[Scan]
initial_time=2016-01-18T17:15:55
final_time=2016-01-18T17:16:15
ip_count=19
run=1024
dataset=2
scan=115
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.16751E-1
ql1_imon=1.36342E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.94181E-9
ql3_vset=
ql3_vmon=-9.1325E0
ql3_imon=2.12574E-10
ql4_vset=
ql4_vmon=-9.14314E0
ql4_imon=-1.19615E-10
mult1=-9.61998E-9
mult2=-2.67669E-9
rf_tmon=-4.58452E-3
rf_agc=3.25946E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.45707E-3
ql5_imon=1.63012E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63967E0
bslens_imon=2.49371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19712E1
lens5a_imon=2.00775E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54661E1
cs_ef1b_imon=2.83241E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02181E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0454E1
cs_ea1_imon=2.61122E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31062E0
lens1_imon=2.64236E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.94125E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03549E1
cs_ea2_imon=1.47365E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84064E1
cs_ef1a_imon=2.94342E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.27958E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11856E1
os_restr1_imon=4.28121E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15087E1
os_ea1_imon=2.37797E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.05802E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=1.18944E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91987E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=2.92756E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20377E0
olens4_imon=3.26932E-8
tplens_vset=1.4E-1
tplens_vmon=1.68921E0
tplens_imon=-1.36074E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25888E1
iondef3_imon=1.51542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03164E2
lens6_imon=2.98279E-4
ql6_vset=1.0E-1
ql6_vmon=9.61781E-2
ql6_imon=4.05873E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27569E0
ionrepsh_imon=1.74902E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.15499E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44323E0
os_ea2_imon=-8.1918E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06183E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71498E1
cs_ef2a_imon=3.16866E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.69519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07635E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11394E1
os_restr2_imon=3.40256E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.29397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02061E1
cs_anode2_imon=2.2219E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.10308E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68238E1
iondef4_imon=1.11332E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.91378E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.65763E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10011E0
cs_ionaccel_imon=-2.10053E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47496E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5709E1
einzel_imon=8.03382E-6
window_vset=0.0E0
window_vmon=2.72603E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82747E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.87119E1
mask2_imon=-3.6342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.37101E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.56049E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.33562E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41441E0
defgridb_imon=5.7889E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.42006E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07756E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63217E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=9.95945E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62708E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64488E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-3.03237E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.70684E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.2037E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.83278E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22637E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=2.1466E-2
chamber_ion_pmon=2.2426E-9
chamber_cvt_pmon=2.5147E-3
foreline_cvt_pmon=2.5147E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01939E-1
res40_imon=-2.7961E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.16512E-1	-7.97939E-1	-9.13246E0	-9.14311E0	3.50475E-3	9.64165E-2	2.73427E1	-3.26328E1	-3.26425E1	2.68088E1	2.22075E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.12218E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.16846E-1	-7.97772E-1	-9.13205E0	-9.1428E0	3.62396E-3	9.63688E-2	2.7329E1	-3.26713E1	-3.26162E1	2.68388E1	2.24395E-9	2.519E-3	2.519E-3	6.30202E-3	2.13411E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.16441E-1	-7.97653E-1	-9.13234E0	-9.14297E0	3.71933E-3	9.63688E-2	2.7311E1	-3.26461E1	-3.26083E1	2.68227E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16536E-1	-7.98082E-1	-9.13243E0	-9.14307E0	3.62396E-3	9.61781E-2	2.73086E1	-3.26649E1	-3.26402E1	2.68569E1	2.242E-9	2.51498E-3	2.51498E-3	6.3074E-3	2.126E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16655E-1	-7.97915E-1	-9.13255E0	-9.14288E0	3.43323E-3	9.63688E-2	2.72829E1	-3.26206E1	-3.26446E1	2.68352E1	2.23964E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.12775E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16607E-1	-7.98059E-1	-9.13246E0	-9.14328E0	3.45707E-3	9.62257E-2	2.73135E1	-3.26344E1	-3.2614E1	2.68394E1	2.23138E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.12403E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16345E-1	-7.97701E-1	-9.13231E0	-9.14328E0	3.67165E-3	9.62257E-2	2.72931E1	-3.26422E1	-3.26188E1	2.6849E1	2.23665E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.13334E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16584E-1	-7.97725E-1	-9.13236E0	-9.14309E0	3.48091E-3	9.65118E-2	2.73514E1	-3.26248E1	-3.26206E1	2.68575E1	2.24921E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.13685E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.1656E-1	-7.98059E-1	-9.13239E0	-9.14292E0	3.31402E-3	9.66072E-2	2.73369E1	-3.265E1	-3.26482E1	2.68454E1	2.2372E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.14442E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09333E0	-8.16655E-1	-7.97987E-1	-9.13253E0	-9.14321E0	3.3617E-3	9.66072E-2	2.7301E1	-3.26573E1	-3.26354E1	2.68412E1	2.24158E-9	2.52099E-3	2.52099E-3	6.30466E-3	2.14535E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0934E0	-8.16584E-1	-7.98178E-1	-9.13258E0	-9.14311E0	3.26633E-3	9.69648E-2	2.7291E1	-3.26358E1	-3.2664E1	2.68027E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.16798E-1	-7.98297E-1	-9.13239E0	-9.14292E0	3.17097E-3	9.64403E-2	2.73375E1	-3.26526E1	-3.26231E1	2.68244E1	2.24012E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.15002E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16417E-1	-7.97915E-1	-9.13248E0	-9.14295E0	3.33786E-3	9.64165E-2	2.73106E1	-3.2626E1	-3.26187E1	2.68182E1	2.23869E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.14415E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16679E-1	-7.97987E-1	-9.13253E0	-9.14328E0	3.24249E-3	9.64642E-2	2.73393E1	-3.26767E1	-3.26351E1	2.68457E1	2.22678E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.13712E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16917E-1	-7.98059E-1	-9.13234E0	-9.14314E0	3.6478E-3	9.63449E-2	2.73338E1	-3.26778E1	-3.26298E1	2.68549E1	2.21492E-9	2.5199E-3	2.5199E-3	6.3282E-3	2.14364E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.16512E-1	-7.98225E-1	-9.13267E0	-9.14326E0	3.55244E-3	9.66787E-2	2.73253E1	-3.26725E1	-3.25893E1	2.6813E1	2.21808E-9	2.51527E-3	2.51527E-3	6.31902E-3	2.14135E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.1687E-1	-7.98011E-1	-9.13291E0	-9.14266E0	3.48091E-3	9.63688E-2	2.73457E1	-3.26602E1	-3.26301E1	2.68262E1	2.23818E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.13327E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.16727E-1	-7.97844E-1	-9.13243E0	-9.14278E0	3.33786E-3	9.62973E-2	2.73289E1	-3.26411E1	-3.26446E1	2.68626E1	2.23107E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.13867E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.16774E-1	-7.98106E-1	-9.13219E0	-9.14257E0	3.79086E-3	9.62973E-2	2.74214E1	-3.26915E1	-3.25923E1	2.68382E1	2.24427E-9	2.51679E-3	2.51679E-3	6.30221E-3	2.13659E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.16751E-1	-7.98082E-1	-9.1325E0	-9.14314E0	3.45707E-3	9.61781E-2	2.73075E1	-3.26627E1	-3.25888E1	2.68238E1	2.2426E-9	2.5147E-3	2.5147E-3	6.32418E-3	2.1466E-2