[Scan]
initial_time=2016-01-18T17:15:28
final_time=2016-01-18T17:15:48
ip_count=19
run=1024
dataset=2
scan=114
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.16917E-1
ql1_imon=1.37119E-8
ql2_vset=
ql2_vmon=-7.97701E-1
ql2_imon=1.94618E-9
ql3_vset=
ql3_vmon=-9.13255E0
ql3_imon=2.49624E-10
ql4_vset=
ql4_vmon=-9.14314E0
ql4_imon=-1.06823E-10
mult1=-1.0176E-8
mult2=-2.65074E-9
rf_tmon=-4.52197E-3
rf_agc=3.28275E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.45707E-3
ql5_imon=1.65701E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64811E0
bslens_imon=2.53775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19749E1
lens5a_imon=1.99893E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53406E1
cs_ef1b_imon=2.79061E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04661E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04934E1
cs_ea1_imon=2.61574E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33771E0
lens1_imon=2.62788E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64987E1
os_ef1alow_imon=3.00252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0375E1
cs_ea2_imon=1.49027E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84917E1
cs_ef1a_imon=2.9308E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.28203E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.24949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14705E1
os_ea1_imon=2.37853E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21004E0
cs_ionrep_imon=1.16511E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91975E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02356E1
cs_anode1_imon=2.94594E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.25736E-8
tplens_vset=1.4E-1
tplens_vmon=1.6883E0
tplens_imon=-2.38062E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26041E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26375E1
iondef2_imon=1.55192E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03148E2
lens6_imon=2.98263E-4
ql6_vset=1.0E-1
ql6_vmon=9.59635E-2
ql6_imon=3.98809E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=1.74226E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.15935E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.11064E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41012E0
os_ea2_imon=-6.95891E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06187E2
lens4b_imon=2.00673E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.17155E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10922E0
os_ef2alow_imon=-2.26271E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60784E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11153E1
os_restr2_imon=3.39932E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.31154E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.25434E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73032E1
iondef1_imon=1.10094E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68225E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.92169E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.60968E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15537E0
cs_ionaccel_imon=-1.50588E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02172E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.48602E-6
window_vset=0.0E0
window_vmon=2.63593E-1
window_imon=-5.7245E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82805E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86722E1
mask2_imon=-9.18431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92684E3
multa_neg_imon=6.99347E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.26888E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.0872E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36848E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.40354E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06488E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6323E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=9.96486E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63008E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64976E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49933E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.23543E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.06163E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.72003E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.13327E-2
chamber_ion_pmon=2.23623E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.97444E-1
res40_imon=-2.28073E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.17132E-1	-7.97963E-1	-9.13253E0	-9.14321E0	3.55244E-3	9.61304E-2	2.73086E1	-3.26909E1	-3.26202E1	2.68507E1	2.24694E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.1407E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.17037E-1	-7.9782E-1	-9.13265E0	-9.14314E0	3.50475E-3	9.62734E-2	2.73113E1	-3.26254E1	-3.26092E1	2.68137E1	2.23583E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.12594E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.17084E-1	-7.98178E-1	-9.1321E0	-9.14309E0	3.26633E-3	9.66311E-2	2.73051E1	-3.26284E1	-3.26384E1	2.68292E1	2.23665E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.1428E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16917E-1	-7.98106E-1	-9.13255E0	-9.14342E0	3.31402E-3	9.6488E-2	2.73308E1	-3.26674E1	-3.26238E1	2.6849E1	2.23869E-9	2.52276E-3	2.52276E-3	6.29665E-3	2.13867E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.16822E-1	-7.97868E-1	-9.13243E0	-9.1434E0	3.43323E-3	9.61542E-2	2.73382E1	-3.26705E1	-3.26146E1	2.68269E1	2.2356E-9	2.52058E-3	2.52058E-3	6.31761E-3	2.13302E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16965E-1	-7.97749E-1	-9.13248E0	-9.14328E0	3.52859E-3	9.63688E-2	2.73069E1	-3.26278E1	-3.26182E1	2.6837E1	2.23961E-9	2.52222E-3	2.52222E-3	6.29581E-3	2.13349E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.17156E-1	-7.97653E-1	-9.13267E0	-9.14328E0	3.21865E-3	9.66072E-2	2.72859E1	-3.2644E1	-3.26194E1	2.68376E1	2.23526E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.13513E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.17132E-1	-7.97606E-1	-9.1326E0	-9.14335E0	3.26633E-3	9.63449E-2	2.73231E1	-3.26302E1	-3.26122E1	2.68274E1	2.23332E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.1407E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.17299E-1	-7.97558E-1	-9.13253E0	-9.14309E0	3.71933E-3	9.63688E-2	2.73219E1	-3.26699E1	-3.25701E1	2.684E1	2.2372E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.13513E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.17132E-1	-7.97653E-1	-9.1325E0	-9.14364E0	3.57628E-3	9.63211E-2	2.73442E1	-3.2638E1	-3.26356E1	2.68542E1	2.23963E-9	2.51693E-3	2.51693E-3	6.30182E-3	2.13334E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.17418E-1	-7.97915E-1	-9.13248E0	-9.1435E0	3.38554E-3	9.60827E-2	2.73375E1	-3.27107E1	-3.26416E1	2.68442E1	2.24251E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.12594E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.17299E-1	-7.97772E-1	-9.13253E0	-9.14309E0	3.50475E-3	9.62496E-2	2.73171E1	-3.26554E1	-3.26152E1	2.68358E1	2.23429E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.13513E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.17299E-1	-7.97677E-1	-9.13243E0	-9.14311E0	3.62396E-3	9.64165E-2	2.73198E1	-3.26384E1	-3.26272E1	2.68286E1	2.24012E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.1407E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.17013E-1	-7.97701E-1	-9.13265E0	-9.14321E0	3.21865E-3	9.60827E-2	2.73411E1	-3.26638E1	-3.26213E1	2.68487E1	2.24155E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.13867E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16822E-1	-7.9782E-1	-9.13248E0	-9.1429E0	3.57628E-3	9.61542E-2	2.73211E1	-3.26293E1	-3.26326E1	2.68323E1	2.23874E-9	2.52153E-3	2.52153E-3	6.31854E-3	2.13936E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16822E-1	-7.97915E-1	-9.13241E0	-9.14314E0	3.50475E-3	9.63211E-2	2.73267E1	-3.26744E1	-3.26408E1	2.6814E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.16941E-1	-7.98106E-1	-9.13219E0	-9.1434E0	3.43323E-3	9.63211E-2	2.73057E1	-3.26567E1	-3.26206E1	2.6825E1	2.23825E-9	2.51709E-3	2.51709E-3	6.33653E-3	2.13314E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.17013E-1	-7.97915E-1	-9.13243E0	-9.14299E0	3.48091E-3	9.63211E-2	2.72716E1	-3.26101E1	-3.26662E1	2.68367E1	2.23469E-9	2.51244E-3	2.51244E-3	6.3074E-3	2.14339E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16822E-1	-7.98106E-1	-9.13243E0	-9.14295E0	3.8147E-3	9.60827E-2	2.74024E1	-3.26873E1	-3.25972E1	2.68178E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16917E-1	-7.97701E-1	-9.13255E0	-9.14314E0	3.45707E-3	9.59635E-2	2.73032E1	-3.26375E1	-3.26041E1	2.68225E1	2.23623E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.13327E-2