[Scan]
initial_time=2016-01-18T17:13:42
final_time=2016-01-18T17:14:01
ip_count=19
run=1024
dataset=2
scan=110
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09271E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.17347E-1
ql1_imon=1.37351E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=2.01738E-9
ql3_vset=
ql3_vmon=-9.13231E0
ql3_imon=2.80583E-10
ql4_vset=
ql4_vmon=-9.14335E0
ql4_imon=-1.16062E-10
mult1=-9.57029E-9
mult2=-2.73502E-9
rf_tmon=-5.5477E-3
rf_agc=3.26071E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.69549E-3
ql5_imon=1.66248E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67515E0
bslens_imon=2.4981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19304E1
lens5a_imon=1.98884E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53308E1
cs_ef1b_imon=2.77088E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0461E1
cs_ea1_imon=2.60132E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33591E0
lens1_imon=2.86941E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=2.98495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03925E1
cs_ea2_imon=1.47225E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85066E1
cs_ef1a_imon=2.9502E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.27085E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11425E1
os_restr1_imon=4.22736E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15474E1
os_ea1_imon=2.37673E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63317E1
os_ef1bup_imon=3.09269E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22326E0
cs_ionrep_imon=1.18385E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91989E2
cs_nozzle_imon=1.93535E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02342E1
cs_anode1_imon=2.94568E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.25082E-8
tplens_vset=1.4E-1
tplens_vmon=1.71834E0
tplens_imon=-4.18309E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26113E1
iondef3_imon=1.50542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26431E1
iondef2_imon=1.56814E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03183E2
lens6_imon=2.98104E-4
ql6_vset=1.0E-1
ql6_vmon=9.66311E-2
ql6_imon=4.03078E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26532E0
ionrepsh_imon=1.74659E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33435E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74878E1
cs_ef2b_imon=3.10589E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42333E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06163E2
lens4b_imon=2.00569E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70667E1
cs_ef2a_imon=3.15211E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.32436E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74642E-1
os_ef2bup_imon=-5.07329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11303E1
os_restr2_imon=3.41415E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.30217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01885E1
cs_anode2_imon=2.27009E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73175E1
iondef1_imon=1.11464E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68314E1
iondef4_imon=1.07878E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.90711E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.63082E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15679E0
cs_ionaccel_imon=-1.45555E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02175E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56278E1
einzel_imon=7.47237E-6
window_vset=0.0E0
window_vmon=2.90666E-1
window_imon=-6.63193E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82841E2
mask1_imon=2.39359E-4
mask2_vset=0.0E0
mask2_vmon=-1.86749E1
mask2_imon=-1.03505E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.54503E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.22201E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50163E3
multb_neg_imon=7.38641E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.39675E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07092E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63224E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.95186E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62667E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64314E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43484E-2
os_fil2_imon=-2.33904E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.1235E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34771E-1
cs_fil2_imon=-2.74448E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00879E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22688E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.15515E-2
chamber_ion_pmon=2.21684E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.49156E-1
res40_imon=-2.18535E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.16655E-1	-7.98035E-1	-9.13224E0	-9.14288E0	3.62396E-3	9.66311E-2	2.73375E1	-3.26343E1	-3.26101E1	2.68881E1	2.24109E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.13884E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.1687E-1	-7.98059E-1	-9.13224E0	-9.14304E0	3.67165E-3	9.62734E-2	2.73553E1	-3.26731E1	-3.26187E1	2.68217E1	2.24294E-9	2.52342E-3	2.52342E-3	6.31798E-3	2.15289E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.17037E-1	-7.98154E-1	-9.13239E0	-9.1433E0	3.93391E-3	9.66311E-2	2.73134E1	-3.26337E1	-3.26254E1	2.68176E1	2.23911E-9	2.51725E-3	2.51725E-3	6.31879E-3	2.13727E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.17275E-1	-7.98249E-1	-9.13212E0	-9.14316E0	3.83854E-3	9.64642E-2	2.73269E1	-3.26638E1	-3.2616E1	2.68328E1	2.23487E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.13502E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.16751E-1	-7.97987E-1	-9.13193E0	-9.1433E0	3.91006E-3	9.66549E-2	2.73364E1	-3.26862E1	-3.25995E1	2.68221E1	2.23869E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.13502E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16846E-1	-7.98082E-1	-9.13219E0	-9.14307E0	3.83854E-3	9.64642E-2	2.73375E1	-3.26543E1	-3.26554E1	2.6828E1	2.23583E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.13685E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.16798E-1	-7.98035E-1	-9.13239E0	-9.14316E0	3.71933E-3	9.66311E-2	2.73423E1	-3.26602E1	-3.26337E1	2.68334E1	2.23392E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.13867E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.1687E-1	-7.98368E-1	-9.13205E0	-9.1433E0	3.67165E-3	9.67264E-2	2.73081E1	-3.26458E1	-3.26524E1	2.68346E1	2.24207E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.13884E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09348E0	-8.1687E-1	-7.97963E-1	-9.13181E0	-9.14328E0	3.60012E-3	9.66311E-2	2.73357E1	-3.26266E1	-3.25887E1	2.6843E1	2.23429E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.12587E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.17013E-1	-7.98178E-1	-9.132E0	-9.14292E0	3.91006E-3	9.66787E-2	2.73647E1	-3.26933E1	-3.26307E1	2.6836E1	2.23138E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.12772E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.16798E-1	-7.9782E-1	-9.13217E0	-9.14299E0	3.95775E-3	9.65357E-2	2.72444E1	-3.26074E1	-3.26741E1	2.68208E1	2.23235E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.12403E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.16941E-1	-7.98011E-1	-9.13239E0	-9.14326E0	3.79086E-3	9.63926E-2	2.73454E1	-3.26585E1	-3.26288E1	2.68384E1	2.22075E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.12403E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09364E0	-8.16917E-1	-7.97987E-1	-9.13236E0	-9.1434E0	3.79086E-3	9.65357E-2	2.73362E1	-3.26636E1	-3.2589E1	2.68341E1	2.21841E-9	2.51423E-3	2.51423E-3	6.31242E-3	2.13975E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09302E0	-8.16917E-1	-7.98059E-1	-9.13246E0	-9.14307E0	3.71933E-3	9.68695E-2	2.73564E1	-3.26608E1	-3.25995E1	2.68286E1	2.24222E-9	2.51793E-3	2.51793E-3	6.31332E-3	2.13357E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09294E0	-8.17204E-1	-7.98178E-1	-9.13219E0	-9.14314E0	3.91006E-3	9.68695E-2	2.73291E1	-3.2626E1	-3.26128E1	2.68358E1	2.21873E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.12594E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09333E0	-8.17275E-1	-7.98106E-1	-9.13253E0	-9.14307E0	3.55244E-3	9.66072E-2	2.73075E1	-3.26488E1	-3.26506E1	2.6822E1	2.22751E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.12218E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09263E0	-8.17204E-1	-7.98202E-1	-9.13222E0	-9.14302E0	3.48091E-3	9.63926E-2	2.73576E1	-3.26596E1	-3.26242E1	2.68412E1	2.24402E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.11298E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0934E0	-8.1706E-1	-7.98225E-1	-9.13239E0	-9.1433E0	3.93391E-3	9.62257E-2	2.73263E1	-3.26644E1	-3.25983E1	2.68406E1	2.24304E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.13884E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09263E0	-8.16894E-1	-7.98416E-1	-9.13258E0	-9.14304E0	3.8147E-3	9.67979E-2	2.73748E1	-3.27065E1	-3.25755E1	2.68358E1	2.24251E-9	2.51203E-3	2.51203E-3	6.33977E-3	2.14781E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09271E0	-8.17347E-1	-7.98464E-1	-9.13231E0	-9.14335E0	3.69549E-3	9.66311E-2	2.73175E1	-3.26431E1	-3.26113E1	2.68314E1	2.21684E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.15515E-2