[Scan]
initial_time=2016-01-18T17:14:35
final_time=2016-01-18T17:14:55
ip_count=19
run=1024
dataset=2
scan=112
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08712E-4
ql1_vset=
ql1_vmon=-8.17227E-1
ql1_imon=1.37154E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.94721E-9
ql3_vset=
ql3_vmon=-9.13222E0
ql3_imon=2.22361E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-1.07789E-10
mult1=-9.34305E-9
mult2=-2.81642E-9
rf_tmon=-4.76477E-3
rf_agc=3.22821E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.52859E-3
ql5_imon=1.67592E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60485E0
bslens_imon=2.36471E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20151E1
lens5a_imon=2.00686E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12554E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.78556E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02078E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04736E1
cs_ea1_imon=2.62403E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34192E0
lens1_imon=2.62427E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64428E1
os_ef1alow_imon=2.96144E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03156E1
cs_ea2_imon=1.43764E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84598E1
cs_ef1a_imon=2.96288E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.2698E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11844E1
os_restr1_imon=4.27725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15197E1
os_ea1_imon=2.39836E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63305E1
os_ef1bup_imon=3.0537E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=1.19287E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92012E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=2.9463E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.24635E-8
tplens_vset=1.4E-1
tplens_vmon=1.66607E0
tplens_imon=-9.02587E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.50866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.5548E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03126E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.65595E-2
ql6_imon=4.03509E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.76786E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.16512E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75378E1
cs_ef2b_imon=3.15461E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39449E0
os_ea2_imon=-7.64385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06196E2
lens4b_imon=2.00871E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.15028E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01612E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13642E-1
os_ef2bup_imon=-5.11345E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1182E1
os_restr2_imon=3.43031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23096E2
cs_ionfoca_imon=6.27477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0235E1
cs_anode2_imon=2.24172E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.08868E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68137E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.95604E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.61753E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07548E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02153E2
cs_ionfocb_imon=1.47619E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56687E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=3.01435E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82762E2
mask1_imon=2.39408E-4
mask2_vset=0.0E0
mask2_vmon=-1.87503E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.35757E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.53204E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.53782E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2572E0
defgridb_imon=6.03816E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.41531E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07395E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63111E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3093E1
cs_fil1_imon=9.95308E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6215E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64528E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46063E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.68882E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.18021E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.05329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34645E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2254E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.13142E-2
chamber_ion_pmon=2.24012E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-1.19028E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09309E0	-8.16822E-1	-7.98011E-1	-9.13224E0	-9.14328E0	3.52859E-3	9.62257E-2	2.73659E1	-3.26915E1	-3.25995E1	2.68302E1	2.23818E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.12587E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09356E0	-8.1706E-1	-7.98488E-1	-9.13222E0	-9.14323E0	3.67165E-3	9.63926E-2	2.73634E1	-3.26645E1	-3.26164E1	2.6834E1	2.23869E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.14598E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.16965E-1	-7.98178E-1	-9.1321E0	-9.14302E0	3.74317E-3	9.62257E-2	2.73103E1	-3.26521E1	-3.26324E1	2.68464E1	2.23915E-9	2.51334E-3	2.51334E-3	6.34037E-3	2.13327E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09317E0	-8.16798E-1	-7.98082E-1	-9.1321E0	-9.14299E0	3.3617E-3	9.61065E-2	2.73569E1	-3.26431E1	-3.25936E1	2.6836E1	2.24251E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.13502E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.17132E-1	-7.97939E-1	-9.13217E0	-9.14278E0	3.57628E-3	9.60827E-2	2.7335E1	-3.26508E1	-3.25948E1	2.68438E1	2.23831E-9	2.52772E-3	2.52772E-3	6.32784E-3	2.13474E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.17013E-1	-7.98059E-1	-9.13241E0	-9.14311E0	3.57628E-3	9.59873E-2	2.7263E1	-3.2626E1	-3.2617E1	2.68298E1	2.23755E-9	2.5199E-3	2.5199E-3	6.32483E-3	2.13153E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16774E-1	-7.97892E-1	-9.13246E0	-9.14292E0	3.69549E-3	9.60827E-2	2.73159E1	-3.26603E1	-3.26302E1	2.68472E1	2.23429E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.13513E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.16798E-1	-7.97963E-1	-9.13236E0	-9.14309E0	3.40939E-3	9.60588E-2	2.73117E1	-3.26158E1	-3.25978E1	2.68334E1	2.24499E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.14442E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.16584E-1	-7.98035E-1	-9.13212E0	-9.14321E0	3.17097E-3	9.60112E-2	2.73039E1	-3.25894E1	-3.26236E1	2.68262E1	2.24499E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.12957E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16894E-1	-7.97749E-1	-9.13241E0	-9.14292E0	3.02792E-3	9.59158E-2	2.73747E1	-3.26703E1	-3.26266E1	2.68298E1	2.24012E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.13513E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.17037E-1	-7.98035E-1	-9.1326E0	-9.14297E0	3.12328E-3	9.61542E-2	2.72739E1	-3.26044E1	-3.26176E1	2.6837E1	2.2372E-9	2.52867E-3	2.52867E-3	6.3074E-3	2.13698E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16751E-1	-7.97677E-1	-9.13272E0	-9.14299E0	3.50475E-3	9.59635E-2	2.73069E1	-3.26416E1	-3.26573E1	2.68376E1	2.23623E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.12772E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.16703E-1	-7.97939E-1	-9.13262E0	-9.14307E0	3.19481E-3	9.62257E-2	2.73177E1	-3.2653E1	-3.26543E1	2.68334E1	2.24538E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.1332E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.16846E-1	-7.98297E-1	-9.13255E0	-9.14302E0	3.62396E-3	9.62019E-2	2.73546E1	-3.26756E1	-3.26378E1	2.68487E1	2.24597E-9	2.52209E-3	2.52209E-3	6.34588E-3	2.12772E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09325E0	-8.16727E-1	-7.9782E-1	-9.13205E0	-9.14335E0	3.6478E-3	9.61781E-2	2.73201E1	-3.26669E1	-3.2608E1	2.68207E1	2.24061E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.12495E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.16584E-1	-7.97844E-1	-9.13246E0	-9.14311E0	3.74317E-3	9.62257E-2	2.73222E1	-3.26543E1	-3.2606E1	2.6843E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09317E0	-8.16751E-1	-7.97606E-1	-9.13248E0	-9.14311E0	3.6478E-3	9.61542E-2	2.731E1	-3.26689E1	-3.26009E1	2.68334E1	2.23392E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.12957E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0934E0	-8.16703E-1	-7.97987E-1	-9.13253E0	-9.14297E0	3.45707E-3	9.60827E-2	2.73128E1	-3.26638E1	-3.26095E1	2.6825E1	2.23818E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.13698E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.16894E-1	-7.9782E-1	-9.13236E0	-9.14307E0	3.67165E-3	9.65834E-2	2.7298E1	-3.26537E1	-3.26178E1	2.68412E1	2.24634E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.13867E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.17227E-1	-7.98106E-1	-9.13222E0	-9.14295E0	3.52859E-3	9.65595E-2	2.73375E1	-3.26675E1	-3.26248E1	2.68137E1	2.24012E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.13142E-2