[Scan]
initial_time=2016-01-18T17:18:35
final_time=2016-01-18T17:18:55
ip_count=19
run=1024
dataset=2
scan=121
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08726E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.36516E-8
ql2_vset=
ql2_vmon=-7.97725E-1
ql2_imon=1.9798E-9
ql3_vset=
ql3_vmon=-9.13222E0
ql3_imon=1.96087E-10
ql4_vset=
ql4_vmon=-9.14292E0
ql4_imon=-8.73804E-11
mult1=-9.55847E-9
mult2=-2.69386E-9
rf_tmon=-4.13194E-3
rf_agc=3.31793E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.91006E-3
ql5_imon=1.71132E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64931E0
bslens_imon=2.40437E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19863E1
lens5a_imon=2.00398E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04988E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.82809E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02244E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=2.59663E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34192E0
lens1_imon=2.68556E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03636E1
cs_ea2_imon=1.50397E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.94125E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.28784E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=4.26031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=2.34753E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21124E0
cs_ionrep_imon=1.177E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91994E2
cs_nozzle_imon=1.93539E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.93873E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=3.27838E-8
tplens_vset=1.4E-1
tplens_vmon=1.65525E0
tplens_imon=-1.94802E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26396E1
iondef3_imon=1.50397E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26673E1
iondef2_imon=1.58004E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03141E2
lens6_imon=2.9831E-4
ql6_vset=1.0E-1
ql6_vmon=9.60588E-2
ql6_imon=4.03328E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=1.74587E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.15683E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44136E0
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06195E2
lens4b_imon=2.00435E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.15893E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07498E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98625E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11364E1
os_restr2_imon=3.41914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.29099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73423E1
iondef1_imon=1.10815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68285E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.04479E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8114E-1
olens1_imon=7.67081E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.7113E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02141E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.76207E-1
window_imon=-7.81481E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82789E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.8671E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92566E3
multa_neg_imon=7.62074E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.70508E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.01871E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30833E0
defgridb_imon=5.87594E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33326E1
os_fil1_imon=9.40078E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06831E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6356E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=9.94744E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.623E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65156E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.94949E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26836E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22748E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.13685E-2
chamber_ion_pmon=2.22916E-9
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.71305E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09325E0	-8.16488E-1	-7.97606E-1	-9.13236E0	-9.14307E0	3.71933E-3	9.63449E-2	2.73157E1	-3.2672E1	-3.26408E1	2.68526E1	2.22461E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.13142E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09348E0	-8.16584E-1	-7.97772E-1	-9.13236E0	-9.14295E0	4.02927E-3	9.67264E-2	2.73506E1	-3.26435E1	-3.2616E1	2.68618E1	2.23869E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.12594E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09279E0	-8.1656E-1	-7.97939E-1	-9.13231E0	-9.14311E0	3.88622E-3	9.63926E-2	2.73277E1	-3.27262E1	-3.25965E1	2.68134E1	2.24062E-9	2.52139E-3	2.52139E-3	6.32418E-3	2.13712E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09325E0	-8.16703E-1	-7.97749E-1	-9.13243E0	-9.14288E0	4.12464E-3	9.65595E-2	2.73207E1	-3.26543E1	-3.26248E1	2.68545E1	2.22631E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.12957E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.17037E-1	-7.98321E-1	-9.13241E0	-9.14309E0	3.83854E-3	9.66787E-2	2.73243E1	-3.26657E1	-3.25888E1	2.68178E1	2.23623E-9	2.51225E-3	2.51225E-3	6.31837E-3	2.13327E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.16679E-1	-7.98202E-1	-9.13222E0	-9.14307E0	3.67165E-3	9.66072E-2	2.73279E1	-3.26621E1	-3.26302E1	2.68556E1	2.24304E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.12957E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16703E-1	-7.97725E-1	-9.13196E0	-9.14297E0	4.05312E-3	9.66311E-2	2.73027E1	-3.26461E1	-3.26561E1	2.68412E1	2.23332E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.12403E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16655E-1	-7.97772E-1	-9.13215E0	-9.14292E0	3.91006E-3	9.65595E-2	2.73243E1	-3.26518E1	-3.26032E1	2.68271E1	2.23964E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.13685E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16274E-1	-7.97844E-1	-9.13243E0	-9.14302E0	3.76701E-3	9.63211E-2	2.73075E1	-3.26738E1	-3.26383E1	2.68606E1	2.23773E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.13685E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16369E-1	-7.97749E-1	-9.13241E0	-9.14314E0	3.83854E-3	9.64642E-2	2.73014E1	-3.2664E1	-3.26223E1	2.68166E1	2.24062E-9	2.52921E-3	2.52921E-3	6.31299E-3	2.12392E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16607E-1	-7.97606E-1	-9.13241E0	-9.14295E0	3.91006E-3	9.62019E-2	2.73279E1	-3.26615E1	-3.26248E1	2.68328E1	2.2327E-9	2.52473E-3	2.52473E-3	6.3074E-3	2.13712E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16631E-1	-7.97653E-1	-9.13239E0	-9.14319E0	3.69549E-3	9.61304E-2	2.73508E1	-3.26753E1	-3.26266E1	2.684E1	2.2426E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.13145E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.1656E-1	-7.97963E-1	-9.13219E0	-9.14328E0	3.91006E-3	9.60588E-2	2.73393E1	-3.2662E1	-3.26248E1	2.68196E1	2.23623E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.13884E-2
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16679E-1	-7.97749E-1	-9.13239E0	-9.14316E0	3.67165E-3	9.60827E-2	2.73339E1	-3.26573E1	-3.26098E1	2.68526E1	2.23678E-9	2.51632E-3	2.51632E-3	6.34518E-3	2.13502E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16607E-1	-7.97582E-1	-9.13229E0	-9.14319E0	3.6478E-3	9.59873E-2	2.73532E1	-3.26627E1	-3.2602E1	2.68274E1	2.23818E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.13327E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16488E-1	-7.97796E-1	-9.13241E0	-9.14299E0	4.14848E-3	9.63211E-2	2.73099E1	-3.26975E1	-3.2635E1	2.684E1	2.23583E-9	2.51847E-3	2.51847E-3	6.29128E-3	2.12775E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16488E-1	-7.97677E-1	-9.13246E0	-9.14307E0	3.91006E-3	9.61781E-2	2.73145E1	-3.26767E1	-3.26012E1	2.68331E1	2.24207E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.12957E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16512E-1	-7.97939E-1	-9.13222E0	-9.14309E0	3.67165E-3	9.61781E-2	2.73576E1	-3.26791E1	-3.26089E1	2.68346E1	2.23818E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.13884E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16464E-1	-7.97987E-1	-9.13241E0	-9.14297E0	3.79086E-3	9.62496E-2	2.73153E1	-3.26362E1	-3.26506E1	2.68388E1	2.24347E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.14232E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.16631E-1	-7.97725E-1	-9.13222E0	-9.14292E0	3.91006E-3	9.60588E-2	2.73423E1	-3.26673E1	-3.26396E1	2.68285E1	2.22916E-9	2.51417E-3	2.51417E-3	6.33436E-3	2.13685E-2