[Scan]
initial_time=2016-01-18T17:19:28
final_time=2016-01-18T17:19:48
ip_count=19
run=1024
dataset=2
scan=123
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.37166E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.93057E-9
ql3_vset=
ql3_vmon=-9.13246E0
ql3_imon=1.9002E-10
ql4_vset=
ql4_vmon=-9.14309E0
ql4_imon=-7.8547E-11
mult1=-9.77651E-9
mult2=-2.80444E-9
rf_tmon=-5.17934E-3
rf_agc=3.31774E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.43323E-3
ql5_imon=1.64146E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70639E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19472E1
lens5a_imon=1.98415E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12546E2
lens4a_imon=2.05057E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.82413E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04423E1
cs_ea1_imon=2.57248E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31909E0
lens1_imon=2.96674E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03546E1
cs_ea2_imon=1.491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=2.94666E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.29302E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.27436E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14867E1
os_ea1_imon=2.34609E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21064E0
cs_ionrep_imon=1.177E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92018E2
cs_nozzle_imon=1.93716E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.93297E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20382E0
olens4_imon=3.2821E-8
tplens_vset=1.4E-1
tplens_vmon=1.65465E0
tplens_imon=-4.25519E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26182E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26464E1
iondef2_imon=1.58544E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03163E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.59873E-2
ql6_imon=4.06075E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23527E0
ionrepsh_imon=1.75524E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.17846E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48101E0
os_ea2_imon=-6.99496E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06149E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.17371E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11412E1
os_restr2_imon=3.41446E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.23163E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73532E1
iondef1_imon=1.11284E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68238E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71772E1
olens3_imon=5.02414E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81045E-1
olens1_imon=7.73063E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.71402E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82771E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.86921E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.67121E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.85288E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.00068E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=6.1391E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.42264E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07209E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6453E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=9.95969E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63405E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65688E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57671E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.54732E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.5999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.2176E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22702E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.13513E-2
chamber_ion_pmon=2.24012E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16941E-1	-7.97963E-1	-9.13227E0	-9.1428E0	3.52859E-3	9.64165E-2	2.73234E1	-3.26691E1	-3.26331E1	2.68352E1	2.23773E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.14415E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16917E-1	-7.98178E-1	-9.13215E0	-9.14302E0	3.79086E-3	9.65595E-2	2.73486E1	-3.26621E1	-3.26211E1	2.6822E1	2.23818E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.12034E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.17037E-1	-7.97987E-1	-9.13229E0	-9.14302E0	3.79086E-3	9.64642E-2	2.73311E1	-3.26537E1	-3.2606E1	2.68556E1	2.24109E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.13884E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16917E-1	-7.97868E-1	-9.13208E0	-9.14309E0	3.55244E-3	9.62496E-2	2.73387E1	-3.26537E1	-3.26231E1	2.6818E1	2.24155E-9	2.52384E-3	2.52384E-3	6.29665E-3	2.13139E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16894E-1	-7.97749E-1	-9.13208E0	-9.14314E0	3.74317E-3	9.62734E-2	2.73405E1	-3.26633E1	-3.2647E1	2.68442E1	2.23392E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.12413E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16941E-1	-7.97796E-1	-9.13243E0	-9.14309E0	3.83854E-3	9.63211E-2	2.73159E1	-3.26536E1	-3.26194E1	2.6852E1	2.23764E-9	2.51248E-3	2.51248E-3	6.31299E-3	2.15041E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.17013E-1	-7.97725E-1	-9.13229E0	-9.1429E0	3.8147E-3	9.63449E-2	2.73016E1	-3.26531E1	-3.2616E1	2.68514E1	2.2372E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.13698E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.17108E-1	-7.9751E-1	-9.13248E0	-9.14321E0	3.93391E-3	9.62019E-2	2.73143E1	-3.26597E1	-3.25844E1	2.6816E1	2.23583E-9	2.51847E-3	2.51847E-3	6.28056E-3	2.13685E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16894E-1	-7.97892E-1	-9.13231E0	-9.14273E0	3.76701E-3	9.62973E-2	2.73246E1	-3.26691E1	-3.25947E1	2.68076E1	2.24694E-9	2.52757E-3	2.52757E-3	6.34588E-3	2.13884E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16941E-1	-7.97701E-1	-9.13219E0	-9.14314E0	3.88622E-3	9.62257E-2	2.73021E1	-3.26362E1	-3.26014E1	2.6825E1	2.23235E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.13513E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.17108E-1	-7.97987E-1	-9.13188E0	-9.14314E0	3.55244E-3	9.65834E-2	2.74048E1	-3.26236E1	-3.26158E1	2.68316E1	2.21978E-9	2.5199E-3	2.5199E-3	6.35692E-3	2.14256E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.17347E-1	-7.97701E-1	-9.13255E0	-9.14323E0	3.38554E-3	9.64403E-2	2.73664E1	-3.26176E1	-3.26416E1	2.6846E1	2.23487E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.14598E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.17251E-1	-7.97892E-1	-9.13229E0	-9.1434E0	3.48091E-3	9.62019E-2	2.73387E1	-3.26278E1	-3.26182E1	2.6849E1	2.23072E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.13334E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.17227E-1	-7.97939E-1	-9.13243E0	-9.14316E0	3.38554E-3	9.58443E-2	2.73387E1	-3.26188E1	-3.2644E1	2.68322E1	2.23964E-9	2.52599E-3	2.52599E-3	6.32356E-3	2.14598E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.17418E-1	-7.97629E-1	-9.13246E0	-9.14354E0	3.74317E-3	9.59635E-2	2.73424E1	-3.26446E1	-3.26182E1	2.68448E1	2.24304E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.13327E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16727E-1	-7.97796E-1	-9.13255E0	-9.14323E0	3.62396E-3	9.60827E-2	2.73333E1	-3.26464E1	-3.25966E1	2.68286E1	2.23526E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.1407E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16703E-1	-7.97844E-1	-9.13246E0	-9.14285E0	3.29018E-3	9.62973E-2	2.72919E1	-3.26476E1	-3.26014E1	2.68346E1	2.23623E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.12772E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.16917E-1	-7.98106E-1	-9.13215E0	-9.14307E0	3.55244E-3	9.61065E-2	2.73257E1	-3.26596E1	-3.25953E1	2.68331E1	2.23072E-9	2.52473E-3	2.52473E-3	6.29067E-3	2.14091E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.17013E-1	-7.98225E-1	-9.13236E0	-9.1428E0	3.76701E-3	9.60588E-2	2.73069E1	-3.26458E1	-3.26368E1	2.68556E1	2.23487E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.12594E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16774E-1	-7.98082E-1	-9.13246E0	-9.14309E0	3.43323E-3	9.59873E-2	2.73532E1	-3.26464E1	-3.26182E1	2.68238E1	2.24012E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.13513E-2