	6.32328E-3	2.14209E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.17108E-1	-7.98607E-1	-9.13205E0	-9.14295E0	3.86238E-3	9.68695E-2	2.73363E1	-3.26386E1	-3.26218E1	2.68382E1	2.23297E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.13139E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16941E-1	-7.98368E-1	-9.13241E0	-9.14295E0	3.91006E-3	9.6488E-2	2.73435E1	-3.26735E1	-3.26494E1	2.68394E1	2.23041E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.13513E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.17037E-1	-7.98702E-1	-9.13243E0	-9.14288E0	3.86238E-3	9.65118E-2	2.73387E1	-3.26422E1	-3.26026E1	2.68316E1	2.24012E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.1407E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.17204E-1	-7.98416E-1	-9.13265E0	-9.14283E0	3.6478E-3	9.6941E-2	2.73145E1	-3.26803E1	-3.26183E1	2.68292E1	2.24109E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.13513E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.17204E-1	-7.9844E-1	-9.13241E0	-9.14304E0	3.69549E-3	9.65595E-2	2.73387E1	-3.26867E1	-3.26362E1	2.68196E1	2.22631E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.1405E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.1737E-1	-7.98178E-1	-9.13219E0	-9.14283E0	3.55244E-3	9.64642E-2	2.73363E1	-3.26765E1	-3.26284E1	2.68478E1	2.21882E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.13884E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16846E-1	-7.98273E-1	-9.13262E0	-9.14288E0	3.62396E-3	9.64403E-2	2.73175E1	-3.26101E1	-3.25877E1	2.68118E1	2.21306E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.13685E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16798E-1	-7.97963E-1	-9.1326E0	-9.14295E0	4.07696E-3	9.65118E-2	2.73634E1	-3.26813E1	-3.26212E1	2.68382E1	2.21401E-9	2.5199E-3	2.5199E-3	6.3514E-3	2.12587E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-8.16989E-1	-7.98368E-1	-9.13229E0	-9.14295E0	3.98159E-3	9.66787E-2	2.73351E1	-3.26494E1	-3.26074E1	2.68418E1	2.21401E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.12957E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.16798E-1	-7.98607E-1	-9.13198E0	-9.14307E0	3.93391E-3	9.64642E-2	2.73552E1	-3.26596E1	-3.26248E1	2.68442E1	2.23041E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.13142E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.16751E-1	-7.98368E-1	-9.13241E0	-9.14283E0	3.88622E-3	9.66311E-2	2.73344E1	-3.26684E1	-3.26322E1	2.68382E1	2.23487E-9	2.51203E-3	2.51203E-3	6.32896E-3	2.13502E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16631E-1	-7.98512E-1	-9.13215E0	-9.1429E0	3.86238E-3	9.66072E-2	2.73167E1	-3.26631E1	-3.26231E1	2.6843E1	2.22848E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.13884E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16512E-1	-7.98464E-1	-9.1326E0	-9.14292E0	4.05312E-3	9.65357E-2	2.73075E1	-3.26663E1	-3.2623E1	2.68352E1	2.23429E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.13698E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.1706E-1	-7.9844E-1	-9.13284E0	-9.14276E0	3.93391E-3	9.6488E-2	2.73057E1	-3.26486E1	-3.26428E1	2.68325E1	2.23526E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.13327E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16941E-1	-7.98249E-1	-9.1325E0	-9.14288E0	4.07696E-3	9.66311E-2	2.73427E1	-3.26755E1	-3.2634E1	2.68289E1	2.21401E-9	2.51498E-3	2.51498E-3	6.32328E-3	2.13672E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16774E-1	-7.98488E-1	-9.13246E0	-9.14288E0	3.76701E-3	9.62734E-2	2.73101E1	-3.26466E1	-3.26447E1	2.68413E1	2.22298E-9	2.51752E-3	2.51752E-3	6.3074E-3	2.13302E-2