[Scan]
initial_time=2016-01-18T17:16:49
final_time=2016-01-18T17:17:08
ip_count=19
run=1024
dataset=2
scan=117
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08746E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=1.36771E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=2.01039E-9
ql3_vset=
ql3_vmon=-9.13212E0
ql3_imon=1.89841E-10
ql4_vset=
ql4_vmon=-9.14302E0
ql4_imon=-9.94086E-11
mult1=-9.40478E-9
mult2=-2.77225E-9
rf_tmon=-5.44742E-3
rf_agc=3.28844E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.74317E-3
ql5_imon=1.65572E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67742E0
bslens_imon=2.45477E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19494E1
lens5a_imon=2.00598E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12529E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53731E1
cs_ef1b_imon=2.81849E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.0222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.60166E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35014E0
lens1_imon=2.82995E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64579E1
os_ef1alow_imon=2.986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03608E1
cs_ea2_imon=1.50268E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84527E1
cs_ef1a_imon=2.94499E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.28057E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11523E1
os_restr1_imon=4.26941E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14781E1
os_ea1_imon=2.36806E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63462E1
os_ef1bup_imon=3.08365E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=1.17705E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91996E2
cs_nozzle_imon=1.9347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.94116E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.27154E-8
tplens_vset=1.4E-1
tplens_vmon=1.68863E0
tplens_imon=-1.39614E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26402E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26679E1
iondef2_imon=1.56214E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03156E2
lens6_imon=2.9824E-4
ql6_vset=1.0E-1
ql6_vmon=9.62496E-2
ql6_imon=4.0584E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=1.76459E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.17481E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.11666E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41255E0
os_ea2_imon=-7.05919E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06173E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.15594E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06498E0
os_ef2alow_imon=-2.42515E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09394E-1
os_ef2bup_imon=-5.15322E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11448E1
os_restr2_imon=3.41032E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.28902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.23604E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73216E1
iondef1_imon=1.09564E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68364E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.87198E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81188E-1
olens1_imon=7.61803E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12435E0
cs_ionaccel_imon=-1.7579E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02126E2
cs_ionfocb_imon=1.47452E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56562E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=2.46067E-1
window_imon=-8.71708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82751E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86946E1
mask2_imon=-7.11847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.25067E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.61358E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.96044E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40556E0
defgridb_imon=6.02604E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.41082E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06802E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63731E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.94624E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62493E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64768E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.5345E-2
os_fil2_imon=-2.8024E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89498E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.78733E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3552E-1
cs_fil2_imon=-2.18265E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.003E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22676E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28006E-3
inlet_lpb_pmon=2.1407E-2
chamber_ion_pmon=2.24304E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.76582E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=187
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.16584E-1	-7.97653E-1	-9.13229E0	-9.14297E0	3.67165E-3	9.65834E-2	2.73175E1	-3.26531E1	-3.2593E1	2.68285E1	2.24251E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.13139E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.16798E-1	-7.97868E-1	-9.13243E0	-9.14309E0	3.74317E-3	9.69648E-2	2.73442E1	-3.26615E1	-3.25924E1	2.68442E1	2.23773E-9	2.5131E-3	2.5131E-3	6.32356E-3	2.14232E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16703E-1	-7.97915E-1	-9.13219E0	-9.14288E0	3.76701E-3	9.66787E-2	2.7346E1	-3.26591E1	-3.25966E1	2.68364E1	2.23575E-9	2.52045E-3	2.52045E-3	6.31563E-3	2.13142E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16751E-1	-7.97677E-1	-9.13196E0	-9.14278E0	3.8147E-3	9.64642E-2	2.73321E1	-3.26735E1	-3.26266E1	2.68412E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0934E0	-8.16822E-1	-7.98035E-1	-9.13253E0	-9.14297E0	3.67165E-3	9.63688E-2	2.73231E1	-3.26717E1	-3.26356E1	2.68424E1	2.22075E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.13513E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09325E0	-8.16631E-1	-7.97939E-1	-9.1321E0	-9.14314E0	3.76701E-3	9.65118E-2	2.7337E1	-3.26668E1	-3.26249E1	2.68591E1	2.22751E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.13884E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09317E0	-8.16655E-1	-7.97963E-1	-9.13212E0	-9.14323E0	3.69549E-3	9.65118E-2	2.73481E1	-3.26179E1	-3.26191E1	2.68633E1	2.21401E-9	2.52262E-3	2.52262E-3	6.31761E-3	2.13474E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09356E0	-8.16631E-1	-7.97892E-1	-9.13229E0	-9.14302E0	3.62396E-3	9.63688E-2	2.73285E1	-3.26512E1	-3.25894E1	2.68603E1	2.21706E-9	2.51642E-3	2.51642E-3	6.3016E-3	2.12957E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09271E0	-8.16846E-1	-7.9813E-1	-9.13217E0	-9.14288E0	3.6478E-3	9.61781E-2	2.73265E1	-3.26666E1	-3.26347E1	2.68516E1	2.21779E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.12957E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.16751E-1	-7.98035E-1	-9.13217E0	-9.14295E0	3.60012E-3	9.65357E-2	2.73253E1	-3.26682E1	-3.2604E1	2.68001E1	2.23544E-9	2.52025E-3	2.52025E-3	6.2863E-3	2.12957E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09333E0	-8.16631E-1	-7.98035E-1	-9.13205E0	-9.14285E0	3.6478E-3	9.65357E-2	2.73616E1	-3.26789E1	-3.25942E1	2.68388E1	2.2327E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.11641E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09217E0	-8.16607E-1	-7.98154E-1	-9.13191E0	-9.1433E0	3.88622E-3	9.62973E-2	2.73503E1	-3.26341E1	-3.26353E1	2.68134E1	2.24207E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.13698E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09217E0	-8.16727E-1	-7.97987E-1	-9.13208E0	-9.14319E0	3.91006E-3	9.62019E-2	2.73063E1	-3.2664E1	-3.25807E1	2.68268E1	2.23487E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.12594E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09302E0	-8.16631E-1	-7.97939E-1	-9.132E0	-9.14319E0	3.93391E-3	9.64403E-2	2.73411E1	-3.26362E1	-3.2629E1	2.68352E1	2.24304E-9	2.52428E-3	2.52428E-3	6.29098E-3	2.1407E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09309E0	-8.16989E-1	-7.98154E-1	-9.1321E0	-9.14297E0	3.62396E-3	9.65118E-2	2.73393E1	-3.26661E1	-3.25776E1	2.68454E1	2.22461E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.13884E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09317E0	-8.1687E-1	-7.97868E-1	-9.13196E0	-9.14271E0	3.45707E-3	9.65357E-2	2.73387E1	-3.26726E1	-3.26048E1	2.68328E1	2.24347E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.12957E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.16584E-1	-7.97844E-1	-9.132E0	-9.14319E0	3.45707E-3	9.61304E-2	2.73092E1	-3.2639E1	-3.26484E1	2.68331E1	2.24538E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.14415E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16703E-1	-7.97701E-1	-9.13191E0	-9.14326E0	3.98159E-3	9.61065E-2	2.7321E1	-3.26697E1	-3.26024E1	2.68395E1	2.2406E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.12957E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16822E-1	-7.97558E-1	-9.13181E0	-9.14316E0	3.62396E-3	9.63211E-2	2.73856E1	-3.2611E1	-3.25191E1	2.68641E1	2.24442E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.14598E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16822E-1	-7.97963E-1	-9.13212E0	-9.14302E0	3.74317E-3	9.62496E-2	2.73216E1	-3.26679E1	-3.26402E1	2.68364E1	2.24304E-9	2.52318E-3	2.52318E-3	6.28006E-3	2.1407E-2