[Scan]
initial_time=2016-01-18T17:17:42
final_time=2016-01-18T17:18:01
ip_count=19
run=1024
dataset=2
scan=119
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.16917E-1
ql1_imon=1.36933E-8
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=1.94825E-9
ql3_vset=
ql3_vmon=-9.13236E0
ql3_imon=1.917E-10
ql4_vset=
ql4_vmon=-9.14311E0
ql4_imon=-8.51154E-11
mult1=-9.54774E-9
mult2=-2.73059E-9
rf_tmon=-5.31753E-3
rf_agc=3.23723E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.91006E-3
ql5_imon=1.66695E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.24936E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=2.01588E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12546E2
lens4a_imon=2.0523E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54139E1
cs_ef1b_imon=2.81656E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02081E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04231E1
cs_ea1_imon=2.61574E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33891E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.49063E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=2.95171E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.28704E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.25562E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15113E1
os_ea1_imon=2.36664E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63359E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23588E0
cs_ionrep_imon=1.19935E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91987E2
cs_nozzle_imon=1.93521E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02157E1
cs_anode1_imon=2.94882E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=3.26725E-8
tplens_vset=1.4E-1
tplens_vmon=1.72435E0
tplens_imon=-3.9668E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25906E1
iondef3_imon=1.50469E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.55588E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03144E2
lens6_imon=2.98148E-4
ql6_vset=1.0E-1
ql6_vmon=9.63211E-2
ql6_imon=4.03873E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29656E0
ionrepsh_imon=1.74983E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34078E1
lens5b_imon=2.19216E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44136E0
os_ea2_imon=-6.70656E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0617E2
lens4b_imon=2.00785E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.16542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07018E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.4306E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.114E1
os_restr2_imon=3.4141E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.24281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.11211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69007E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.93276E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.66691E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.47493E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56687E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.85217E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82785E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.86746E1
mask2_imon=-7.95896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.60992E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.44913E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.20256E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45269E0
defgridb_imon=6.04177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33314E1
os_fil1_imon=9.43039E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07347E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63673E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=9.9496E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62684E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64975E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.62876E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.89277E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22622E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.1187E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18757E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16655E-1	-7.97725E-1	-9.13267E0	-9.14271E0	4.05312E-3	9.61304E-2	2.73207E1	-3.26359E1	-3.2604E1	2.68273E1	2.24012E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.13142E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16846E-1	-7.97868E-1	-9.1327E0	-9.14295E0	3.91006E-3	9.62257E-2	2.73118E1	-3.26744E1	-3.26199E1	2.68207E1	2.22609E-9	2.51603E-3	2.51603E-3	6.31269E-3	2.13672E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16584E-1	-7.97749E-1	-9.13253E0	-9.14314E0	3.95775E-3	9.62019E-2	2.73281E1	-3.26408E1	-3.26272E1	2.68383E1	2.21401E-9	2.51359E-3	2.51359E-3	6.30182E-3	2.12204E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16512E-1	-7.97915E-1	-9.13234E0	-9.14311E0	4.19617E-3	9.61781E-2	2.7337E1	-3.2652E1	-3.26124E1	2.68058E1	2.21401E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.13502E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16512E-1	-7.98082E-1	-9.13267E0	-9.14326E0	4.02927E-3	9.62496E-2	2.73249E1	-3.2644E1	-3.26536E1	2.68148E1	2.21495E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.14598E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16679E-1	-7.97844E-1	-9.13246E0	-9.14328E0	4.05312E-3	9.63211E-2	2.73249E1	-3.2641E1	-3.2599E1	2.68478E1	2.24012E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.13142E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16488E-1	-7.98106E-1	-9.13262E0	-9.14292E0	4.02927E-3	9.57966E-2	2.73033E1	-3.26488E1	-3.2632E1	2.68484E1	2.23915E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.1407E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16727E-1	-7.97892E-1	-9.13255E0	-9.14261E0	3.67165E-3	9.61065E-2	2.73297E1	-3.26627E1	-3.26146E1	2.68328E1	2.24499E-9	2.51771E-3	2.51771E-3	6.29098E-3	2.13327E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16512E-1	-7.97963E-1	-9.13253E0	-9.14283E0	3.71933E-3	9.61304E-2	2.73328E1	-3.26573E1	-3.2616E1	2.68157E1	2.23818E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.12772E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16679E-1	-7.97725E-1	-9.13255E0	-9.14295E0	3.8147E-3	9.61304E-2	2.73141E1	-3.26188E1	-3.26494E1	2.68124E1	2.22821E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.13685E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16417E-1	-7.98011E-1	-9.13198E0	-9.14307E0	3.88622E-3	9.62973E-2	2.73417E1	-3.26561E1	-3.26142E1	2.68196E1	2.24012E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.12957E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16703E-1	-7.9782E-1	-9.13212E0	-9.14321E0	3.8147E-3	9.63211E-2	2.73193E1	-3.26649E1	-3.26071E1	2.68221E1	2.23637E-9	2.51498E-3	2.51498E-3	6.32858E-3	2.1403E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.16822E-1	-7.98178E-1	-9.13229E0	-9.14307E0	4.14848E-3	9.60112E-2	2.73261E1	-3.26416E1	-3.26098E1	2.68256E1	2.24499E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.13327E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16751E-1	-7.97987E-1	-9.13277E0	-9.14309E0	4.17233E-3	9.60588E-2	2.73532E1	-3.26897E1	-3.2617E1	2.68304E1	2.23818E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.12957E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.16393E-1	-7.97772E-1	-9.13234E0	-9.14307E0	4.02927E-3	9.62257E-2	2.73145E1	-3.26478E1	-3.26455E1	2.68304E1	2.24109E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.13142E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16631E-1	-7.98416E-1	-9.1325E0	-9.14295E0	4.07696E-3	9.61542E-2	2.73706E1	-3.2653E1	-3.26092E1	2.684E1	2.24251E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.1332E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.16417E-1	-7.97915E-1	-9.13241E0	-9.14285E0	4.19617E-3	9.65834E-2	2.73099E1	-3.26711E1	-3.26308E1	2.68454E1	2.2372E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.13142E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16774E-1	-7.97558E-1	-9.13236E0	-9.14278E0	3.98159E-3	9.62257E-2	2.73387E1	-3.27003E1	-3.25641E1	2.68285E1	2.24109E-9	2.5199E-3	2.5199E-3	6.28552E-3	2.13698E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16846E-1	-7.97796E-1	-9.13267E0	-9.1429E0	3.83854E-3	9.62973E-2	2.72799E1	-3.26038E1	-3.26482E1	2.68971E1	2.23773E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.1332E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16917E-1	-7.97772E-1	-9.13236E0	-9.14311E0	3.91006E-3	9.63211E-2	2.73093E1	-3.26567E1	-3.25906E1	2.69007E1	2.23773E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.1187E-2