[Scan]
initial_time=2016-01-18T17:17:15
final_time=2016-01-18T17:17:35
ip_count=19
run=1024
dataset=2
scan=118
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0934E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.36868E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.95417E-9
ql3_vset=
ql3_vmon=-9.13246E0
ql3_imon=1.85442E-10
ql4_vset=
ql4_vmon=-9.14333E0
ql4_imon=-8.89659E-11
mult1=-9.99587E-9
mult2=-2.74873E-9
rf_tmon=-5.93114E-3
rf_agc=3.23004E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=1.67686E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66116E0
bslens_imon=2.39247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1978E1
lens5a_imon=1.9986E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12535E2
lens4a_imon=2.04964E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5393E1
cs_ef1b_imon=2.79876E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02352E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04462E1
cs_ea1_imon=2.57269E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35664E0
lens1_imon=2.67528E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64951E1
os_ef1alow_imon=2.97878E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03476E1
cs_ea2_imon=1.49063E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84669E1
cs_ef1a_imon=2.95707E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.28795E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11204E1
os_restr1_imon=4.26061E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15055E1
os_ea1_imon=2.37251E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63598E1
os_ef1bup_imon=3.06785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.197E0
cs_ionrep_imon=1.19202E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91991E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01765E1
cs_anode1_imon=2.93349E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.25526E-8
tplens_vset=1.4E-1
tplens_vmon=1.70204E0
tplens_imon=-2.11671E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26042E1
iondef3_imon=1.52552E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26691E1
iondef2_imon=1.56556E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03149E2
lens6_imon=2.98225E-4
ql6_vset=1.0E-1
ql6_vmon=9.64642E-2
ql6_imon=4.06333E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26006E0
ionrepsh_imon=1.76243E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33737E1
lens5b_imon=2.17894E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.13522E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46329E0
os_ea2_imon=-7.55271E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06154E2
lens4b_imon=2.00546E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71451E1
cs_ef2a_imon=3.14757E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07389E0
os_ef2alow_imon=-2.54437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89523E-1
os_ef2bup_imon=-5.13798E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11435E1
os_restr2_imon=3.41329E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.29414E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01846E1
cs_anode2_imon=2.24411E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.1068E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.10337E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.9825E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.70638E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12203E0
cs_ionaccel_imon=-1.81083E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.47301E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56312E1
einzel_imon=7.64667E-6
window_vset=0.0E0
window_vmon=2.79973E-1
window_imon=-7.85362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82795E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.87111E1
mask2_imon=-5.90748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.28486E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.57231E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.31057E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.425E0
defgridb_imon=6.14257E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.39476E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0693E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63806E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30915E1
cs_fil1_imon=9.93619E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63445E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64709E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44968E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85354E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.86166E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37316E-1
cs_fil2_imon=-2.58765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38572E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2261E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.14442E-2
chamber_ion_pmon=2.22461E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.01374E-1
res40_imon=-2.62297E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=195
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16917E-1	-7.98345E-1	-9.13243E0	-9.14311E0	3.76701E-3	9.63211E-2	2.73092E1	-3.26461E1	-3.26183E1	2.68406E1	2.2327E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.13901E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16846E-1	-7.98202E-1	-9.1326E0	-9.14302E0	3.76701E-3	9.64165E-2	2.73204E1	-3.2667E1	-3.26107E1	2.683E1	2.24538E-9	2.51525E-3	2.51525E-3	6.33977E-3	2.12775E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16655E-1	-7.98225E-1	-9.13262E0	-9.14302E0	3.79086E-3	9.63449E-2	2.73086E1	-3.26443E1	-3.26154E1	2.68395E1	2.24062E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.13145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16703E-1	-7.9782E-1	-9.13253E0	-9.14295E0	4.07696E-3	9.64165E-2	2.73452E1	-3.26449E1	-3.26219E1	2.68184E1	2.2406E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.1405E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16846E-1	-7.97987E-1	-9.13253E0	-9.14321E0	3.93391E-3	9.62496E-2	2.73418E1	-3.26585E1	-3.26321E1	2.68448E1	2.23297E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.13685E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.1706E-1	-7.97987E-1	-9.13236E0	-9.14304E0	3.74317E-3	9.64642E-2	2.73195E1	-3.26969E1	-3.26176E1	2.68418E1	2.22777E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.13334E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16703E-1	-7.97915E-1	-9.13239E0	-9.14309E0	3.88622E-3	9.6488E-2	2.73316E1	-3.26396E1	-3.26083E1	2.6846E1	2.22916E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.13867E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16989E-1	-7.98035E-1	-9.13236E0	-9.14319E0	4.14848E-3	9.65118E-2	2.73225E1	-3.26699E1	-3.2617E1	2.6819E1	2.21978E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.13884E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16512E-1	-7.97892E-1	-9.13227E0	-9.14319E0	3.8147E-3	9.64403E-2	2.73309E1	-3.26645E1	-3.2593E1	2.68226E1	2.21401E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.13698E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.16679E-1	-7.98011E-1	-9.13253E0	-9.14321E0	3.88622E-3	9.67264E-2	2.7355E1	-3.26476E1	-3.25972E1	2.6825E1	2.21401E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.13513E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16965E-1	-7.9813E-1	-9.1327E0	-9.14311E0	3.67165E-3	9.6488E-2	2.73526E1	-3.26699E1	-3.2611E1	2.68238E1	2.22751E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.13698E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.16965E-1	-7.9813E-1	-9.1327E0	-9.14304E0	3.93391E-3	9.63688E-2	2.73442E1	-3.26909E1	-3.2584E1	2.68202E1	2.22751E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.13142E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.1706E-1	-7.98202E-1	-9.13265E0	-9.14304E0	3.83854E-3	9.62019E-2	2.73181E1	-3.26555E1	-3.2616E1	2.68563E1	2.22364E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.1407E-2
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.16989E-1	-7.97772E-1	-9.13224E0	-9.1428E0	3.8147E-3	9.65595E-2	2.7346E1	-3.2653E1	-3.25761E1	2.68683E1	2.23235E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.14256E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09333E0	-8.17275E-1	-7.97606E-1	-9.1321E0	-9.14288E0	3.86238E-3	9.64165E-2	2.7351E1	-3.26266E1	-3.2648E1	2.68282E1	2.21495E-9	2.52707E-3	2.52707E-3	6.29665E-3	2.12594E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.17132E-1	-7.97701E-1	-9.13248E0	-9.1433E0	3.86238E-3	9.62973E-2	2.73454E1	-3.26855E1	-3.26464E1	2.68358E1	2.21695E-9	2.5147E-3	2.5147E-3	6.32978E-3	2.13145E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09325E0	-8.17132E-1	-7.98035E-1	-9.13255E0	-9.14333E0	3.45707E-3	9.62019E-2	2.73814E1	-3.26721E1	-3.25634E1	2.68205E1	2.21593E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.13884E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.16751E-1	-7.97939E-1	-9.13243E0	-9.14297E0	3.6478E-3	9.61542E-2	2.73455E1	-3.26658E1	-3.26223E1	2.68475E1	2.21857E-9	2.52093E-3	2.52093E-3	6.3074E-3	2.13835E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.16894E-1	-7.97796E-1	-9.13246E0	-9.14307E0	3.91006E-3	9.64403E-2	2.73183E1	-3.26591E1	-3.26296E1	2.68442E1	2.23963E-9	2.5147E-3	2.5147E-3	6.32978E-3	2.13712E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0934E0	-8.16798E-1	-7.98035E-1	-9.13246E0	-9.14333E0	3.95775E-3	9.64642E-2	2.73405E1	-3.26691E1	-3.26042E1	2.6795E1	2.22461E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.14442E-2