[Scan]
initial_time=2016-01-18T17:20:22
final_time=2016-01-18T17:20:41
ip_count=19
run=1024
dataset=2
scan=125
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09325E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.36469E-8
ql2_vset=
ql2_vmon=-7.9782E-1
ql2_imon=1.9657E-9
ql3_vset=
ql3_vmon=-9.13253E0
ql3_imon=2.06673E-10
ql4_vset=
ql4_vmon=-9.14359E0
ql4_imon=-7.9298E-11
mult1=-9.71631E-9
mult2=-2.76053E-9
rf_tmon=-5.61194E-3
rf_agc=3.24083E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.33786E-3
ql5_imon=1.67241E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61807E0
bslens_imon=2.51252E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19983E1
lens5a_imon=2.0184E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.04783E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54193E1
cs_ef1b_imon=2.81656E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.0202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04628E1
cs_ea1_imon=2.60384E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35033E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03462E1
cs_ea2_imon=1.4773E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84526E1
cs_ef1a_imon=2.95387E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.29267E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1152E1
os_restr1_imon=4.26968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.3551E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.17736E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91978E2
cs_nozzle_imon=1.93589E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=2.95135E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=3.28145E-8
tplens_vset=1.4E-1
tplens_vmon=1.75739E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26134E1
iondef3_imon=1.4827E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.55841E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03142E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.61304E-2
ql6_imon=4.04738E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=1.73793E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33339E1
lens5b_imon=2.16548E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.13551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44376E0
os_ea2_imon=-6.81471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06193E2
lens4b_imon=2.0081E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.15785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11177E1
os_restr2_imon=3.40869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.28703E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.24677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73249E1
iondef1_imon=1.12077E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68484E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.00671E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81164E-1
olens1_imon=7.74398E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-1.77618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02115E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=2.81013E-1
window_imon=-8.49956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82762E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.86885E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.42246E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.71229E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.26024E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23314E0
defgridb_imon=5.98048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33317E1
os_fil1_imon=9.42997E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07479E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63835E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=9.95591E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64612E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65135E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.76207E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.7252E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.07965E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2282E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.13698E-2
chamber_ion_pmon=2.23429E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.43675E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16512E-1	-7.98106E-1	-9.13239E0	-9.14295E0	3.52859E-3	9.61065E-2	2.73529E1	-3.2672E1	-3.26154E1	2.68383E1	2.24012E-9	2.52428E-3	2.52428E-3	6.3514E-3	2.13698E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.1656E-1	-7.98321E-1	-9.13239E0	-9.14307E0	3.62396E-3	9.62019E-2	2.73577E1	-3.26585E1	-3.25923E1	2.68444E1	2.24442E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.1332E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16369E-1	-7.98273E-1	-9.1326E0	-9.14309E0	3.67165E-3	9.62019E-2	2.73607E1	-3.2615E1	-3.26312E1	2.68458E1	2.24359E-9	2.52362E-3	2.52362E-3	6.30182E-3	2.14091E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09294E0	-8.16345E-1	-7.98011E-1	-9.13243E0	-9.14311E0	3.71933E-3	9.62973E-2	2.73261E1	-3.26434E1	-3.2638E1	2.6825E1	2.23637E-9	2.51287E-3	2.51287E-3	6.31798E-3	2.13493E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16369E-1	-7.98082E-1	-9.13236E0	-9.14333E0	3.76701E-3	9.61304E-2	2.73327E1	-3.2647E1	-3.26038E1	2.68322E1	2.2372E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.14442E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16703E-1	-7.97987E-1	-9.13253E0	-9.14371E0	3.31402E-3	9.6488E-2	2.73094E1	-3.26327E1	-3.26499E1	2.68346E1	2.2372E-9	2.52647E-3	2.52647E-3	6.29098E-3	2.13698E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16774E-1	-7.97915E-1	-9.1326E0	-9.14354E0	3.45707E-3	9.65357E-2	2.72856E1	-3.26402E1	-3.26236E1	2.68316E1	2.24558E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.1466E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.1656E-1	-7.98011E-1	-9.13253E0	-9.1435E0	3.45707E-3	9.62973E-2	2.73105E1	-3.26488E1	-3.2587E1	2.68478E1	2.23583E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.1405E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.16321E-1	-7.97844E-1	-9.13236E0	-9.14333E0	3.71933E-3	9.62019E-2	2.73375E1	-3.26278E1	-3.26014E1	2.68112E1	2.23332E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.12772E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.1625E-1	-7.97987E-1	-9.13219E0	-9.14323E0	3.50475E-3	9.65357E-2	2.73153E1	-3.26146E1	-3.26344E1	2.68298E1	2.22974E-9	2.52809E-3	2.52809E-3	6.35223E-3	2.13712E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.1625E-1	-7.97939E-1	-9.13236E0	-9.14321E0	3.67165E-3	9.63449E-2	2.73424E1	-3.26591E1	-3.26308E1	2.68569E1	2.23964E-9	2.51739E-3	2.51739E-3	6.33977E-3	2.1405E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16464E-1	-7.98297E-1	-9.13236E0	-9.14338E0	3.67165E-3	9.61781E-2	2.73315E1	-3.26212E1	-3.26104E1	2.68322E1	2.23235E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.13513E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.16584E-1	-7.98011E-1	-9.13253E0	-9.14314E0	3.52859E-3	9.60112E-2	2.73257E1	-3.26396E1	-3.26101E1	2.68238E1	2.24694E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.13698E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.1656E-1	-7.98011E-1	-9.13239E0	-9.14319E0	3.88622E-3	9.62019E-2	2.73754E1	-3.26807E1	-3.26032E1	2.68232E1	2.23915E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.13142E-2
1.8E1	6.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16631E-1	-7.97725E-1	-9.13246E0	-9.14326E0	3.45707E-3	9.65118E-2	2.73345E1	-3.26981E1	-3.26536E1	2.68286E1	2.23818E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.13698E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.16417E-1	-7.97796E-1	-9.13239E0	-9.14328E0	3.57628E-3	9.66072E-2	2.73198E1	-3.26915E1	-3.26107E1	2.68238E1	2.23487E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.14964E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-8.16584E-1	-7.97868E-1	-9.13217E0	-9.14316E0	3.33786E-3	9.63688E-2	2.73314E1	-3.26438E1	-3.25917E1	2.68478E1	2.22945E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.13327E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09356E0	-8.1656E-1	-7.97963E-1	-9.13212E0	-9.14333E0	3.45707E-3	9.65834E-2	2.73322E1	-3.26868E1	-3.26543E1	2.68238E1	2.24109E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.1407E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09309E0	-8.16512E-1	-7.97915E-1	-9.13243E0	-9.14316E0	3.19481E-3	9.64165E-2	2.736E1	-3.26526E1	-3.2629E1	2.68302E1	2.23202E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.13867E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09325E0	-8.16798E-1	-7.9782E-1	-9.13253E0	-9.14359E0	3.33786E-3	9.61304E-2	2.73249E1	-3.26446E1	-3.26134E1	2.68484E1	2.23429E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.13698E-2