[Scan]
initial_time=2016-01-18T17:16:22
final_time=2016-01-18T17:16:41
ip_count=19
run=1024
dataset=2
scan=116
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.36612E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.94919E-9
ql3_vset=
ql3_vmon=-9.13239E0
ql3_imon=2.39837E-10
ql4_vset=
ql4_vmon=-9.14328E0
ql4_imon=-8.44002E-11
mult1=-9.37917E-9
mult2=-2.65074E-9
rf_tmon=-4.98107E-3
rf_agc=3.26426E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.62396E-3
ql5_imon=1.66999E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65292E0
bslens_imon=2.4981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=1.98956E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12545E2
lens4a_imon=2.05169E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54499E1
cs_ef1b_imon=2.8335E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04856E1
cs_ea1_imon=2.58618E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32509E0
lens1_imon=2.99919E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.95387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.46937E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84148E1
cs_ef1a_imon=2.92576E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.28031E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11748E1
os_restr1_imon=4.31761E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14831E1
os_ea1_imon=2.39476E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.06631E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20583E0
cs_ionrep_imon=1.19142E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92016E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.91675E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.26279E-8
tplens_vset=1.4E-1
tplens_vmon=1.6913E0
tplens_imon=-2.84926E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.50397E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.5667E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0314E2
lens6_imon=2.98039E-4
ql6_vset=1.0E-1
ql6_vmon=9.62973E-2
ql6_imon=4.01616E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2527E0
ionrepsh_imon=1.74875E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74441E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44436E0
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00735E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71738E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04134E0
os_ef2alow_imon=-2.74925E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.3947E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11574E1
os_restr2_imon=3.41229E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.28883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02109E1
cs_anode2_imon=2.21289E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.10779E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68157E1
iondef4_imon=1.12017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.93397E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.64333E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09891E0
cs_ionaccel_imon=-2.07891E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56922E1
einzel_imon=8.06986E-6
window_vset=0.0E0
window_vmon=2.24551E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82681E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.87269E1
mask2_imon=-3.92252E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.75052E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.77718E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50098E3
multb_neg_imon=7.20256E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=6.19678E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33308E1
os_fil1_imon=9.43429E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07581E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63758E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.93891E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62744E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64919E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.91224E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.56269E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.76774E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-1.98121E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.77932E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22742E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.1332E-2
chamber_ion_pmon=2.23964E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.49391E-1
res40_imon=-2.83214E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16751E-1	-7.97844E-1	-9.13274E0	-9.14283E0	3.93391E-3	9.64165E-2	2.73405E1	-3.26567E1	-3.26152E1	2.68292E1	2.23869E-9	2.52492E-3	2.52492E-3	6.30202E-3	2.14598E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.16727E-1	-7.98011E-1	-9.13248E0	-9.14271E0	3.50475E-3	9.64165E-2	2.73253E1	-3.26909E1	-3.26076E1	2.68202E1	2.23138E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.13327E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16631E-1	-7.97844E-1	-9.1325E0	-9.14302E0	3.43323E-3	9.63211E-2	2.72927E1	-3.26815E1	-3.25717E1	2.68406E1	2.21303E-9	2.51248E-3	2.51248E-3	6.31858E-3	2.11641E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16345E-1	-7.97987E-1	-9.13246E0	-9.14299E0	3.45707E-3	9.6488E-2	2.73497E1	-3.26567E1	-3.2644E1	2.68296E1	2.23011E-9	2.51954E-3	2.51954E-3	6.29128E-3	2.12957E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16631E-1	-7.97677E-1	-9.1325E0	-9.1429E0	3.55244E-3	9.62019E-2	2.7318E1	-3.26752E1	-3.26372E1	2.68356E1	2.24442E-9	2.52923E-3	2.52923E-3	6.33436E-3	2.14232E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16727E-1	-7.98035E-1	-9.13231E0	-9.14297E0	3.52859E-3	9.61065E-2	2.73325E1	-3.26585E1	-3.26387E1	2.68144E1	2.23345E-9	2.52625E-3	2.52625E-3	6.32247E-3	2.13465E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09333E0	-8.16607E-1	-7.97701E-1	-9.1327E0	-9.1429E0	3.40939E-3	9.66072E-2	2.73123E1	-3.26579E1	-3.26014E1	2.68419E1	2.24167E-9	2.51411E-3	2.51411E-3	6.3074E-3	2.13545E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.16798E-1	-7.97606E-1	-9.13258E0	-9.14307E0	3.3617E-3	9.64165E-2	2.73189E1	-3.26753E1	-3.26188E1	2.68508E1	2.23566E-9	2.51025E-3	2.51025E-3	6.30182E-3	2.1485E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.16751E-1	-7.97772E-1	-9.1326E0	-9.14307E0	3.76701E-3	9.62257E-2	2.73235E1	-3.26805E1	-3.26285E1	2.68442E1	2.24538E-9	2.51417E-3	2.51417E-3	6.32896E-3	2.13502E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-8.16989E-1	-7.98011E-1	-9.13243E0	-9.14304E0	3.55244E-3	9.62973E-2	2.73411E1	-3.26687E1	-3.26554E1	2.68256E1	2.24359E-9	2.52809E-3	2.52809E-3	6.32978E-3	2.13712E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.16822E-1	-7.98106E-1	-9.13217E0	-9.14302E0	3.74317E-3	9.60112E-2	2.73771E1	-3.27056E1	-3.26284E1	2.68348E1	2.22751E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.13327E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16703E-1	-7.97868E-1	-9.13241E0	-9.14304E0	3.6478E-3	9.62257E-2	2.73399E1	-3.26669E1	-3.26176E1	2.68288E1	2.21495E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.13502E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.17204E-1	-7.98035E-1	-9.13239E0	-9.14304E0	3.62396E-3	9.61781E-2	2.73652E1	-3.26579E1	-3.26056E1	2.68296E1	2.22875E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.13901E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.17275E-1	-7.98178E-1	-9.13262E0	-9.14319E0	3.69549E-3	9.6035E-2	2.73466E1	-3.26741E1	-3.2629E1	2.68364E1	2.22916E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.13867E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.1706E-1	-7.97915E-1	-9.13262E0	-9.14309E0	3.8147E-3	9.65118E-2	2.73189E1	-3.26657E1	-3.2626E1	2.68274E1	2.23915E-9	2.53416E-3	2.53416E-3	6.32936E-3	2.12218E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16965E-1	-7.97963E-1	-9.13267E0	-9.14297E0	3.88622E-3	9.63211E-2	2.73417E1	-3.26651E1	-3.26296E1	2.68328E1	2.23332E-9	2.5188E-3	2.5188E-3	6.28006E-3	2.13327E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.1687E-1	-7.97963E-1	-9.13274E0	-9.14311E0	3.40939E-3	9.63211E-2	2.73448E1	-3.26567E1	-3.25936E1	2.68178E1	2.21497E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.13142E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16941E-1	-7.97915E-1	-9.1325E0	-9.14338E0	3.6478E-3	9.61065E-2	2.7301E1	-3.26773E1	-3.26455E1	2.68803E1	2.21401E-9	2.52647E-3	2.52647E-3	6.29645E-3	2.1407E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16894E-1	-7.97987E-1	-9.13234E0	-9.14326E0	3.60012E-3	9.63211E-2	2.72172E1	-3.25735E1	-3.27151E1	2.68209E1	2.21401E-9	2.51096E-3	2.51096E-3	6.32896E-3	2.1332E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16774E-1	-7.98106E-1	-9.13239E0	-9.14328E0	3.62396E-3	9.62973E-2	2.73405E1	-3.26476E1	-3.26362E1	2.68157E1	2.23964E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.1332E-2