[Scan]
initial_time=2016-01-18T17:19:02
final_time=2016-01-18T17:19:21
ip_count=19
run=1024
dataset=2
scan=122
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=1.36638E-8
ql2_vset=
ql2_vmon=-7.97725E-1
ql2_imon=1.90647E-9
ql3_vset=
ql3_vmon=-9.13248E0
ql3_imon=2.39134E-10
ql4_vset=
ql4_vmon=-9.14311E0
ql4_imon=-8.02517E-11
mult1=-9.75243E-9
mult2=-2.82241E-9
rf_tmon=-5.48576E-3
rf_agc=3.30332E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.76701E-3
ql5_imon=1.65888E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.29262E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=2.00795E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05226E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54121E1
cs_ef1b_imon=2.81331E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02334E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=2.57032E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3317E0
lens1_imon=2.82615E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03582E1
cs_ea2_imon=1.47982E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.94882E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.29422E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.27652E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=2.3515E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.06775E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20884E0
cs_ionrep_imon=1.17556E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9197E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.94306E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.28007E-8
tplens_vset=1.4E-1
tplens_vmon=1.68109E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26008E1
iondef3_imon=1.47297E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26464E1
iondef2_imon=1.57175E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03143E2
lens6_imon=2.98209E-4
ql6_vset=1.0E-1
ql6_vmon=9.62496E-2
ql6_imon=4.037E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22867E0
ionrepsh_imon=1.74839E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44436E0
os_ea2_imon=-6.99496E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06145E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.15425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1146E1
os_restr2_imon=3.42022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.2863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.23668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72949E1
iondef1_imon=1.12689E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68217E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.97077E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.76784E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02139E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.58788E-1
window_imon=-8.1752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82753E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.87047E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92592E3
multa_neg_imon=7.24582E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.65821E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5019E3
multb_neg_imon=6.96463E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.36621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33318E1
os_fil1_imon=9.40186E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06879E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6347E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3091E1
cs_fil1_imon=9.96077E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62498E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65471E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55092E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.91855E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22635E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.14232E-2
chamber_ion_pmon=2.24538E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56889E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16703E-1	-7.97963E-1	-9.13224E0	-9.14264E0	3.88622E-3	9.66072E-2	2.73387E1	-3.26417E1	-3.25884E1	2.68175E1	2.23429E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.12218E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.17013E-1	-7.98321E-1	-9.13231E0	-9.14309E0	3.76701E-3	9.63449E-2	2.73271E1	-3.267E1	-3.26185E1	2.68337E1	2.23544E-9	2.52025E-3	2.52025E-3	6.33388E-3	2.12779E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16536E-1	-7.9813E-1	-9.1326E0	-9.14316E0	3.91006E-3	9.66549E-2	2.73331E1	-3.2682E1	-3.26311E1	2.68225E1	2.23918E-9	2.51919E-3	2.51919E-3	6.35514E-3	2.13493E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.1656E-1	-7.98082E-1	-9.13243E0	-9.14292E0	4.07696E-3	9.65834E-2	2.73753E1	-3.26573E1	-3.26154E1	2.68383E1	2.23652E-9	2.51642E-3	2.51642E-3	6.29581E-3	2.13545E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16584E-1	-7.97963E-1	-9.13265E0	-9.14299E0	3.93391E-3	9.65834E-2	2.73321E1	-3.26663E1	-3.26074E1	2.68605E1	2.23773E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.13139E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16441E-1	-7.97796E-1	-9.13231E0	-9.14257E0	3.8147E-3	9.67264E-2	2.73275E1	-3.26555E1	-3.26018E1	2.68575E1	2.23392E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.13867E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16822E-1	-7.98011E-1	-9.13239E0	-9.14278E0	3.62396E-3	9.65834E-2	2.7321E1	-3.26573E1	-3.25942E1	2.68372E1	2.24304E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.1407E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16703E-1	-7.97772E-1	-9.13227E0	-9.14261E0	4.02927E-3	9.63688E-2	2.73247E1	-3.26878E1	-3.26236E1	2.68581E1	2.23869E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.1332E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.16488E-1	-7.97486E-1	-9.13265E0	-9.14299E0	4.02927E-3	9.62973E-2	2.73123E1	-3.26506E1	-3.259E1	2.68623E1	2.23468E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.13712E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.16846E-1	-7.97701E-1	-9.13253E0	-9.14292E0	3.83854E-3	9.65118E-2	2.73328E1	-3.2675E1	-3.25989E1	2.68551E1	2.21401E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.14232E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.1656E-1	-7.97582E-1	-9.13217E0	-9.14271E0	4.12464E-3	9.63449E-2	2.73189E1	-3.26663E1	-3.26176E1	2.68472E1	2.21401E-9	2.50898E-3	2.50898E-3	6.32386E-3	2.13513E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.16512E-1	-7.97677E-1	-9.13222E0	-9.14299E0	3.91006E-3	9.62973E-2	2.72958E1	-3.26515E1	-3.26393E1	2.68227E1	2.22244E-9	2.51724E-3	2.51724E-3	6.32342E-3	2.13859E-2
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.16417E-1	-7.97844E-1	-9.13224E0	-9.14297E0	3.91006E-3	9.67264E-2	2.73137E1	-3.26174E1	-3.26144E1	2.68051E1					
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.16369E-1	-7.97963E-1	-9.13222E0	-9.14323E0	3.83854E-3	9.66311E-2	2.73478E1	-3.26681E1	-3.26038E1	2.6822E1	2.23608E-9	2.52066E-3	2.52066E-3	6.34164E-3	2.13149E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.16393E-1	-7.98106E-1	-9.13246E0	-9.14319E0	3.8147E-3	9.6488E-2	2.73478E1	-3.26855E1	-3.26398E1	2.68226E1	2.23773E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.14415E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.16464E-1	-7.98011E-1	-9.1326E0	-9.14311E0	3.98159E-3	9.63688E-2	2.73128E1	-3.26649E1	-3.26384E1	2.68412E1	2.23526E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.13513E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16655E-1	-7.9782E-1	-9.13239E0	-9.14307E0	3.76701E-3	9.62257E-2	2.73123E1	-3.26506E1	-3.26206E1	2.68382E1	2.23332E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.12957E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.16417E-1	-7.97677E-1	-9.13239E0	-9.14302E0	3.57628E-3	9.6488E-2	2.7308E1	-3.26431E1	-3.25959E1	2.68707E1	2.24251E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.14598E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.16393E-1	-7.97796E-1	-9.13248E0	-9.14288E0	3.91006E-3	9.60827E-2	2.73234E1	-3.26231E1	-3.26331E1	2.68221E1	2.23623E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.15002E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16393E-1	-7.97725E-1	-9.13248E0	-9.14311E0	3.76701E-3	9.62496E-2	2.72949E1	-3.26464E1	-3.26008E1	2.68217E1	2.24538E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.14232E-2