[Scan]
initial_time=2016-01-18T17:14:09
final_time=2016-01-18T17:14:28
ip_count=19
run=1024
dataset=2
scan=111
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.08696E-4
ql1_vset=
ql1_vmon=-8.16751E-1
ql1_imon=1.3696E-8
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=1.97662E-9
ql3_vset=
ql3_vmon=-9.13227E0
ql3_imon=2.20549E-10
ql4_vset=
ql4_vmon=-9.14342E0
ql4_imon=-1.08862E-10
mult1=-1.01979E-8
mult2=-2.78847E-9
rf_tmon=-5.28148E-3
rf_agc=3.35799E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.98159E-3
ql5_imon=1.69504E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69738E0
bslens_imon=2.50531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19959E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1253E2
lens4a_imon=2.04779E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53395E1
cs_ef1b_imon=2.78652E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=2.60637E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35574E0
lens1_imon=2.74323E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64828E1
os_ef1alow_imon=2.99607E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.47946E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84666E1
cs_ef1a_imon=2.94082E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.26782E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1139E1
os_restr1_imon=4.26871E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14891E1
os_ea1_imon=2.36195E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.0621E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19682E0
cs_ionrep_imon=1.18025E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92021E2
cs_nozzle_imon=1.93561E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02087E1
cs_anode1_imon=2.9436E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20375E0
olens4_imon=3.24964E-8
tplens_vset=1.4E-1
tplens_vmon=1.66366E0
tplens_imon=-3.20976E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.48991E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.55841E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03171E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.61304E-2
ql6_imon=4.01888E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27433E0
ionrepsh_imon=1.75163E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.16873E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74831E1
cs_ef2b_imon=3.11805E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38428E0
os_ea2_imon=-6.81471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06161E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7109E1
cs_ef2a_imon=3.15211E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09394E0
os_ef2alow_imon=-2.37649E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6132E-1
os_ef2bup_imon=-5.11499E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11407E1
os_restr2_imon=3.41137E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02111E1
cs_anode2_imon=2.25133E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73351E1
iondef1_imon=1.09842E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68545E1
iondef4_imon=1.06905E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71774E1
olens3_imon=4.89658E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.80997E-1
olens1_imon=7.54767E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1145E0
cs_ionaccel_imon=-1.58414E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02171E2
cs_ionfocb_imon=1.47351E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.39592E-6
window_vset=0.0E0
window_vmon=2.76765E-1
window_imon=-6.63193E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82806E2
mask1_imon=2.39355E-4
mask2_vset=0.0E0
mask2_vmon=-1.87445E1
mask2_imon=-8.23055E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.45491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.27969E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=6.97545E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40156E0
defgridb_imon=6.36261E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33317E1
os_fil1_imon=9.41841E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06785E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6279E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30924E1
cs_fil1_imon=9.96119E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62036E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6438E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49933E-2
os_fil2_imon=-2.41433E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91236E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.35551E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35894E-1
cs_fil2_imon=-2.37958E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42003E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22629E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.13513E-2
chamber_ion_pmon=2.21593E-9
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7137E-1
res40_imon=-2.18188E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-8.16822E-1	-7.9844E-1	-9.13248E0	-9.14326E0	4.00543E-3	9.6488E-2	2.73339E1	-3.26855E1	-3.2635E1	2.68845E1	2.22364E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.12772E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09325E0	-8.16631E-1	-7.98535E-1	-9.13241E0	-9.14292E0	3.8147E-3	9.63688E-2	2.73309E1	-3.26651E1	-3.26164E1	2.68282E1	2.21401E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.13139E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09309E0	-8.16536E-1	-7.98249E-1	-9.1325E0	-9.14268E0	4.05312E-3	9.61781E-2	2.73151E1	-3.2636E1	-3.26278E1	2.68325E1	2.22481E-9	2.52473E-3	2.52473E-3	6.32978E-3	2.1428E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16727E-1	-7.9813E-1	-9.13231E0	-9.14311E0	4.00543E-3	9.61065E-2	2.72833E1	-3.26885E1	-3.2606E1	2.68372E1	2.21401E-9	2.51814E-3	2.51814E-3	6.30212E-3	2.14209E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16703E-1	-7.98202E-1	-9.13234E0	-9.14311E0	4.05312E-3	9.62973E-2	2.73057E1	-3.26573E1	-3.26366E1	2.68082E1	2.21401E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.12775E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16488E-1	-7.98321E-1	-9.13227E0	-9.14304E0	3.83854E-3	9.63211E-2	2.73411E1	-3.26831E1	-3.26188E1	2.684E1	2.21786E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.13513E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.16536E-1	-7.98345E-1	-9.13217E0	-9.14302E0	3.62396E-3	9.63688E-2	2.73259E1	-3.26872E1	-3.26272E1	2.6828E1	2.2372E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.13327E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16679E-1	-7.98059E-1	-9.13198E0	-9.14271E0	3.91006E-3	9.6488E-2	2.73216E1	-3.26437E1	-3.26266E1	2.68322E1	2.24012E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.12957E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16441E-1	-7.98249E-1	-9.13212E0	-9.14295E0	3.69549E-3	9.62973E-2	2.72751E1	-3.26633E1	-3.26008E1	2.6855E1	2.23964E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.1332E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16512E-1	-7.98082E-1	-9.13217E0	-9.14276E0	3.8147E-3	9.62973E-2	2.73045E1	-3.26838E1	-3.26101E1	2.68224E1	2.23235E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.14256E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16631E-1	-7.98368E-1	-9.13212E0	-9.14288E0	3.60012E-3	9.64642E-2	2.73802E1	-3.27221E1	-3.2617E1	2.68064E1	2.23332E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.14256E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09333E0	-8.17037E-1	-7.98273E-1	-9.13217E0	-9.14297E0	3.91006E-3	9.62019E-2	2.73381E1	-3.26494E1	-3.2626E1	2.68382E1	2.23818E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.13884E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.16774E-1	-7.98035E-1	-9.13231E0	-9.14295E0	3.8147E-3	9.59873E-2	2.73588E1	-3.26797E1	-3.2672E1	2.68256E1	2.23297E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.13502E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0934E0	-8.17013E-1	-7.98154E-1	-9.13215E0	-9.14314E0	3.6478E-3	9.61065E-2	2.73472E1	-3.26374E1	-3.26482E1	2.68442E1	2.2372E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.13142E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.16941E-1	-7.98035E-1	-9.13224E0	-9.14307E0	3.45707E-3	9.62496E-2	2.73243E1	-3.26687E1	-3.25924E1	2.6828E1	2.23818E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.13698E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.16822E-1	-7.98178E-1	-9.13203E0	-9.14302E0	3.86238E-3	9.67503E-2	2.73231E1	-3.26621E1	-3.26074E1	2.68472E1	2.23429E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.13513E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09333E0	-8.16631E-1	-7.97701E-1	-9.13217E0	-9.14319E0	4.05312E-3	9.64642E-2	2.73171E1	-3.26681E1	-3.26068E1	2.68569E1	2.21401E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.1405E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.16751E-1	-7.97844E-1	-9.13222E0	-9.1434E0	3.98159E-3	9.63926E-2	2.73257E1	-3.26537E1	-3.26284E1	2.67694E1	2.21401E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.13327E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09325E0	-8.16822E-1	-7.97725E-1	-9.13241E0	-9.14309E0	3.67165E-3	9.63211E-2	2.73151E1	-3.26626E1	-3.26272E1	2.68346E1	2.21401E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.13502E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-8.16751E-1	-7.97796E-1	-9.13227E0	-9.14342E0	3.98159E-3	9.61304E-2	2.73351E1	-3.26573E1	-3.26152E1	2.68545E1	2.21593E-9	2.51334E-3	2.51334E-3	6.29645E-3	2.13513E-2