[Scan]
initial_time=2016-01-18T17:15:02
final_time=2016-01-18T17:15:21
ip_count=19
run=1024
dataset=2
scan=113
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.17013E-1
ql1_imon=1.37231E-8
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=1.96143E-9
ql3_vset=
ql3_vmon=-9.13255E0
ql3_imon=1.87814E-10
ql4_vset=
ql4_vmon=-9.1433E0
ql4_imon=-1.05202E-10
mult1=-9.60575E-9
mult2=-2.78597E-9
rf_tmon=-3.08781E-3
rf_agc=3.42706E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.69549E-3
ql5_imon=1.66734E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.43321E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19785E1
lens5a_imon=1.98776E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5355E1
cs_ef1b_imon=2.77691E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04683E2
lens23_imon=1.02204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04555E1
cs_ea1_imon=2.58979E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3269E0
lens1_imon=2.78649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=3.00396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0351E1
cs_ea2_imon=1.48595E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84923E1
cs_ef1a_imon=2.93657E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.28225E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.24769E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14813E1
os_ea1_imon=2.38286E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63275E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19742E0
cs_ionrep_imon=1.19106E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91996E2
cs_nozzle_imon=1.93528E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0226E1
cs_anode1_imon=2.95026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.26627E-8
tplens_vset=1.4E-1
tplens_vmon=1.6901E0
tplens_imon=-4.90409E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26142E1
iondef3_imon=1.48342E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26703E1
iondef2_imon=1.5667E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03151E2
lens6_imon=2.98137E-4
ql6_vset=1.0E-1
ql6_vmon=9.60827E-2
ql6_imon=4.01963E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22086E0
ionrepsh_imon=1.75344E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.18531E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39329E0
os_ea2_imon=-8.50904E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06169E2
lens4b_imon=2.00443E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70843E1
cs_ef2a_imon=3.15173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.17622E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.63186E-1
os_ef2bup_imon=-5.00172E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=3.41121E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.29532E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.25974E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73228E1
iondef1_imon=1.10418E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68401E1
iondef4_imon=1.078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.9576E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.6379E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15177E0
cs_ionaccel_imon=-1.54552E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0218E2
cs_ionfocb_imon=1.47522E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55937E1
einzel_imon=7.39231E-6
window_vset=0.0E0
window_vmon=3.11046E-1
window_imon=-6.91381E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82803E2
mask1_imon=2.39441E-4
mask2_vset=0.0E0
mask2_vmon=-1.86867E1
mask2_imon=-1.0734E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.41165E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.40226E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.20617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22412E0
defgridb_imon=5.93001E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.333E1
os_fil1_imon=9.42072E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0602E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63479E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30905E1
cs_fil1_imon=9.97813E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63123E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64123E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43484E-2
os_fil2_imon=-2.2395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.91082E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-3.20656E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22513E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31012E-3
inlet_lpb_pmon=2.13232E-2
chamber_ion_pmon=2.23988E-9
chamber_cvt_pmon=2.5208E-3
foreline_cvt_pmon=2.5208E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.51173E-1
res40_imon=-2.24829E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.17108E-1	-7.98011E-1	-9.13217E0	-9.14304E0	3.74317E-3	9.64642E-2	2.73216E1	-3.26561E1	-3.2613E1	2.67812E1	2.22945E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.13884E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.17418E-1	-7.97701E-1	-9.13222E0	-9.14319E0	3.98159E-3	9.6488E-2	2.73351E1	-3.26652E1	-3.26242E1	2.68256E1	2.23107E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.1332E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.17418E-1	-7.97749E-1	-9.13219E0	-9.14335E0	3.67165E-3	9.65118E-2	2.73173E1	-3.26782E1	-3.26052E1	2.68268E1	2.22945E-9	2.51443E-3	2.51443E-3	6.29098E-3	2.13513E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.17275E-1	-7.97868E-1	-9.13219E0	-9.1435E0	3.95775E-3	9.61304E-2	2.73216E1	-3.26658E1	-3.26285E1	2.68593E1	2.22442E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.1405E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.17275E-1	-7.97963E-1	-9.13215E0	-9.14338E0	3.67165E-3	9.64165E-2	2.73429E1	-3.26711E1	-3.25984E1	2.68647E1	2.2372E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.13142E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.17299E-1	-7.97725E-1	-9.13234E0	-9.14307E0	3.6478E-3	9.6488E-2	2.73458E1	-3.26691E1	-3.26071E1	2.68273E1	2.23041E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.13327E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-8.17132E-1	-7.98082E-1	-9.13219E0	-9.14333E0	3.31402E-3	9.62734E-2	2.73345E1	-3.26368E1	-3.25966E1	2.68275E1	2.23623E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.13698E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.16894E-1	-7.98178E-1	-9.13229E0	-9.14299E0	3.52859E-3	9.59396E-2	2.73405E1	-3.26512E1	-3.26152E1	2.68306E1	2.23332E-9	2.51116E-3	2.51116E-3	6.32936E-3	2.13513E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09356E0	-8.16798E-1	-7.97915E-1	-9.13229E0	-9.14328E0	3.48091E-3	9.59158E-2	2.73466E1	-3.26735E1	-3.26392E1	2.68277E1	2.23915E-9	2.52099E-3	2.52099E-3	6.28552E-3	2.14256E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0934E0	-8.1687E-1	-7.97892E-1	-9.13231E0	-9.14326E0	3.71933E-3	9.61542E-2	2.73297E1	-3.26362E1	-3.2617E1	2.6834E1	2.24402E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.13327E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.16965E-1	-7.97987E-1	-9.13219E0	-9.14338E0	3.40939E-3	9.61781E-2	2.73759E1	-3.26897E1	-3.25788E1	2.68382E1	2.23392E-9	2.52384E-3	2.52384E-3	6.29128E-3	2.13685E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.1706E-1	-7.98082E-1	-9.1326E0	-9.14314E0	3.60012E-3	9.58681E-2	2.73045E1	-3.26813E1	-3.26188E1	2.68364E1	2.21401E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.13698E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.16774E-1	-7.97915E-1	-9.13265E0	-9.14314E0	3.86238E-3	9.61781E-2	2.7355E1	-3.26512E1	-3.26452E1	2.6837E1	2.21401E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.14256E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17037E-1	-7.98011E-1	-9.13255E0	-9.14319E0	3.6478E-3	9.63211E-2	2.73285E1	-3.26909E1	-3.26182E1	2.68268E1	2.21401E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.12957E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.17275E-1	-7.97963E-1	-9.13248E0	-9.14319E0	3.62396E-3	9.61781E-2	2.73315E1	-3.26753E1	-3.26651E1	2.6849E1	2.21495E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.14415E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.16917E-1	-7.97939E-1	-9.13243E0	-9.14321E0	3.83854E-3	9.62019E-2	2.73346E1	-3.26555E1	-3.26354E1	2.68383E1	2.21401E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.13513E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.17132E-1	-7.97939E-1	-9.13267E0	-9.14321E0	3.6478E-3	9.64642E-2	2.73435E1	-3.26831E1	-3.2623E1	2.68268E1	2.21306E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.1332E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16989E-1	-7.97653E-1	-9.1326E0	-9.14311E0	3.98159E-3	9.59635E-2	2.73275E1	-3.26413E1	-3.26602E1	2.6783E1	2.2372E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.12587E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.16965E-1	-7.9782E-1	-9.13236E0	-9.14309E0	3.79086E-3	9.61304E-2	2.73912E1	-3.26183E1	-3.25358E1	2.68316E1	2.23869E-9	2.51203E-3	2.51203E-3	6.32356E-3	2.13502E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.17013E-1	-7.98059E-1	-9.13255E0	-9.1433E0	3.69549E-3	9.60827E-2	2.73228E1	-3.26703E1	-3.26142E1	2.68401E1	2.23988E-9	2.5208E-3	2.5208E-3	6.31012E-3	2.13232E-2