[Scan]
initial_time=2016-01-18T17:19:55
final_time=2016-01-18T17:20:14
ip_count=19
run=1024
dataset=2
scan=124
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.36773E-8
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=1.95085E-9
ql3_vset=
ql3_vmon=-9.13241E0
ql3_imon=1.81079E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-6.44922E-11
mult1=-9.92494E-9
mult2=-2.7115E-9
rf_tmon=-4.11424E-3
rf_agc=3.34271E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.93391E-3
ql5_imon=1.63859E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.33227E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19454E1
lens5a_imon=2.00254E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.04967E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=2.82917E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04525E1
cs_ea1_imon=2.6042E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36174E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.47369E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84646E1
cs_ef1a_imon=2.94162E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.30088E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11574E1
os_restr1_imon=4.26968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15216E1
os_ea1_imon=2.35366E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21845E0
cs_ionrep_imon=1.16763E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92035E2
cs_nozzle_imon=1.93467E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02055E1
cs_anode1_imon=2.94954E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=3.29286E-8
tplens_vset=1.4E-1
tplens_vmon=1.66607E0
tplens_imon=-6.5024E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26024E1
iondef3_imon=1.50289E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26478E1
iondef2_imon=1.57571E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03139E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.62257E-2
ql6_imon=4.05203E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26111E0
ionrepsh_imon=1.73721E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.337E1
lens5b_imon=2.19504E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75216E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44016E0
os_ea2_imon=-8.32879E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0619E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71474E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04615E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92619E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.41157E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.31803E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.24136E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73181E1
iondef1_imon=1.1132E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68377E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.94273E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=7.70665E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.68968E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02119E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56681E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.53983E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8272E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86843E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.42607E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93767E3
defgrida_imon=6.30132E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.42967E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4166E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33317E1
os_fil1_imon=9.39735E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06993E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63862E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.94485E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63267E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65582E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.53802E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.69942E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.93839E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22753E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.13884E-2
chamber_ion_pmon=2.24304E-9
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.64097E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=223
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.16464E-1	-7.98273E-1	-9.13253E0	-9.14309E0	3.43323E-3	9.57966E-2	2.7298E1	-3.26691E1	-3.26142E1	2.68424E1	2.24347E-9	2.52169E-3	2.52169E-3	6.35059E-3	2.13685E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09317E0	-8.16822E-1	-7.98273E-1	-9.13243E0	-9.14304E0	3.74317E-3	9.61065E-2	2.7315E1	-3.26702E1	-3.26188E1	2.68384E1	2.23583E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.13502E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09333E0	-8.16584E-1	-7.98082E-1	-9.13258E0	-9.14309E0	3.71933E-3	9.59873E-2	2.733E1	-3.26324E1	-3.26202E1	2.68447E1	2.24049E-9	2.51519E-3	2.51519E-3	6.30323E-3	2.13098E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09333E0	-8.17013E-1	-7.9813E-1	-9.13243E0	-9.14314E0	3.67165E-3	9.59873E-2	2.73177E1	-3.26855E1	-3.26008E1	2.68454E1	2.23076E-9	2.51393E-3	2.51393E-3	6.33388E-3	2.13135E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-8.16655E-1	-7.98035E-1	-9.13248E0	-9.14326E0	3.38554E-3	9.59873E-2	2.73189E1	-3.26753E1	-3.26236E1	2.68184E1	2.23235E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.12587E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-8.16607E-1	-7.98321E-1	-9.13255E0	-9.14323E0	3.50475E-3	9.58443E-2	2.73181E1	-3.26779E1	-3.25759E1	2.68304E1	2.24012E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.13698E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09271E0	-8.16536E-1	-7.9875E-1	-9.13255E0	-9.14307E0	3.26633E-3	9.59158E-2	2.73351E1	-3.26765E1	-3.26002E1	2.68244E1	2.24012E-9	2.51919E-3	2.51919E-3	6.33388E-3	2.14748E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09356E0	-8.16822E-1	-7.98512E-1	-9.13227E0	-9.14311E0	3.40939E-3	9.61304E-2	2.7354E1	-3.26315E1	-3.26337E1	2.68271E1	2.23665E-9	2.51359E-3	2.51359E-3	6.31858E-3	2.12768E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16441E-1	-7.98225E-1	-9.13236E0	-9.14328E0	3.74317E-3	9.61304E-2	2.73025E1	-3.26724E1	-3.2632E1	2.68467E1	2.23138E-9	2.52088E-3	2.52088E-3	6.32222E-3	2.13791E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.17251E-1	-7.98321E-1	-9.13258E0	-9.14321E0	3.60012E-3	9.61781E-2	2.72986E1	-3.26655E1	-3.26296E1	2.68505E1	2.23851E-9	2.51468E-3	2.51468E-3	6.3074E-3	2.13979E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16941E-1	-7.98202E-1	-9.13246E0	-9.14321E0	3.62396E-3	9.6035E-2	2.73105E1	-3.2653E1	-3.26158E1	2.68388E1	2.24347E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.12775E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16274E-1	-7.98416E-1	-9.13265E0	-9.14321E0	3.62396E-3	9.6035E-2	2.73033E1	-3.26476E1	-3.26368E1	2.68431E1	2.23863E-9	2.51248E-3	2.51248E-3	6.31858E-3	2.1428E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16536E-1	-7.98154E-1	-9.13265E0	-9.14295E0	3.91006E-3	9.61065E-2	2.7364E1	-3.26753E1	-3.2605E1	2.68389E1	2.23526E-9	2.51334E-3	2.51334E-3	6.34037E-3	2.13884E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16488E-1	-7.98154E-1	-9.13243E0	-9.14311E0	3.71933E-3	9.60588E-2	2.72971E1	-3.26719E1	-3.26144E1	2.68462E1	2.22945E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.13884E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16822E-1	-7.97915E-1	-9.13234E0	-9.14307E0	3.86238E-3	9.64165E-2	2.73322E1	-3.26537E1	-3.26124E1	2.6836E1	2.23041E-9	2.51225E-3	2.51225E-3	6.32386E-3	2.13884E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16512E-1	-7.97892E-1	-9.13236E0	-9.14314E0	3.93391E-3	9.65595E-2	2.73333E1	-3.26675E1	-3.26134E1	2.68376E1	2.24109E-9	2.51443E-3	2.51443E-3	6.29098E-3	2.13884E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16345E-1	-7.97939E-1	-9.1321E0	-9.14304E0	3.71933E-3	9.63211E-2	2.73333E1	-3.26554E1	-3.26482E1	2.6798E1	2.23818E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.13884E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16679E-1	-7.97892E-1	-9.13262E0	-9.14319E0	3.95775E-3	9.62734E-2	2.73187E1	-3.26526E1	-3.26284E1	2.68346E1	2.2406E-9	2.52169E-3	2.52169E-3	6.29128E-3	2.13867E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16464E-1	-7.9782E-1	-9.13267E0	-9.14278E0	3.93391E-3	9.60588E-2	2.73502E1	-3.26615E1	-3.26374E1	2.68208E1	2.23964E-9	2.51847E-3	2.51847E-3	6.34518E-3	2.1405E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16464E-1	-7.97915E-1	-9.13241E0	-9.14295E0	3.93391E-3	9.62257E-2	2.73181E1	-3.26478E1	-3.26024E1	2.68377E1	2.24304E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.13884E-2